• 한국전기전자재료학회논문지
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• 제33권4호
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• pp.276-280
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• 2020

A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.731-734
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• 2005

Generally, characteristics of electromechanical actuators are coupled with the mechanical and the electrical properties. Important mechanical parameters of these actuators are the achievable force and displacement in the presence of electric field. These mechanical parameters are related to the stress and strain of the materials and the actuator geometry. This paper presents how to measure the blocked force by using the micro-balance. The blocked force is defined as the force produced by the transducer under an applied voltage when the tip is constrained to zero motion. Also, a theoretical force by using the cantilever beam model is calculated under elastic domain. From the sample of 4 cm $\times$ 1 cm $\times$ 20 $\mu$m, the blocked farce measured from the equipment is 20.3 $\mu$N at 8 V$_{DC}$. By comparing it with the theoretical value, 24.9 $\mu$N, the blocked force measurement is acceptable. The furce measurement is also investigated with different AC electric fields and the frequency.

• Current Optics and Photonics
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• 제4권4호
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• pp.293-301
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• 2020

In this paper we propose and theoretically analyze a monolithic multiparametric sensor consisting of a superstructure of surface-relief waveguide Bragg gratings (WBGs), a micro-machined diaphragm, and a cantilever beam. Diaphragms of two different configurations, namely circular and square, are designed and analyzed separately for pressure measurement. The square diaphragm is then selected for further study, since it shows relatively higher sensitivity compared to the circular one, as it incurs more induced stress when any pressure is applied. The cantilever beam with a proof mass is designed to enhance the sensitivity for acceleration measurement. A unique mathematical method using coupled-mode theory and the transfer-matrix method is developed to design and analyze the shift in the Bragg wavelength of the superstructure configuration of the gratings, due to simultaneously applied pressure and acceleration. The effect of temperature on the wavelength shift is compensated by introducing another Bragg grating in the superstructure configuration. The measured sensitivities for pressure and acceleration are found to be 0.21 pm/Pa and 6.49 nm/g respectively.

• Advances in nano research
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• 제12권2호
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• pp.167-183
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• 2022

In this paper, the free and forced vibration analysis of rotating cantilever nanoscale cylindrical beams and tubes is investigated under the external dynamic load to examine the nonlocal effect. A couple of nonlocal strain gradient theories with different beams and tubes theories, involving the Euler-Bernoulli, Timoshenko, Reddy beam theory along with the higher-order tube theory, are assumed to the mathematic model of governing equations employing the Hamilton principle in order to derive the nonlocal governing equations related to the local and accurate nonlocal boundary conditions. The two-dimensional functional graded material (2D-FGM), made by the axially functionally graded (AFG) in conjunction with the porosity distribution in the radial direction, is considered material modeling. Finally, the derived Partial Differential Equations (PDE) are solved via a couple of the generalized differential quadrature element methods (GDQEM) with the Newmark-beta techniques for the time-dependent results. It is indicated that the boundary conditions equations play a crucial task in responding to nonlocal effects for the cantilever structures.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술회의 초록집
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• pp.7-7
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• 2010

Energy harvesting from the environment has been of great interest as a standalone power source of wireless sensor nodes for Ubiquitous Sensor Networks(USN). In particular, the piezoelectric energy harvesting from ambient vibration sources has intensively researched because it has a relatively high power density comparing with other energy scavenging methods. Through recent advances in low power consumption RF transmitters and sensors, it is possible to adopt a micro-power energy harvesting system realized by MEMS technology for the system-on-chip. However, the MEMS energy harvesting system has some drawbacks such as a high natural frequency over 300 Hz and a small power generation due to a small dimension. To overcome these limitations, we devised a novel power generator with a spiral spring structure as shown in the figure. The natural frequency of a cantilever could be decreased to the usable frequency region (under 300 Hz) because the natural frequency depends on the length of a cantilever. In this study, the natural frequency of the energy harvester was a lower than a normal cantilever structure and sufficiently controllable in 50 - 200 Hz frequency region as adjusting weight of a proof mass. Moreover, the MEMS energy harvester had a high energy conversion efficiency using a shear mode ($d_{15}$) is much larger than a 33 mode ($d_{33}$) and the energy conversion efficiency is proportional to the piezoelectric constant (d). We expect the spiral type MEMS power generator would be a good candidate for a standalone power generator for USN.

• 한국전기전자재료학회논문지
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• 제32권5호
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• pp.418-425
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• 2019

A piezoelectric ceramic fiber composite (PCFC) was successfully fabricated using $0.69Pb(Zr_{0.47}Ti_{0.53})O_3-0.31[Pb(Zn_{0.4}Ni_{0.6})_{1/3}Nb_{2/3}]O_3$ (PZT-PZNN) for use in small-scale wind energy harvesters. The PCFC was formed using an epoxy matrix material and an array of Ag/Pd-coated PZT-PZNN piezo-ceramic fibers sandwiched by Cu interdigitated electrode patterned polyethylene terephthalate film. The energy harvesting performance was evaluated in a custom-made wind tunnel while varying the wind speed and resistive load with two types of flutter wind energy harvesters. One had a five-PCFC array vertically clamped with a supporting acrylic rod while the other used the same structure but with a five-PCFC cantilever array. Stainless steel (thickness: $50{\mu}m$) was attached onto one side of the PCFC to form the PZT-PZNN cantilever. The output power, in general, increased with an increase in the wind speed from 2 m/s to 10 m/s for both energy harvesters. The highest output power of $15.1{\mu}W$ at $14k{\Omega}$ was obtained at a wind speed of 10 m/s for the flutter wind energy harvester with the PZT-PZNN cantilever array. The results presented here reveal the strong potential for wind energy harvester applications to supply sustainable power to various IoT micro-devices.

• 한국세라믹학회지
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• 제40권7호
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• pp.657-661
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• 2003

잉크젯 프린터 헤드용 기능성 막으로 많이 활용하고 있는 다층박막(SiO$_2$/poly-Si/SiN/SiO$_2$, 두께, 2.77 $\mu\textrm{m}$)과 다이아몬드 박막(두께, 1.6 $\mu\textrm{m}$)을 미소 외팔보($\mu$-CLB) 형태로 가공한 후 nanoindenter를 이용한 굽힘 시험 방법으로 탄성계수와 굽힘 강도를 측정하였으며 다층막을 이루는 박막 중 SiO$_2$ 박막(두께, 1 $\mu\textrm{m}$)과 SiN 박막(두께, 0.43 $\mu\textrm{m}$)의 탄성계수를 미소 외 팔보 굽힘 시험 방법과 nanoindentation 방법으로 측정한 후 그 결과를 비교하였다. 미소 외팔보 굽힘 시험방법으로 측정한 다층막의 탄성계수와 파괴강도는 외팔보의 폭이 18.5 $\mu\textrm{m}$에서 58.5 $\mu\textrm{m}$로 증가함에 따라 각각 68.08 ㎬과 2.495 ㎬에서 56.53 ㎬과 1.834 ㎬로 감소하였다. SiO$_2$ 박막의 탄성계수 측정값은 외팔보의 폭이 29.6$\mu\textrm{m}$ 와 59.5 $\mu\textrm{m}$ 범위에서 변하여도 영향을 받지 않고 68.16$\pm$0.942 ㎬이었으며, SiN 박막의 탄성계수는 215.45 ㎬이었다. Nanoindentation 방법으로 측정한 SiO$_2$ 박막과 SiN 박막의 탄성계수는 각각 98.78 ㎬, 219.38 ㎬이었다. 이 결과로부터 미소 외팔보 굽힘 시험방법으로 측정한 박막의 탄성계수가 nanoindentation 방법으로 측정한 탄성계수와 2% 미만의 차이를 보이며 일치함을 알 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.2004-2006
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• 1996

A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

• 한국항공우주학회지
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• 제37권2호
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• pp.175-180
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• 2009

이 논문은 폴리머 기반의 전기 분무 장치를 만들기 위하여 이온빔 장치를 통하여 초소수성으로 가공 된 polytetrafluoroethylene(PTFE) 노즐을 사용하였다. 초소수성 표면을 만들기 위하여, PTFE 표면은 Ar과 $O_2$를 이용한 이온빔 공정 장치를 사용하였다. 최적의 표면 공정 조건은 Ar과 $O_2$ 유량 및 에너지 단위를 변화 시켜 얻을 수 있었다. 공정된 노즐의 표면 특성을 분석하기 위하여 접촉각 측정을 수행하였고, 표면의 형태적 분석을 위해 scanning electron microscope(SEM) 그리고 atomic force microscope(AFM) 측정을 하였다. 초소수성으로 공정된 노즐을 사용함으로써 보다 안정적이고 반복적인 전기 분무가 가능함을 확인 하였으며, 공정 된 노즐의 성능을 평가하기 위하여 외팔보와 이온빔으로 표면 처리 된 노즐 그리고 레이져 변위센서를 이용하여 마이크로 스케일의 추력을 측정하였다.

• KSTLE International Journal
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• 제6권2호
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• pp.33-38
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• 2005

Submicron-scale patterns made of polymethyl methacrylate (PMMA) were fabricated on silicon-wafer using a capillarity-directed soft lithographic technique. Polyurethane acrylate (PUA) stamps (Master molds) were used to fabricate the patterns. Patterns with three different aspect ratios were fabricated by varying the holding time. The patterns fabricated were the negative replica of the master mold. The patterns so obtained were investigated for their adhesion and friction properties at nano-scale using AFM. Friction tests were conducted in the range of 0-80 nN. Glass (Borosilicate) balls of diameter 1.25 mm mounted on cantilever (Contact Mode type NPS) were used as tips. Further, micro-friction tests were performed using a ball-on-flat type micro-tribe tester, under reciprocating motion, using a soda lime ball (1 mm diameter) under a normal load of 3,000 mN. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C$) and relative humidity ($45{\pm}5\%$). Results showed that the patterned samples exhibited superior tribological properties when compared to the silicon wafer and non-patterned sample (PMMA thin film) both at the nano and micro-scales, owing to their increased hydrophobicity and reduced real area of contact. In the case of patterns it was observed that their morphology (shape factor and size factor) was decisive in defining the real area of contact.