• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.188-188
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• 2000

DLC (Diamond-Like Carbon) 박막은 높은 경도와 가시광선 및 적외선 영역에서의 광 투과도, 전기적 절연성, 화학적 안정성 및 저마찰.내마모 특성 등의 우수한 물리.화학적인 물성을 갖고 있기 때문에 여러 분야의 응용연구가 이루어지고 있다. 이러한 DLC 박막을 제작하는 과정에는 여러 가지가 있으나, 본 연구에서는 ECR-PECVD electron cyclotron resonance plasma enhanced chemical vapor deposition) 방법을 사용하였다. 이것은 최근에 많이 이용되고 있는 방법으로, 이온화률이 높을뿐만 아니라 상온에서도 성막이 가능하고 넓은 진공도 영역에서 플라즈마 공정이 가능한 장점이 있다. 기판으로는 4" 크기의 S(100)를 사용하였고, 박막을 제작하기 전에 진공 중에서 플라즈마 전처리를 하였다. 플라즈마 전처리는 Ar 가스를 150SCCM 주입시켜 5$\times$10-1 torr 의 진공도를 유지시키면서, ECR power를 700W로 고정하고, 기판 bias 전압을 -300 V로 하여 5분 동안 기판을 청정하였다. DLC 박막은 ECR power를 700W. 가스혼합비와 유량을 CH4/H2 : 10/100 SCCM, 증착시간을 2시간으로 고정하고, 기판 bias 전압을 0, -50, -75, -100, -150, -200V로 변화시켜가면서 제작하였다. 이때 ECR 소스로부터 기판까지의 거리는 150mm로 하였고, 진공도는 2$\times$10-2torr 였으며, 기판 bias 전압은 기판에 13.56 MHz의 RF power를 연결하여 RF power에 의해서 유도되는 negative DC self bias 전압을 이용하였다. 제작된 박막을 Auger electron spectroscopy, elastic recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권8호
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• pp.580-586
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• 1999

Aging characteristics of 13 years service-aged distribution cable terminations which dismounted from 3 regions were investigated by material characterization and electrical test. All dismounted terminations have propagating micro-cracks on the surface of weathershed and chalking fillers from bulk. Elemental analysis of these terminations showed that the carbon was decreased and the oxygen was increased on the surface of weathershed due to a little oxidation reaction. Contact angle of terminations was abnormally increased with time. In the analysis of anti-oxidation ability and chemical structure, there were no differences between new and dismounted terminations. All terminations showed satisfactory results in electrical test. Therefore, itcan be considered that aging is only propagating on the surface of dismounted terminations. Also, it was confirmed that environmental factors such as UV, pollution and salt have an effect on the aging through the observation of polymer composition change.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권12호
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• pp.685-690
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• 2000

Multiple-lightning impulse currents are a general feature of the lightning ground f=flash. It is therefore necessary for lightning arresters used in power systems to be estimated by applying not only a single-lightning impulse current but also a multiple-lightning impulse currents. This paper presents the effects of multiple-lightning impulse currents on deterioration of ZnO arrester blocks. The multiple-lightning impulse generator which can produce quadruple 8/20$[\mus]$ 5[kA] with separation time of 30~120[ms] is designed and fabricated. The total energy applied to the arrester block at each impulse is about 1,200[J]. In experiment, various parameters such as leakage current component, reference voltage, and temperature are measured with the number of applied impulse current. Also, micro-structure changes of the ZnO blocks after applying the single and the multiple-lightning impulse currents of 200 times are compared. The experimental results indicate that the types of arrester blocks are more vulnerable to deterioration or damage by multiple-lightning impulse currents.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.500-503
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• 1997

In this paper, we investigate the control methodology of inverter Airconditioner, using the three dimensional vector scheme. The method of three dimensional vector aims at the determination of optimal switching patterns for PWM to reduce switching loss and to improve the performance supplied voltage. The induction motors are widely used for home Airconditioners. These motors can be classified into two types: on or off control of Airconditioner and the speed control of motor. For speed control of motors, generally PWM methods are used. The PWM method based upon the modulation of triangular wave can not afford to supply line voltage to the motor sufficiently because of the capacity of processing speed of micro processors. Therefore airconditioner can not be operated efficiently. This problem can be solved with the method of three dimensional vector since it can increase the supplied voltage and maximum operating frequency of motor to 173V and 96Hz, respectively. As the result, this method shows 10 - 15% increase of voltage and 10% increase of operating frequency over the modulation of triangular wave. According to a theoretical study, the number of switching in the method of three dimensional vector is smaller than that of the modulation of triangular wave. The power consumption can be reduced and the supplied voltage can be increased. In other words, the efficiency of Airconditioner can be improved. We show that the method of three dimensional vector can supply higher voltage than the modulation of triangular method through the experiments and verify the degree of improvement of efficiency theoretically.

• 제어로봇시스템학회논문지
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• 제10권3호
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• pp.286-293
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• 2004

This paper presents the result of a study on the starter control for a turbo generator. Because a starter in gear box type turbo-generator system is composed of gearbox and brush DC motor, it should be replaced with High Speed Generator(HSG)) in HSG type Turbo-generator. There-ore, it is necessary to design a new starting algorithm and starter. In gearbox type system, brush DC motor is rotated to the designed speed using low voltage-high current battery power. After brush DC motor speed is increased to several times by gearbox, gas turbine engine can be rotated to designed starting speed. If we implement a starter with High Speed Generator(HSG), it is necessary to drive high-speed generator to high-speed motor. High-speed generator with permanent magnet on rotor has a low leakage inductance fur driving high-speed rotation, and it is necessary high DC link voltage for inverter when High-speed generator is driven to high speed. This paper presents result of development of the boost converter for converting high voltage DC from low battery voltage and design of the inverter for controlling a high frequency current to be injected to motor winding. Also, we show performance of the designed starter by driving the turbo generator.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.622-627
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• 2003

The existing remote control system have some inherent disadvantage of direct control in the limit range. In some special cases, for example, a power apparatus, an unmanned factory, a nuclear factory, a security management system, the tele-operation is needed to control remote robot without limit space. This field is based on the Internet communication. Because the Internet is constructed all over the world. And it is possible that we control remote mobile robot in the long distance. In this paper, we developed a remote control system. This system is divided into two primary parts. These are local site and remote site. There are the moving robot and web server in the remote site and there is the robot control device in local site. The moving robot is moved by two stepper motors and the robot control device consists of SA-1100 micro controller and embedded Linux. And this controller is an embedded system. Public personal computer which is connected the Internet is used for the web server. The web server provides the mobile robot control interface program to the remote controller and captures the image for feedback information. In the whole system, a robot control device is connected with moving robot and web server through the Internet. So the operator can control the moving robot in the distance through the Internet.

• 마이크로전자및패키징학회지
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• 제24권4호
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• pp.9-17
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• 2017

In these days, MEMS (micro-electro-mechanical system) devices become the crucial sensor components in mobile devices, automobiles and several electronic consumer products. For MEMS devices, the packaging determines the performance, reliability, long-term stability and the total cost of the MEMS devices. Therefore, the packaging technology becomes a key issue for successful commercialization of MEMS devices. As the IoT and wearable devices are emerged as a future technology, the importance of the MEMS sensor keeps increasing. However, MEMS devices should meet several requirements such as ultra-miniaturization, low-power, low-cost as well as high performances and reliability. To meet those requirements, several innovative technologies are under development such as integration of MEMS and IC chip, TSV(through-silicon-via) technology and CMOS compatible MEMS fabrication. It is clear that MEMS packaging will be key technology in future MEMS. In this paper, we reviewed the recent development trends of the MEMS packaging. In particular, we discussed and reviewed the recent technology trends of the MEMS bonding technology, such as low temperature bonding, eutectic bonding and thermo-compression bonding.

• 한국레이저가공학회지
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• 제17권2호
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• pp.5-10
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• 2014

Aluminum has been widely used in the electric applications because of light metals. When mechanical element is periodically moving with contacting other surfaces, the anodizing process for aluminum is useful for avoiding the abrasive damage. The anodized element has quietly different characteristics with respect to the distribution of hardness and crystal structure. In this work, the laser drilling of anodized surface is studied experimentally. Fusion drilling method - laser drilling with inert gas blowing - is used. The effect of various process parameters (gas pressure, laser power, focus position) is investigated with respect to the hole size and circularity.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.175.1-175.1
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• 2016

In recent, tract infections such as atopic dermatitis, allergic rhinitis and a respiratory disease are increasing, giving rise to the atmospheric pollution, inflow of micro-size dust and side effect of humidifier disinfectant. In this context, the environment-friendly technology is required to eliminate airborne pathogens. We propose solution of the previous problems, making use of Radical Mist Generator (RMG). Existing technologies of air purification using a gas discharge produce harmful substances such as ozone, NOx, etc. However, the RMG uses a pure water as a plasma forming material. The RMG sprays the water mist, which contains reactive radicals to sterilize microorganisms. RMG is comprised of a power supply, plasma electrodes and a nozzle. In order to analyze the electrical characteristic and concentrations of reactive radicals, we employ an oscilloscope and a titration method. To test the sterilization effect of RMG, we used E.coli. We confirmed that E.coli was killed over 90%. Eventually, we expect that RMG can be promising tool for a purified system.

• Journal of Astronomy and Space Sciences
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• 제34권3호
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• pp.199-205
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• 2017

A high resolution spectroscopic observation of the red supergiant star RM_1-390 in the Large Magellanic Cloud was made from a 3.6 m telescope at the European Southern Observatory. Spectral resolving power was R=20,000, with a signal-to-noise ratio S/N > 100. We found the atmospheric parameters of RM_1-390 to be as follows: the effective temperature $T_{eff}=4,250{\pm}50K$, the surface gravity ${\log}\;g=0.16{\pm}0.1$, the microturbulent velocity $v_{micro}=2.5km/s$, the macroturbulence velocity $v_{macro}=9km/s$ and the iron abundance $[Fe/H]=-0.73{\pm}0.11$. The abundances of 18 chemical elements from silicon to thorium in the atmosphere of RM_1-390 were found using the spectrum synthesis method. The relative deficiencies of all elements are close to that of iron. The fit of abundance pattern by the solar system distribution of r- and s-element isotopes shows the importance of the s-process. The plot of relative abundances as a function of second ionization potentials of corresponding chemical elements allows us to find a possibility of convective energy transport in the photosphere of RM_1-390.