• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.240-245
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• 2004

Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 nm in stroke. TiN thin film $1{\mu}m$ thick was deposited on the Si wafer pre-deposited of $Si_3N_4$ film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of $50{\mu}m$, $100{\mu}m$ and $500{\mu}m$ were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1104-1110
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• 2003

There are many applications of nanostructures, have been suggested by lots of researchers. It is highly required to measure the properties of nano-sized materials for design and fabrication of the nanostructures. In this paper, several techniques for measuring the mechanical properties of nano-structures are presented laying emphasis on the activity of Nano Property Measurement Team in KIMM. Some advanced applications of nano-indenter are described for measuring elastic, visco-elastic, frictional and adhesive properties as well as the standard methods of it. Micro-tensile test technique with accurate in-plane strain measurement method is also presented and its role in the property measurement of nanostructures is discussed.

• Tribology and Lubricants
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• 제11권5호
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• pp.128-135
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• 1995

Atomic force microscopy/friction force microscopy (AFM/FFM) techniques are increasingly used for tribological studies of engineering surfaces at scales, ranging from atomic and molecular to microscales. These techniques have been used to study surface roughness, adhesion, friction, scratching/wear, indentation, detection of material transfer, and boundary lubrication and for nanofabrication/nanomachining purposes. Micro/nanotribological studies of single-crystal silicon, natural diamond, magnetic media (magnetic tapes and disks) and magnetic heads have been conducted. Commonly measured roughness parameters are found to be scale dependent, requiring the need of scale-independent fractal parameters to characterize surface roughness. Measurements of atomic-scale friction of a freshly-cleaved highly-oriented pyrolytic graphite exhibited the same periodicity as that of corresponding topography. However, the peaks in friction and those in corresponding topography were displaced relative to each other. Variations in atomic-scale friction and the observed displacement has been explained by the variations in interatomic forces in the normal and lateral directions. Local variation in microscale friction is found to correspond to the local slope suggesting that a ratchet mechanism is responsible for this variation. Directionality in the friction is observed on both micro- and macro scales which results from the surface preparation and anisotropy in surface roughness. Microscale friction is generally found to be smaller than the macrofriction as there is less ploughing contribution in microscale measurements. Microscale friction is load dependent and friction values increase with an increase in the normal load approaching to the macrofriction at contact stresses higher than the hardness of the softer material. Wear rate for single-crystal silicon is approximately constant for various loads and test durations. However, for magnetic disks with a multilayered thin-film structure, the wear of the diamond like carbon overcoat is catastrophic. Breakdown of thin films can be detected with AFM. Evolution of the wear has also been studied using AFM. Wear is found to be initiated at nono scratches. AFM has been modified to obtain load-displacement curves and for nanoindentation hardness measurements with depth of indentation as low as 1 mm. Scratching and indentation on nanoscales are the powerful ways to screen for adhesion and resistance to deformation of ultrathin fdms. Detection of material transfer on a nanoscale is possible with AFM. Boundary lubrication studies and measurement of lubricant-film thichness with a lateral resolution on a nanoscale have been conducted using AFM. Self-assembled monolyers and chemically-bonded lubricant films with a mobile fraction are superior in wear resistance. Finally, AFM has also shown to be useful for nanofabrication/nanomachining. Friction and wear on micro-and nanoscales have been found to be generally smaller compared to that at macroscales. Therefore, micro/nanotribological studies may help def'me the regimes for ultra-low friction and near zero wear.

• 한국표면공학회지
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• 제30권5호
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• pp.347-354
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• 1997

Composite plating is a method of co-depositing fine particles of metallic, non-metallic compound or polymers in the plated layer to improve material properties such as were-resistance, lubrication, or corrosion resistance. Graded Ni-Sic composite coating were produced in this research. Prior to produce Graded Ni-SiC composite coatings, effects of particle size, particle content, pH of electrolyte, temperature, current density, stirring rate on the amount of SiC deposited in the Ni layer were investigated. By manipulating current density and plating time properties of these coating were evaluated by micro-indentation hardness test.

• 대한기계학회논문집A
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• 제33권4호
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• pp.346-352
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• 2009

In the present study, the Weibull statistical analysis using the Monte-Carlo simulation has been performed to investigate the micro-Vickers hardness measurement reliability considering the variability. Experimental indentation test were performed with a micro-Vickers hardness tester for as-received and quenching and tempering specimens in SCM440 steels. The distribution of micro-Vickers hardness is found to be 2-parameter Weibull distribution function. The mean values and coefficients of variation (COV) for both data set are compared with results based on Weibull statistical analysis. Finally, Monte-Carlo simulation was performed in order to evaluate the effect of sample size on the micro-Vickers hardness measurement reliability. For the parent distribution with shape parameter 30.0 and scale parameter 200.0 (COV=0.040), the number of sample data required to obtain the true Weibull parameters was founded by 20. For the parent distribution with shape parameter 10.0 and scale parameter 200.0 (COV=0.1240), the number of sample data required to obtain the true Weibull parameters was founded by 30.

• Composites Research
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• 제32권3호
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• pp.141-147
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• 2019

In this study, micro-sized and nano-sized pure aluminum (Al) powders were compressed by unidirectional pressure at room temperature. Although neither type of Al bulk was heated, they had a high relative density and improved mechanical properties. The microstructural analysis showed a difference in the process of densification according to particle size, and the mechanical properties were measured by the Vickers hardness test and the nano indentation test. The Vickers hardness of micro Al and nano Al fabricated in this study was five to eight times that of ordinary Al. The grain refinement effect was considered to be one of the strengthening factors, and the Hall-Petch equation was introduced to analyze the improved hardness caused by grain size reduction. In addition, the effect of particle size and dispersion of aluminum oxide in the bulk were additionally considered. Based on these results, the present study facilitates the examination of the effect of particle size on the mechanical properties of compacted bulk fabricated by the powder metallurgy method and suggests the possible way to improve the mechanical properties of nano-crystalline powders.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1507-1510
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• 2005

This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국정밀공학회지
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• 제23권8호
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• pp.171-177
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• 2006

This study was performed as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-{\mu}m$-deep indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.51 GPa and 104 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$ ) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46- 0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined are a during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국표면공학회지
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• 제54권6호
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• pp.307-314
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• 2021

Diamond-like carbon (DLC) is difficult to achieve sufficient adhesion because of weak bonding between DLC film and the substrate. The purpose of this study is to improve the adhesion between substrate and DLC film. DLC film was deposited on AISI H13 using linear ion source. To improve adhesion, the substrate was treated by dual post plasma nitriding. In order to define the mechanism of the improvement in adhesive strength, the gradient layer between substrate and DLC film was analyzed by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The microstructure of the DLC film was analyzed using a micro Raman spectrometer. Mechanical properties were measured by nano-indentation, micro vickers hardness tester and tribology tester. The characteristic of adhesion was observed by scratch test. The adhesion of the DLC film was enhanced by active screen plasma nitriding layer.

• 대한치과교정학회지
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• 제28권4호
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• pp.641-657
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• 1998

본 연구는 열을 이용한 금속 브라켓의 재생 처리시, 기저부 형태와 브라켓 재생 방법에 따른 전단접착강도 및 브라켓 탈락 양상을 비교하고자 시행되었다. 교정 치료를 위해 발거된 건전한 소구치 252개를 수집하고, Type I, Type II, Type III 스탠다드 브라켓을 각각 재생 방법에 따라 네 군으로 나누어 준비된 소구치에 접착하고, Instron Universal Testing Machine(Model 4466)으로 전단접착강도를 측정하였으며, 브라켓의 탈락 양상을 관찰하고 브라켓 기저부의 주사전자현미경 소견을 관찰하였다. SPSS 통계처 리 프로그램을 이용하여 일원분산분석(oneway ANOVA), Scheffe's multiple range test를 실시하여 다음과 같은 결론을 얻었다. 1. 브라켓 기저부 형태에 따른 전단접착강도는 유의차가 있었으며(p<0.001), 그 크기는 Type III(round indentation, micro-etched base), Typ I(foil-mesh base), Type II(grooved integral base, micro-etched)의 순이었다. 2. 생 방법에 따른 전단접착강도는, Type I, Tpe II 브라켓에서는 Big Jane에 1분간 처리시 우수한 결과를 보였고 (p<0.05), Type III 브라켓에서는 각 군간 유의한 차이를 보이지 않았다(p>0.05). 3. Type I, Type II 브라켓은 기저부-레진 계면에서 가장 높은 빈도로 탈락하였고, Type III 브라켓에서는 레진의 절반 가량이 치면에 잔존하는 탈락 양상이 가장 많았다. 4. 탈락 양상에 따라 탈락시의 전단접착강도가 유의성 있는 차이를 보였는데(p<0.05),브라켓 탈락시 접착제의 절반 가량이 치면에 잔존하는 경우 전단접착강도가 가장 큰 것으로 나타났다. 5. 브라켓 재생 후 기저부에 남아 있는 접착제는 전단접착강도의 감소에 영향을 미치지 않았다.