• Title/Summary/Keyword: Micro-actuator

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Design of Ultrasonic Vibration Device using PZT Actuator for Precision Laser Machining (압전구동기를 이용한 정밀 가공용 초음파 진동장치 설계)

  • Kim, W.J.;Fei, L.;Cho, S.H.;Park, J.K.;Lee, M.G.
    • Laser Solutions
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    • v.14 no.2
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    • pp.8-12
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    • 2011
  • As the aged population grows around the world, many medical instruments and devices have been developed recently. Among the devices, a drug delivery stent is a medical device which requires precision machining. Conventional drug delivery stent has problems of residual polymer and decoating because the drug is coated on the surface of stent with the polymer. If the drug is impregnated in micro hole array on the surface of the stent, the problem can be solved. Micro sized holes are generally fabricated by laser machining; however, the fabricated holes do not have an enough aspect ratio to contain the drug or a good surface finish to deliver it to blood vessel tissue. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head, the laser spot on the workpiece will vibrate vertically because objective lens in the eyepiece shakes by the mechanism's vibration. According to the former researches, the vibrating frequency over 20kHz and amplitude over 500nm are preferable. The vibration mechanism has cylindrical guide, hollowed PZT and supports. In the cylinder, the eyepiece is mounted. The cylindrical guide has upper and low plates and side wall. The shape of plates and side wall are designed to have high resonating frequency and large amplitude of motion. The PZT also is selected to have high actuating force and high speed of motion. The support has symmetrical and rigid characteristics.

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A Microcatuator for High-Density Hard Disk Drive Using Skewed Electrode Arrays (경사 전극 배열을 이용한 고밀도 하드 디스크의 마이크로 구동부 제작)

  • Choi, Seok-Moon;Park, Sung-Jun
    • Journal of Institute of Convergence Technology
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    • v.1 no.2
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    • pp.6-15
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    • 2011
  • This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

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Experimental Evaluation of Fatigue Behavior and Interlaminar Phase in the Lightweight Piezoelectric Ceramic Composite Actuator Using the Ultrasonic C-scan Inspection (초음파 C-스캔 탐상을 이용한 경량 압전세라믹 복합재료 작동기의 피로거동과 계면변화의 관계 연구)

  • Kim Cheol-Woong;Nam In-Chang;Yoon Kwang-Joon
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1332-1336
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    • 2005
  • It could make the LIghtweight Piezoelectric Composite Actuator (LIPCA) damageable by the cyclic large deformation. If the progressive microvoid coalescence of LIPCA interlaminar took place, the decrease of the stiffness and the weakness of stress transmission and fiber bridging effect would make the fatigue characteristics worse suddenly. Therefore, it is required to study the variation of fatigue behavior and interlaminar condition in LIPCA under resonant frequencies. These studies such as the changeable fatigue phase and interlaminar behavior of LIPCA affected by the resonant frequencies should be carried out due to the strong anisotropy of CFRP layer. Hence, these studies are as follows. 1) The residual stresses distribution of interlaminar in LIPCA using the Classical Lamination Theory (CLT). 2) Comparative analysis of interlaminar behavior for the intact LIPCA versus LIPCA containing an artificial delamination during resonant frequency.

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Development of a Shear Testing Machine for a Miniature Single Solder Ball Joint using Piezoelectric Loading Device (피에조를 이용한 초소형 단일 솔더볼 연결부의 전단 시험장치 개발)

  • Kwon, Yong-Sang;Ko, Guk-Jong;Kim, Ho-Gyeong
    • Tribology and Lubricants
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    • v.26 no.1
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    • pp.44-51
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    • 2010
  • A miniature shear testing machine was designed and developed, adopting a piezoelectric actuator with mechanical advantage using 4 levers in order to investigate shear behavior of a small solder ball. The final output displacement was initially expected to be 2.88 mm without load resistance, considering the lever ratio of 24 and the piezo displacement of 0.12 mm with an exciting voltage of 10 V. However, the final plunger displacement ${\Delta}{\upsilon}$ can be expected as ${\Delta}{\upsilon}=2.88-3.04{\times}10^{-4}F$ as a function of piezoelectric force F due to the stiffness of various levers and connectors and piezo actuator. The shear behavior of lead-free solder ball in diameter of $760{\mu}m$ was successfully investigated in a speed range of 2 mm/s~0.0035 mm/s using this designed device.

Design and fabrication of microgripper using thermal actuator and SU-8 (열 구동 엑츄에이터와 SU-8을 이용한 마이크로 그리퍼 설계 및 제조)

  • Jung, Seoung-Ho;Park, Joon-Shik;Lee, Min-Ho;Park, Sang-Il;Lee, In-Kyu
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1613-1616
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    • 2007
  • A microgripper using thermal actuator and SU-8 polymer was designed and fabricated to manipulate cells and microparts. A chip size of a microgripper was 3 mm ${\times}$ 5 mm. The thermally actuated microgripper consisted of two couples of hot and cold arm actuators. The high thermal expansion coefficient, 52 $ppm/^{\circ}C$, of SU-8 compared to silicon and metals, allows the actuation of the microgripper. Thickness and width of SU-8 as an end-effector were 26 ${\mu}m$ and 80 ${\mu}m$, respectively. Initial gap between left jaw and right jaw was 120 ${\mu}m$. The ANSYS program as FEM tool was introduced to analyze the thermal distribution and displacement induced by thermal actuators. $XeF_2$ gas was used for isotropic silicon dry etching process to release SU-8 end-effector. Mechanical displacements of the fabricated microgripper were measured by optical microscopy in the range of input voltage from 0 V to 2.5 V. The maximum displacement between two jaws of a microgripper Type OG 1_1 was 22.4 ${\mu}m$ at 2.5 V.

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Nonlinear large deformation dynamic analysis of electroactive polymer actuators

  • Moghadam, Amir Ali Amiri;Kouzani, Abbas;Zamani, Reza;Magniez, Kevin;Kaynak, Akif
    • Smart Structures and Systems
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    • v.15 no.6
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    • pp.1601-1623
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    • 2015
  • Electroactive polymers have attracted considerable attention in recent years due to their sensing and actuating properties which make them a material of choice for a wide range of applications including sensors, biomimetic robots, and biomedical micro devices. This paper presents an effective modeling strategy for nonlinear large deformation (small strains and moderate rotations) dynamic analysis of polymer actuators. Considering that the complicated electro-chemo-mechanical dynamics of these actuators is a drawback for their application in functional devices, establishing a mathematical model which can effectively predict the actuator's dynamic behavior can be of paramount importance. To effectively predict the actuator's dynamic behavior, a comprehensive mathematical model is proposed correlating the input voltage and the output bending displacement of polymer actuators. The proposed model, which is based on the rigid finite element (RFE) method, consists of two parts, namely electrical and mechanical models. The former is comprised of a ladder network of discrete resistive-capacitive components similar to the network used to model transmission lines, while the latter describes the actuator as a system of rigid links connected by spring-damping elements (sdes). Both electrical and mechanical components are validated through experimental results.

Plate Spring Design of a Micro Actuator Using Topology-parameter Optimization (위상-치수 최적화에 의한 마이크로 구동기 판 스프링의 설계)

  • Lee, Jong-Jin;Lee, Ho-Cheol;Yoo, Jeong-Hoon
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.17 no.12
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    • pp.1246-1253
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    • 2007
  • The recent issue of optical pickup actuators is to apply optical storage devices to mobile devices such as a cellular phone and PDA. It requires actuators to become smaller than conventional types. As the size becomes smaller, the magnetic force is reduced and the assembly of optical pickup actuators becomes more difficult. In addition, its dynamic characteristics are changed. In this paper, methods to improve magnetic forces and dynamic characteristics are suggested and the optimal result of the plate spring design is obtained. A diamond shape magnet and the fine pattern coil (FPC) are used to improve magnetic forces and damping elements are attached to decrease the peak magnitude of the mode instead of using structural damping, mostly for the purpose of improving the accuracy of the finite element simulation. To get more stable dynamic characteristics than conventional ones, a plate spring is applied to the optical pickup actuator and it is optimized with topology and parameter optimization to obtain the concept and the detail design, respectively.

Influence of imperfection on the smart control frequency characteristics of a cylindrical sensor-actuator GPLRC cylindrical shell using a proportional-derivative smart controller

  • Zare, Reza;Najaafi, Neda;Habibi, Mostafa;Ebrahimi, Farzad;Safarpour, Hamed
    • Smart Structures and Systems
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    • v.26 no.4
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    • pp.469-480
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    • 2020
  • This is the first research on the smart control and vibration analysis of a Graphene nanoplatelets (GPLs) Reinforced Composite (GPLRC) porous cylindrical shell covered with piezoelectric layers as sensor and actuator (PLSA) in the framework of numerical based Generalized Differential Quadrature Method (GDQM). The stresses and strains are obtained using the First-order Shear Deformable Theory (FSDT). Rule of the mixture is employed to obtain varying mass density and Poisson's ratio, while the module of elasticity is computed by modified Halpin-Tsai model. The external voltage is applied to sensor layer and a Proportional-Derivative (PD) controller is used for sensor output control. Governing equations and boundary conditions of the GPLRC cylindrical shell are obtained by implementing Hamilton's principle. The results show that PD controller, length to radius ratio (L/R), applied voltage, porosity and weight fraction of GPL have significant influence on the frequency characteristics of a porous GPLRC cylindrical shell. Another important consequence is that at the lower value of the applied voltage, the influence of the smart controller on the frequency of the micro composite shell is much more significant in comparison with the higher ones.

An electrowetting-based actuator for dispensing micro fluids (마이크로 유체 토출을 위한 전기 습윤 현상 기반의 Actuator)

  • Kim, Han-Sang;Sung, Tan-Il;Choi, Hong-Soon;Park, Il-Han
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1009-1010
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    • 2011
  • 마이크로 스케일의 유체를 dispensing 하기 위한 방법으로 electrowetting 현상을 이용한다. 작은 물방울은 높은 표면에너지에 의해 좁은 관 내부에서 떨어지지 않고 정적인 평형상태를 이루게 된다. 이때, 유체 내부에 가느다란 전극을 삽입하고, 외부에 금속 평판을 설치한 후 두 전극 사이에 일정한 전압을 인가할 경우 sharp edge의 형태를 지니는 전극의 끝단에서 매우 높은 전계의 변화가 발생한다. 이 때, 작은 물방울의 electrowetting 현상에 의한 내부의 압력 변화를 수치 해석적으로 예측하고 이로 인한 형상의 변화 및 물방울의 dispensing 현상을 실험적으로 관찰한다.

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Accurate Positioning of Piezoelectric Actuator for Fast Tool Servo in Ultraprecision Machine (초정밀 가공기용 FTS를 위한 압전 액츄에이터의 위치제어)

  • 김호상;정병철;송승훈;김태형
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.446-449
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    • 1995
  • In this paper, the accurate end position control method of ultraprecision machine tool post using piezoelectric material as an micro positonong devics is presented. This method employs the classical PID feedback and uses an additional notch filter which eliminates the resonance characteristics of controlled plant. And the simple predictor is added to make use of the future value of desired input for better tracking performance. To show the feasibilty of proposed method, the PC-based experimental apparacy can be obtained. Using method, Al specimen of diameter 100mm was cut under practical machining condition to test the practicability of proposed method.

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