• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.198-204
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• 2005

For precise micro V-grooving, ultrasonic elliptical vibration cutting (UEVC) is proposed using two parallel piezoelectric actuators, which are energized by sinusoidal voltages with a phase difference of 90 degrees. Experimental setup is composed of stacked PZT actuators, a single crystal diamond cutting tool, and a precision motorized xyz stage. It is found that the chip formed in the process of UEVC is discontinuous because of the periodic contacts and non-contacts occurring between the tool and workpiece. It is experimentally observed that the cutting force in the process of UEVC significantly reduces compared to the ordinary non-vibration cutting. In addition, the creation of burr during UEVC is significantly suppressed, which is attributable to the decrease in the specific cutting energy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.516-519
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• 2002

In this paper, a new type of inchworm motion actuator is introduced. This is consisted of two piezoelectric ceramics; one is for moving the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the system is good enough for the high precision motion. Since the system is more compact than the conventional system using three piezoelectric ceramics, it is applicable fur the micro-machine or MEMS. However, the effort for reducing the vibration, velocity discrepancy in the motion direction, and compensating the hysteresis behavior is additionally needed.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.137-143
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• 2002

This paper presents the In-process compensation to control cutter runout and improve the machined surface quality. Cutter runout compensation system consists of the micro-positioning servo system with piezoelectric actuator which is embeded in the sliding table to manipulate radial depth of cut in real-time. Cutting force feedback control was proposed in the angle domain based upon repetitive learning control strategy to eliminate chip load variation in end milling process. Micro-positioning control due to adaptive actuation force response improves the machined surface quality by compensation runout effect induced cutting force variation. This result will provide lots of information to build-up the preciswion machining technology.

• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.3
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• pp.133-139
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• 2007

Future MEMS systems will be composed of larger varieties of devices with very different functionality such as electronics, mechanics, optics and bio-chemistry. Integration technology of heterogeneous devices must be developed. This article first deals with the current development trend of new fabrication technologies; those include self-assembling of parts over a large area, wafer-scale encapsulation by wafer-bonding, nano imprinting, and roll-to-roll printing. In the latter half of the article, the concept towards the heterogeneous integration of devices and functionality into micro/nano systems is described. The key idea is to combine the conventional top-down technologies and the novel bottom-up technologies for building nano systems. A simple example is the carbon nano tube interconnection that is grown in the via-hole of a VLSI chip. In the laboratory level, the position-specific self-assembly of nano parts on a DNA template was demonstrated through hybridization of probe DNA segments attached to the parts. Also, bio molecular motors were incorporated in a micro fluidic system and utilized as a nano actuator for transporting objects in the channel.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.154-155
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• 2007

Put Recently, development of micro valves that operate by compressed air has received significant attention in the fields of the micro fluid chip for medical applications or production lines of semi-conduct chip for electronic goods. Especially it is required that high-speed responsibility and lower power in optimal design of these micro valves. The primary objective of this study is to compare the optimally designed Solenoid Valve with the actually produced one which can highly improve the efficiency by providing optimal current according to mechanical load.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.413-418
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• 2004

Recently, the development of mobile devices demands information storage systems to use micro drive devices. 1-inch micro drive hard disk uses the load/unload(L/UL) technology to increase area recording density and reduce power consumption. Because micro drive has light actuator, effects of the flexible cable that is ignored in 3.5-inch hard disk drive is important to load/unload performances. In this paper, effects of flexible cable on load/unload performances are studied.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.191-194
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• 2002

In optical pick-up, optical components such as objective lens, collimator, mirror, laser diode and photo diode are mounted on the pick-up base. These components must keep their original position during operation for proper transmittance of information from laser diode to optical disk and back to photo diode. However, micro thermal deformation of pick-up base which is induced by thermal environment during operation can deteriorate the performance of optical pick-up. Therefore, it is important to measure and analyze the thermal deformation behavior of pick-up base under thermal environment. In the present study, a measurement system using holographic interferometry was designed to measure micro thermal deformation of pick up base. The measurement system was verified by using the deformation of cantilever with prescribed motion actuated by PZT with 1 nm resolution. Interferometric measurement was compared quantitatively with that induced by PZT actuator. Finally, micro thermal deformation of pick-up base under actual thermal environment was measured using the present holographic interferometry and the results were analysed.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1924-1926
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• 2001

A novel wet release process ($\mu$ CARP - Micro Channel Assisted Release Process) for releasing an extreme large-area plate structure without etching hole is proposed and experimented. Etching holes in conventional process reduce a effective area and degrade an optical characteristics by a diffraction. In addition, as the area of a released structure increases, the stietion becomes more serious. The proposed process resolves these problems by the introduction of a micro fluidic channel beneath the structure which will be released. In this paper, a 5 mm${\times}$5mm-single crystal silicon plate structure was released by the proposed $\mu$CARP without etch holes on the structure. The variation in etching time with respect to the of the introduced micro channel is also examined. This process is expected to be beneficial for the actuator of a nano-scale data storage and the scanning mirror.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.11
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• pp.1221-1227
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• 2012

As demands on micro-products increase significantly with raising functional integration and increasing complexity, microfoming attracts a lot of attention in the manufacture of micro-products. Since the conventional big forming systems are not adequate to achieve sufficient tolerances of micro-scale parts, it is necessary to reduce the scale of the forming equipment and devices. In addition, understandings on the size effects, which exist in the material behavior and process characterization of microforming processes, need to be expanded. In this study, a miniaturized forming system based on the ball screw and servo motor actuator was developed for the efficient micro-parts production. In addition, tensile tests and cylindrical upsetting experiments were performed to evaluate the performance of the microforming system and to investigate the flow stress and friction size effects in microforming processes.

• Transactions on Electrical and Electronic Materials
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• v.11 no.2
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• pp.65-68
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• 2010

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.