• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.171-175
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics and metal, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter level dielectrics and metal. Especially, defects like (micro-scratch) lead to severe circuit failure, and affects yield. Current conditioning method - bladder type, orbital pad motion - usually provides unsuitable pad profile during ex-situ conditioning near the end of pad life. Since much of the pad wear occurs by the mechanism of bladder tripe conditioning and its orbital motion without rotation, we need to implement new ex-situ conditioner which can prevent abnormal regional force on pad caused by bladder-type and also need to rotate the pad during conditioning. Another important study of ADPC is related to the orbital scratch of which source is assumed as diamond grit dropped from the strip during ex-situ conditioning. Scratch from diamond grit damaged wafer severely so usual1y scraped. Figure 1 shows the typical shape of scratch damaged from diamond. We suspected that intensive forces to the edge area of bladder type stripper accelerated the drop of Diamond grit during conditioning, so new designed Flat stripper was introduced.

• Composites Research
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• v.31 no.6
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• pp.398-403
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• 2018

Recently, environmental pollution caused by plastic waste, ecosystem disturbance of micro-plastics and human body accumulation are becoming big problems. In order to replace the traditional plastic, eco-friendly resin and natural fiber-based composite materials have been developed, but they have a disadvantage that their mechanical properties are significantly lower than those of synthetic fiber-based composites. In this study, eco - friendly nanofiber was extracted from seaweed and used as an additive in order to improve the mechanical properties of jute fiber-reinforced composites. Through the hand lay-up process, the composites were fabricated, and it was confirmed that the nanofiber was effective in improving the mechanical properties of natural fiber composites through tensile, bending and drop weight impact tests.

• Journal of the Korean Society of Visualization
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• v.19 no.3
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• pp.15-21
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• 2021

In this study, we investigated the dynamics of a droplet impacting rough hydrophobic surfaces through high-speed imaging. Micrometer-sized structures with grooves and pillars were fabricated on smooth Polydimethylsiloxane (PDMS) surfaces by laser ablation. We used Newtonian and non-Newtonian liquid droplets to study the drop impact dynamics. De-ionized water and aqueous glycerin solutions were used for the Newtonian liquid droplet. The solutions of xanthan gum in water were prepared to provide elastic property to the Newtonian droplet. We found that the orientation of the surface structures affected the maximal spreading diameter of the droplet due to the degree of slippage. During the droplet retraction, the dynamic receding contact angles were measured to be around 90° or less. It resulted in the formation of the micro-capillary bridges between the receding droplet and the surface structures. Then, the rupture of the capillary bridge led to the formation of micrometer-sized droplets on top of the surface structures. The size of the microdroplets was found to increase with increasing the impacting velocity and viscosity of the Newtonian liquid droplets. However, the size of the isolated microdroplets decreased with enhancing the elasticity of the droplets, and the size of the non-Newtonian microdroplets was not affected by the impacting velocity.

• Clinical and Experimental Reproductive Medicine
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• v.36 no.4
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• pp.265-274
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• 2009

Objective: MicroRNAs (miR) are known to repress target genes at post-transcriptional level and play important roles in development and maturation of cell. However, the expression profiles of miR during ovarian follicle maturation have not been fully elucidated. Here, we designed this study to investigate the expression profiles of miR in oocytes and granulose cells (G-cells) after in vitro culture according to gonadotropins and adding hCG. Methods: Ovaries from 12-day-old mice (C57BL6) were removed and preantral follicles were isolated and cultured in $20\;{\mu}L$-drop of culture media with supplementation of either rFSH, rLH, or rFSH+rLH. After their full maturation, follicles were incubated with rhCG and rEGF. RNA was isolated from oocytes and G-cells, and real-time PCR were performed with primers of miR known to be expressed in the mouse ovary (mmu-miR-16, -miR-27a, -miR-126, -miR-721). Results: FSH+LH group showed the highest ovulation and MII rates among gonadotropin groups. The profiles of miRs in oocytes and G-cells differed according to gonadotropin groups and adding hCG. The profiles of miRs showed divergent changes between oocytes and G-cells. Conclusion: miR expression profiles are altered by gonadotropins and supplementation of hCG during in vitro maturation of murine follicles. Target gene study must be necessary to validate these findings.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.11
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• pp.745-753
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• 2016

Micro methanol-steam reformer for fuel cell can effectively produce hydrogen as reforming response to steam takes place in low temperature (less than $250^{\circ}C$). This study conducted numerical research on this reformer. First, study set wall temperature of the reformer at 100, 140, 180 and $220^{\circ}C$ while methanol conversion efficiency was set in 0, 0.072, 3.83 and 46.51% respectively. Then, porosity of catalyst was set in 0.1, 0.35, 0.6 and 0.85 and although there was no significant difference in methanol conversion efficiency, values of pressure drop were 4645.97, 59.50, 5.12 and 0.45 kPa respectively. This study verified that methanol-steam reformer rarely responds under the temperature of $180^{\circ}C$ and porosity does not have much effect on methanol conversion efficiency if the fluid flowing through reformer lowers activation energy by sufficiently contacting reformer.

• Science of Emotion and Sensibility
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• v.14 no.4
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• pp.525-530
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• 2011

Emotion is composed of various feelings such as pleasure, sorrow, comfortability, and so on. The complicated process of the measurement has long been recognized as a major hindrance for the studies of emotion. Previously, individuals' emotion has mainly been measured by means of self-report, interview, EEG (electroencephalogram), ECG (electrocardiogram), EOG (electroculography), and body temperature. With thanks to nano/micro technologies, the possibility in the development of emotion-on-a-chip (EOC) has begun to be proposed. EOC will make it possible to analyze one's psychological status by taking a drop of blood. Discovery of emotional biomarkers in body fluids, understanding of the correlation between those biomarkers and the results from brain science are prerequisites to validate the EOC technology. In this paper, paper microfluidics are introduced as a good candidate for the EOC. As paper microfluidics is cost-effective and easy to use it is expected to be a useful device for the emotion measurement. We present the design and fabrication process for the simple paper-based microfluidic device and discuss the possible application in the field of measuring the human emotion.

• Applied Biological Chemistry
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• v.27 no.1
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• pp.40-44
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• 1984

Experiments on the GA production ability by ectomycorrhizal fungus, Pisolithus tinctorius was carried out to investigate specific physiological phenomena of growth increase in host plants by formation of mycorrhizae, The culture extract of P. tinctorius was purified by solvent fractionation, sephadex LH-20 chromatography, silica gel partition chromatography and TLC, successively. GA activities in the purified GA fractions were monitored by micro-drop bioassay using dwarf rice seedlings, 'Tan-ginbozu'. $30{\sim}60%$ EtOAc election fractions of silica gel pardon chromatography and the zone of Rf $0.1{\sim}0.4,\;0.6{\sim}0.8$ of TLC exhibited the GA-like activities. The GA activities were increased with the more treated amount of culture extracts. This activity in 100ml of culture solution was equivalent to 0.1ng of $GA_3$.

• The Journal of the Acoustical Society of Korea
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• v.22 no.3
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• pp.217-223
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• 2003

A novel cooling method induced by acoustic streaming generated by ultrasonic vibration at 30㎑ is presented. Ultrasonic vibration is obtained by piezoelectric devices and the maximum vibration amplitude of 50 m is achieved by including a horn, mechanical vibration amplifier in the system and making the complete system resonate. To investigate the enhancement of heat transfer capability of acoustic streaming, the temperature variations of heat source and air in the vicinity of heat source are measured in real-time. It is observed that acoustic streaming is instantly induced by ultrasonic vibration, resulting in the significant temperature drop due to the bulk air flow caused by acoustic streaming. In addition, it is observed that the cooling effect on the heat source is maximized when the gap between the ultrasonic vibrator and heat source coincides with the multiples of half-wavelength of the ultrasonic wave. This fact results from the resonance of the sound wave. The theoretical analysis of the dependence on the gap is also accomplished and verified by experiment. The advantage of the proposed cooling method by acoustic streaming is noise-free due to the ultrasonic vibration and maintenance-free because of the absence of moving parts. Moreover. This cooling method can be utilized to the nano and micro-electro mechanical systems, where the fan-based conventional cooling method can not be employed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.5
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• pp.475-479
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• 2012

We present a novel polymer fabrication process involving direct UV patterning of a hyperbranched polymer, AEO3000. Compared to PDMS, which is the most widely used polymer in bioMEMS devices, the present polymer has advantages with regard to electrode integration and fast fabrication. We designed a four-chip microelectrofluidic bench having three electrical pads and two fluidic I/O ports. We integrated a microfluidic mixer and a cell separator on the bench to characterize the interconnection performance and sample manipulation. Electrical and fluidic characterization of the microfluidic bench was performed. The measured electrical contact resistance was $0.75{\pm}0.44{\Omega}$, which is small enough for electrical applications, and the pressure drop was 8.3 kPa, which was 39.3% of the value in the tubing method. By performing yeast mixing and a separation test in the integrated module on the bench, we successfully showed that the interconnected chips could be used for bio-sample manipulation.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.31.1-31.1
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• 2009

Carbon nanotubes (CNTs) are attractive material because of their superior electrical, mechanical, and chemical properties. Furthermore, their geometric features such as a large aspect ratio and a small radius of curvature at tip make them ideal for low-voltage field emission devices including backlight units of liquid crystal display, lighting lamps, X-ray source, microwave amplifiers, electron microscopes, etc. In field emission devices for display applications, the phosphor anode is positioned against the CNT emitters. In most case, light generated from the phosphor by electron bombardment passes through the anode front plate to reach observers. However, light is produced in a narrow depth of the surface of the phosphor layer because phosphor particles are big as much as several micrometers, which means that it is necessary to transmit through the phosphor layer. Hence, a drop of light intensity is unavoidable during this process. In this study, we fabricated a transparent cathode back plate by depositing an ultra-thin film of single walled CNTs (SWCNTs) on an indium tin oxide (ITO)-coated glass substrate. Two types of phosphor anode plates were employed to our transparent cathode back plate: One is an ITO glass substrate with a phosphor layer and the other is a Cr-coated glass substrate with phosphor layer. For the former case, light was radiated from both the front and the back sides, where luminance on the back was ~30% higher than that on the front in our experiments. For the other case, however, light was emitted only from the cathode back side as the Cr layer on the anode glass rolled as a reflecting mirror, improving the light luminance as much as ~60% compared with that on the front of one. This study seems to be discussed about the morphologies and field emission characteristics of CNT emitters according to the experimental parameters in fabricating the lamps emitting light on the both sides or only on the cathode back side. The experimental procedures are as follows. First, a CNT aqueous solution was prepared by ultrasonically dispersing purified SWCNTs in deionized water with sodium dodecyl sulfate (SDS). A milliliter or even several tens of micro-liters of CNT solution was deposited onto a porous alumina membrane through vacuum filtration. Thereafter, the alumina membrane was solvated with the 3 M NaOH solution and the floating CNT film was easily transferred to an ITO glass substrate. It is required for CNT film to make standing CNTs up to serve as electron emitter through an adhesive roller activation.