Development of Optical Switch by using MEMS

MEMS를 이용한 Optical Switch의 개발

  • 최형 (삼성전자 중앙연구소 광메카 Lab.)
  • Published : 2000.08.01

Abstract

Optical switches using MEMS(Micro Electro Mechanical Systems) process have been widely developed since conventional optical switches cannot meet the requirements of new systems. $N_2$ type micro-mirror switches are easy to control, have simple optical systems but have difficulties in expanding the ports. Micromirrors of 2N type switches must be tilted at various angles and have relatively complicated optical systems but have advantage in expanding ports. Another type of optical switch using MEMS process is micro-waveguide type. It is reliable than other types since it has no moving parts.

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