• Journal of Advanced Marine Engineering and Technology
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• v.31 no.4
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• pp.377-384
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• 2007

A backscatter Kikuchi diffraction attachment to an SEM enables the convenient investigation of grain orientations on bulk or micro surface. Their relation to micro structural features gives insight into many aspects of anisotropic materials properties. In micro area such as Micro Electro Mechanical Systems(MEMS) devices is required in order to improve understanding of how they may be expected to perform upon the micro scale. Electro Back Scatter Diffraction (EBSD) helps us to find uniform area as MEMS material. The ${\gamma}-TiAl$ has two different lamellar structures ${\gamma}/{\alpha}2-Ti_3Al$ phase which have shows $\{111\}{\gamma}//\{0001\}{\alpha}2$ plane indexing. The micro size testing specimen was successfully made by this structural relation. Interlamellar structure specimen averagely show $20{\sim}25%$ lower fracture toughness value compare with translamellar specimens Moreover micro fracture surface and micro crack progress were observed.

• Advances in nano research
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• v.5 no.4
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• pp.337-357
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• 2017

Knowledge of thin films mechanical properties is strongly associated to the reliability and the performances of Nano Electro Mechanical Systems (NEMS). In the literature, there are several methods for micro materials characterization. Bulge test is an established nondestructive technique for studying the mechanical properties of thin films. This study improve the performances of NEMS by investigating the mechanical behavior of Nano rectangular thin film (NRTF) made of new material embedded in Nano Electro Mechanical Systems (NEMS) by developing the bulge test technique. The NRTF built from adhesively-bonded layers of basalt fiber reinforced polymer (BFRP) laminate composite materials in Nano size at room temperature and were used for plane-strain bulging. The NRTF is first pre-stressed to ensure that is no initial deflection before applied the loads on NRTF and then clamped between two plates. A differential pressure is applying to a deformation of the laminated composite NRTF. This makes the plane-strain bulge test idea for studying the mechanical behavior of laminated composite NRTF in both the elastic and plastic regimes. An exact solution of governing equations for symmetric cross-ply BFRP laminated composite NRTF was established with taking in-to account the effect of the residual strength from pre-stressed loading. The stress-strain relationship of the BFRP laminated composite NRTF was determined by hydraulic bulging test. The NRTF thickness gradation in different points of hemisphere formed in bulge test was analysed.

• Journal of Advanced Marine Engineering and Technology
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• v.29 no.5
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• pp.475-481
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• 2005

• Journal of Sensor Science and Technology
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• v.15 no.3
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• pp.164-167
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• 2006

Calorimeter is one of widely used biosensors. Conventional or existing calorimeters are realized directly on a silicon wafer which has very high thermal conductivity. It results in decreasing temperature difference between junctions and it makes a sensitivity of calorimeter to be decreased. In this study, the microcalorimeter was made by using MEMS(Micro Electro Mechanical Systems)-technology and hot junctions of the microcalorimeter are released from a silicon substrate to reduce loss of generated heat by reactions between biomolecules. Sensitivity of the released microcalorimeter was 18 mV/M which is 1.5 times higher than another calorimeters on silicon substrate by reactions between biotin and streptavidin.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.10 s.253
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• pp.935-941
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• 2006

Many important properties in colloidal systems are usually determined by surface charge $({\zeta}-potential)$ of the contacted solid surface. In this study, ${\zeta}-potential$ of glass ${\mu}-channel$ was evaluated from the electro-osmotic velocity distribution. The electro-osmotic velocity inside a glass f-channel was measured using a micro-PIV velocity field measurement technique. This evaluation method is more simple and easy to approach, compared with the traditional streaming potential technique. The ${\zeta}-potential$ in the glass ${\mu}-channel$ was measured fur two different mole NaCl solutions. The effect of an anion surfactant, sodium dodecyl sulphate (SDS), on the electro-osmotic velocity and f-potential in the glass surface was also studied. In the range of $0{\sim}6mM$, the surfactant SDS was added to NaCl solution in few different mole concentrations. As a result, the addition of SDS increases ${\zeta}-potential$ in the surface of the glass ${\mu}-channel$. The measured $\zeta-potential$ was found to vary from -260 to -70mV. When negatively charged particles were used, the flow direction was opposite compared with that of neutral particles. The ${\zeta}-potential$ has a positive sign for the negative particles.

• International Journal of Air-Conditioning and Refrigeration
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• v.15 no.2
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• pp.70-77
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• 2007

As electric and mechanical devices have been miniaturized and highly integrated, heat generation per unit volume has been greatly increased. Therefore, effective cooling methods for micro and miniature systems have emerged as critical issues nowadays and a lot of studies have been carried out to find an optimum cooling strategy. This paper reviews recent researches on the cooling technologies which are mainly based on micro-fabrication processes. Design, development, experiments and numerical analysis of various cooling devices are discussed and their characteristics, problems and advantages are compared.

• Advances in nano research
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• v.15 no.5
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• pp.423-439
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• 2023

The aim of this paper is to investigate the free vibration behavior of the micro sandwich beam composing of five layers such as functionally graded (FG) porous core, nanocomposite reinforced by carbon nanotubes (CNTs) and piezomagnetic/piezoelectric layers subjected to magneto electrical potential resting on silica aerogel foundation. The effect of foundation has been taken into account using Vlasov model in addition to rigid base assumption. For this purpose, an iterative technique is applied. The material properties of the FG porous core and FG nanocomposite layers are considered to vary throughout the thickness direction of the beams. Based on the Timoshenko beam theory and Hamilton's principle, the governing equations of motion for the micro sandwich beam are obtained. The Navier's type solution is utilized to obtain analytical solutions to simply supported micro sandwich beam. Results are verified with corresponding literatures. In the following, a study is carried out to find the effects of the porosity coefficient, porous distribution, volume fraction of CNT, the thickness of silica aerogel foundation, temperature and moisture, geometric parameters, electric and magnetic potentials on the vibration of the micro sandwich beam. The results are helpful for the design and applications of micro magneto electro mechanical systems.

• Proceedings of the Optical Society of Korea Conference
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• 2000.08a
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• pp.154-155
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• 2000

Optical switches using MEMS(Micro Electro Mechanical Systems) process have been widely developed since conventional optical switches cannot meet the requirements of new systems. $N_2$ type micro-mirror switches are easy to control, have simple optical systems but have difficulties in expanding the ports. Micromirrors of 2N type switches must be tilted at various angles and have relatively complicated optical systems but have advantage in expanding ports. Another type of optical switch using MEMS process is micro-waveguide type. It is reliable than other types since it has no moving parts.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.10
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• pp.1754-1761
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• 2003

The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

• Advances in nano research
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• v.9 no.3
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• pp.133-145
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• 2020

In this study, nonlinear vibrations and dynamic instabilities of a smart embedded micro shell conveying varied fluid flow and subjected to the combined electro-thermo-mechanical loadings are investigated. With the aim of designing new hydraulic sensors and actuators, the piezoelectric materials are employed for the body and the effects of applying electric field on the stability of the system as well as the induced voltage due to the dynamic behavior of the system are studied. The nonlocal piezoelasticity theory and the nonlinear cylindrical shell model in conjunction with the energy approach are utilized to mathematically modeling of the structure. The fluid flow is assumed to be isentropic, incompressible and fully develop, and for more generality of the problem both steady and time dependent flow regimes are considered. The mathematical modeling of fluid flow is also carried out based on a scalar potential function, time mean Navier-Stokes equations and the theory of slip boundary condition. Employing the modified Lagrange equations for open systems, the nonlinear coupled governing equations of motion are achieved and solved via the state space problem; forth order numerical integration and Bolotin's method. In the numerical results, a comprehensive discussion is made on the dynamical instabilities of the system (such as divergence, flutter and parametric resonance). We found that applying positive electric potential field will improve the stability of the system as an actuator or vibration amplitude controller in the micro electro mechanical systems.