Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지

Evaluation of Micro-Tensile Properties for Nano-coating Material TiN

나노 코팅재 TiN 의 마이크로 인장 특성 평가

  • 허용학 (한국표준과학연구원) ;
  • 김동일 (전남대학교 기계공학과) ;
  • 한준희 (한국표준과학연구원 물질량부) ;
  • 김광석 (한국표준과학연구원 물질량부) ;
  • 연순창 (서울대학교 항공기계공학부) ;
  • 김용협 (서울대학교 항공기계공학부)
  • Published : 2004.04.28
Download PDF
⟨ Previous Next ⟩

Abstract

Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 nm in stroke. TiN thin film $1{\mu}m$ thick was deposited on the Si wafer pre-deposited of $Si_3N_4$ film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of $50{\mu}m$, $100{\mu}m$ and $500{\mu}m$ were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation

Keywords