Journal of Advanced Marine Engineering and Technology
- Volume 29 Issue 5
- /
- Pages.475-481
- /
- 2005
- /
- 2234-7925(pISSN)
- /
- 2234-8352(eISSN)
Reviews on Micro Electro Mechanical Systems (MEMS)
MEMS 기술의 개요
- Choi, Chang-Kyung (Micro/Nano-Scale Fluidics and Energy Transport Laboratory Mechanical, Aerospace and Biomedical Engineering University of Tennessee) ;
- Doh, Deog-Hee (Micro/Nano-Flow Visualization Laboratory Division of Mech. & Info. Eng. Korea Maritime University)
- Published : 2005.07.01
Abstract
Keywords