• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2000년도 추계학술대회 논문집
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• pp.84-89
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• 2000

Thermal simulation of typical stack-type and newly proposed planar-type micro-gas sensors were studied by FEM method. The thermal analyses for the proposed planar structure including temperatur distribution over the sensing layer and power consumption of the heater were carried using finite element method by computer simulation and well compared with those of typical stack-type micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of a actual device to investigate the acceptability of the computer simulation.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2003년도 유체기계 연구개발 발표회 논문집
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• pp.115-120
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• 2003

In this work, a continuous-flow micro-PCR system is systematically designed. From the numerical simulation based on the finite volume method, adapting oneself to a new environmental temperature without an external temperature controller is shown to be possible and a cooler as well as a heater is shown to be necessary to obtain three individual temperature zones for polymerase chain reaction. In addition, appropriate geometry of a heat sink for the cooler is determined by using a compact modeling method, the porous medium approach.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.358-361
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• 1999

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD\`s and micro-heater on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO$_2$ layer The MgO layer improved adhesion of Pt thin-films to SiO$_2$` layer without any chemical reactions to Pt thin-films under high as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at N2 flow rate of 2000 sccm/min, heating power of 1.2W. The respons time was about 100 msec when input flow was step-input

• 한국재료학회지
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• 제23권6호
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• pp.299-303
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• 2013

In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1023-1025
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• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 추계학술대회
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• pp.425-428
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• 2006

Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is $20{\times}20{\times}0.53mm^3$. When the current is applied, the heater heats liquid in chamber. As a result the liquid vaporizes. The response of temperature in the chamber was measured using thermocouple The changed temperature is $3^{\circ}C$ for 5 sec at 0.032W.

• Journal of Biosystems Engineering
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• 제15권2호
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• pp.134-142
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• 1990

This study was carried out for the development of greenhouse temperature control system by modifying an APPLE-II microcomputer attached with several interface systems. The interface systems are composed of 12 bit A/D converter, output port, multiplexer, time clock, etc. Under the operation of developed system, the greenhouse temperature was to be manipulated within the setting temperatures assumed to be appropriate for certain plant growth. The temperature control equimpents installed in the greenhouse are one-speed propeller type fan and two-phase electric heater, which are selectively started or stopped according to the control logic programmed in the control system. The results are summarized as follows : 1. The difference between two temperatures measured by the developed system and the self-recording thermometer calibrated with standard thermometer was less than $1^{\circ}C$. 2. When the temperature were measurd by 12 bit A/D converter and both electric heater and ventilation fan were controlled by developed ON/OFF logic, greenhouse temperature showed narrow fluctuation bands of less than $1^{\circ}C$ near the setting temperatures. 3. The temperature acquisition and control system developed in this study is expected to be applicable to environment control system such as greenhouse only by modifying the logic based on long term experimental data. 4. In order to reduce the measurement error and to increase the system control efficiency, it is recommended that continuous study should be carried out in the aspect of eliminating various systematic noises and improving the environmental control logic.

• 대한전자공학회논문지SD
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• 제40권12호
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• pp.17-23
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• 2003

서로 다른 동작온도를 가지는 12개의 감지막으로 구성된 고집적형 센서어레이(다이아프램의 크기가 3×5㎟가 설계되고 열동작의 관점에서 최적화되었다. 이 센서어레이는 에칭된 실리콘기판과 접합된 얇은 유리기판 위의 중앙에 하나의 히터가 위치하고 양쪽에 동작온도가 다른 감지박막이 위치하도록 설계됨으로써 개별 마이크로센서 보다 동시에 훨씬 많은 정보를 얻을 수 있는 장점을 가지고 있다. 제안된 마이크로센서 어레이는 다이아프램의 중앙에 하나의 히터만을 가지는 구조를 하고 있기 때문에 고집적 어레이구조를 실현하면서도, 히터를 중심으로 감지박막의 동작온도에 따라 다양한 감지특정을 얻을 수 있다. 또 히터 양쪽의 감지박막의 종류를 다르게 함으로써 다이아프램위의 전 감지막이 모두 다른 감지특성을 가지게 되어 고집적 센서어레이를 구현하기 용이한 구조로 밝혀졌다.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.26-30
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• 2005

Stamper surface temperature is very critical in replicating the high density optical disc substrates using injection molding as the pit or land/groove patterns on the optical disc substrate have decreased due to the rapid increase of areal density. During the filling stage, the polymer melt in the vicinity of the stamper surfaces rapidly solidifies and the solidified layer generated during polymer filling greatly deteriorates transcribability and fluidity of polymer melt. To improve transcribability and fluidity of polymer melt, stamper surface temperature should be controlled such that the growth of the solidified layer is delayed during the filling stage. In this study, the effect of heating on replication process was simulated numerically. Then, an injection mold equipped with instant active heating system was designed and constructed to raise the stamper surface temperature over the glass transition temperature during filling stage of the injection molding. Also, the closed loop controller using the Kalman filter and the linear quadratic Gaussian regulator was designed. As a result, the stamper surface temperature was controlled according to the desired reference stamper surface temperature.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3319-3321
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• 1999

Pt-RTD and Micro Heater was fabricated by using MgO as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures, In the analysis of properties of Pt-RTD, TCR value had 3927 $ppm/^{\circ}C$ and liner in the temperature range of $25-400^{\circ}C$. The temperature of Pt micro-heater had up to $400^{\circ}C$ with 1.5watts of the heating power. In investigating output characteristics of flow sensors output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000sccm, heating power of 1.2W.