• Proceedings of the Korean Magnestics Society Conference
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• 2003.06a
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• pp.252-253
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• 2003

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.03a
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• pp.76-81
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• 1998

The purpose of this study is the generation of B-spline surface by the 3D measurement data. The hardware of the system comprises PC and digitizing machine, machining center. There are three steps, (1) physical model measuring on the 3D laser digitizing machine, (2) B-spline surface modeling and Fairing, (3) CNC machining by the NC code. It is developed a software package, with which can conduct a micro CAM system in the PC without economical burden.

• International Journal of Control, Automation, and Systems
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• v.3 no.3
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• pp.477-485
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• 2005

This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.381-387
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• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.167-172
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• 2002

Recent years, optical components'are widely used in optical communication industry for high speed and mass storage data processing. Micro grooving of planar lightwave circuit and glass, those are widely used in optical component, are realized by polycrystalline diamond tool with ultrasonic vibration. To know the characteristics of brittle materials cutting, ultrasonic vibration cutting tool and machining system are built for the experiment. Grooving on planar lightwave circuit and glass experiments are performed and their shape are measured by photograph with microscope. It reveals that better groove shape with low chipping of planar lightwave circuit and glass are obtained by micro grooving machining with ultrasonic vibration. These experiments are considered as a possibility to the micro grooving of optical communication components.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.3 s.234
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• pp.411-417
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• 2005

Surface texturing of tribological application is another attractive technology of friction reducing. Also, reduction of friction is therefore considered to be a necessary requirement for improved efficiency of machine. In this paper attempts to investigate the effect of density for micro-scale dimple pattern using photolithography on bearing steel flat mated with pin-on-disk. We demonstrated the lubrication mechanism for a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter for lubrication condition. It is found that friction coefficient is depended on the density of surface pattern. It was thus verified that micro-scale dimple could affect the friction reduction considerably under mixed and hydrodynamic lubrication conditions from based on friction map. Lubrication condition regime has an influence on the friction coefficient induced the density of micro dimple.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.844-847
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• 2001

The application of laser direct etching has been discussed, and believed that the process is a very powerful method for micro machining. This study is focused on the micro patterning technology using laser direct etching process with no chemical damage of the material surface. A new introduced concept of energy synergy effect for surface micro machining is the combination of chemically ion reaction and laser thermal process. The etchant can't etch the material in room temperature, and used Ar laser has not power enough to machine. But, the machining is occurred in local area of the material by the combined energy. Using this process, the material is especially prevented from chemical damage for electric property. We have tested this new concept, and achieved a line with $1{mu}m$ width. The Ar laser with 488nm wavelength was used. The material was Si(100) wafer, and etchant is KOH solution. The application and flexibility of this process is in great hopes for MEMS structures and fabrication of the micro electric device parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.542-546
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• 2003

This paper describes the machining characteristics of a developed micro grooving machine. Experiments have been conducted on the various grooving condition such as spindle revolution speed, feed rates and depth of groove. V and U-shaped blade tool and STD11 workpiece was used in this study. Evaluating the machining conditions, RMS and frequency spectrum analysis of AE(acoustic emission) signals according to each conditions were applied. As a result, this study presented the process to optimize micro grooving condition and possibility of application of AE technique in groove machining.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.4
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• pp.39-43
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• 2006

A computer-controlled micro tribotester has been developed to investigate the friction and wear characteristics of thin coatings, which can be applied to silicon-based materials. In the developed system, a step motor gives a reciprocating movement and an electromagnet applies a load between a ball and a plate specimen. Test results confirmed that the application of load in the range of $0.03{\sim}1.8N$ and with a sliding speed of $4.44{\sim}7.70mm/s$ was successfully accomplished. Advantages of the developed micro tribotester are: (1) realization of micro load and displacement applicable to micro electromechanical systems(MEMS) using DC motor and electromagnet (2) continuously variable load and reciprocating speed; and (3) high reliability, which allows for unattended use for long periods.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.961-966
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• 2001

Micro fans of randomly swept-blades were designed to provide C.P.U. in a personal computer with effective cooling in a very quiet mode. The proto--type axial micro-fans machined by a laser sintering machine were tested against manufactured products by comparing the performance and overall sound pressure level with spectral measurements in an environment suggested by ASHRAE and ANSI standards. The predicted OSPLs and directivity patterns of fans by iDesignFan software were in good agreements with measured data. The newly introduced fans of randomly swept-blades were proved to provide a very promising mode of low noise at small loading conditions.