• 제목/요약/키워드: Micro/Nano structures

검색결과 218건 처리시간 0.039초

나노임프린트를 이용한 바이오칩용 나노 패턴 제작 (Fabrication of Nanopatterns for Biochip by Nanoimprint Lithography)

  • 최호길;김순중;오병근;최정우
    • KSBB Journal
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    • 제22권6호
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    • pp.433-437
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    • 2007
  • 본 연구에서는 나노임프린트 리소그래피를 이용하여 500 nm line, 600 nm pore, $1{\mu}m$ pore, $2.5{\mu}m$ pore의 마이크로 수준에서 나노 수준에 이르는 다양한 크기와 모양의 nanopore 형태 패턴을 제작하였다. Thermal imprint 방식과 달리 상온, 저압에서 임프린팅이 가능하며 사용되는 스탬프의 수명을 늘리고 보다 미세하고 복잡한 형태의 패턴을 제작할 수 있는 UV-assisted imprint 방식을 사용하였다. E-beam lithography로 패턴을 각인한 quartz소재의 스탬프를 사용하였으며 스탬프의 재질이 투명하여 UV 조사시 UV curable resin이 경화될 수 있도록 하였다. 또한 스탬프의 표면을 (heptadecafluoro-1,1,2,2-tetrahydrodecyl) trichlorosilane의 monolayer 층으로 미리 코팅하여 임프린트 후 스탬프와 기판과의 releasing을 쉽게함과 동시에 패턴의 일부가 스탬프에 묻어 나와 전사된 패턴에 defect가 없도록 하였다. 또한, gold를 미리 증착하여 임프린팅함으로써 lift-off 시에 필요한 hi-layer 층이 필요 없게 되어 산소 플라즈마를 이용한 에칭이 더욱 쉽고 lift-off 공정이 생략될 수 있도록 하였다. 나노임프린트 공정에 있어 가장 큰 문제점은 잔여층의 생성이며 이러한 잔여층을 제거하고자 산소 플라즈마 에칭을 하였다. 에칭공정을 통해 gold의 표면이 완전히 드러났으며 산소 플라즈마를 통해 gold의 표면이 친수성으로 바뀌어 추후 단백질 고정화를 더욱 쉽게 하였다. 그리하여 나노임프린트 기술을 이용해 나노크기의 바이오소자 제작을 가능하게 하였다.

Fabrication of PVDF Structures by Near Field Electrospinning

  • 김성욱;지승묵;여종석
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.423.1-423.1
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    • 2016
  • Polyvinylidene fluoride (PVDF) has drawn much attention due to its many advantages. PVDF shows high mechanical strength and flexibility, thermal stability, and good piezoelectricity enabling its application to various fields such as sensors, actuators, and energy transducers. Further studies have been conducted on PVDF in the form of thin films. The thin films exhibit different ionic conductivity according to the number of pores within the film, letting these films to be applied as electrolytes or separators of batteries. Porous PVDF membranes are also easily processed, usually made by using electrospinning. However, a large portion of researches were conducted using PVDF membranes produced by far field electrospinning, which is not a well-controlled experimental method. In this paper, we use near field electrospinning (NFES) process for more controlled, small-scaled, mesh type PVDF structures of nano to micro fibers fabricated by controlling process parameters and investigate the properties of such membranous structures. These membranes vary according to geometrical shape, pore density, and fiber thickness. We then measured the mechanical strength and piezoelectric characteristic of the structures. With various geometries in the fiber structures and various scales in the fibers, these types of structures can potentially lead to broader applications for stretchable electronics and dielectric electro active polymers.

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Mechanical Properties of Hydrated Cement Paste: Development of Structure-property Relationships

  • Ghebrab, Tewodros T.;Soroushian, Parviz
    • International Journal of Concrete Structures and Materials
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    • 제4권1호
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    • pp.37-43
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    • 2010
  • Theoretical models based on modern interpretations of the morphology and interactions of cement hydration products are developed for prediction of the mechanical properties of hydrated cement paste (hcp). The models are based on the emerging nanostructural vision of calcium silicate hydrate (C-S-H) morphology, and account for the intermolecular interactions between nano-scale calcium C-S-H particles. The models also incorporate the effects of capillary porosity and microcracking within hydrated cement paste. The intrinsic modulus of elasticity and tensile strength of hydrated cement paste are determined based on intermolecular interactions between C-S-H nano-particles. Modeling of fracture toughness indicates that frictional pull-out of the micro-scale calcium hydroxide (CH) platelets makes major contributions to the fracture energy of hcp. A tensile strength model was developed for hcp based on the linear elastic fracture mechanics theories. The predicted theoretical models are in reasonable agreements with empirical models developed based on the experimental performance of hcp.

Analysis of static and dynamic characteristics of strain gradient shell structures made of porous nano-crystalline materials

  • Hamad, Luay Badr;Khalaf, Basima Salman;Faleh, Nadhim M.
    • Advances in materials Research
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    • 제8권3호
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    • pp.179-196
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    • 2019
  • This paper researches static and dynamic bending behaviors of a crystalline nano-size shell having pores and grains in the framework of strain gradient elasticity. Thus, the nanoshell is made of a multi-phase porous material for which all material properties on dependent on the size of grains. Also, in order to take into account small size effects much accurately, the surface energies related to grains and pores have been considered. In order to take into account all aforementioned factors, a micro-mechanical procedure has been applied for describing material properties of the nanoshell. A numerical trend is implemented to solve the governing equations and derive static and dynamic deflections. It will be proved that the static and dynamic deflections of the crystalline nanoshell rely on pore size, grain size, pore percentage, load location and strain gradient coefficient.

Three Dimensionally Ordered Microstructure of Polycrystalline TiO2 Ceramics with Micro/meso Porosity

  • Chang, Myung Chul
    • 한국세라믹학회지
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    • 제53권2호
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    • pp.227-233
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    • 2016
  • In order to make a highly ordered three-dimensional porous structure of titania ceramics, porogen beads of PS [Polystyrene] and PMMA [poly(methylmetacrylate)] were prepared by emulsion polymerization using styrene monomer and methyl methacrylate monomer, respectively. The uniform beads of PS or PMMA latex were closely packed by centrifugation as a porogen template for the infiltration of titanium butoxide solution. The mixed compound of PS or PMMA with titanium butoxide was dried and the dry compacts were calcined at $450^{\circ}C-750^{\circ}C$ according to the firing schedule to prepare micro- and meso- structures of polycrystalline titania with monodispersed porosity. Inorganic frameworks composed of $TiO_2$ were formed and showed a three Dimensionally Ordered Microstructure [3DOM] of $TiO_2$ ceramics. The pulverized particles of the $TiO_2$ ceramic skeleton were characterized using XRD analysis. A monodispersed crystalline micro-structure with micro/meso porosity was observed by FE-SEM with EDX analysis. The 3DOM $TiO_2$ skeleton showed opalescent color tuning according to the direction of light.

Buckling and vibration of porous sandwich microactuator-microsensor with three-phase carbon nanotubes/fiber/polymer piezoelectric polymeric nanocomposite face sheets

  • Arani, Ali Ghorbanpour;Navi, Borhan Rousta;Mohammadimehr, Mehdi
    • Steel and Composite Structures
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    • 제41권6호
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    • pp.805-820
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    • 2021
  • In this research, the buckling and free vibration of three-phase carbon nanotubes/ fiber/ polymer piezoelectric nanocomposite face sheet sandwich microbeam with microsensor and micro-actuator surrounded in elastic foundation based on modified couple stress theory (MCST) is investigated. Three types of porous materials are considered for sandwich core. Higher order (Reddy) and sinusoidal shear deformation beam theories are employed for the displacement fields. Sinusoidal surface stress effects are extracted for sinusoidal shear deformation beam theory. The equations of motion are derived by Hamilton's principle and then the natural frequency and critical buckling load are obtained by Navier's type solution. The determined results are in good agreement with other literatures. The detailed numerical investigation for various parameters is performed for this microsensor-microactuator. The results reveal that the microsensor-microactuator enhanced by increasing of Skempton coefficient, carbon nanotubes diameter length to thickness ratio, small scale factor, elastic foundation, surface stress constants and reduction in porous coefficient, micro-actuator voltage and CNT weight fraction. The valuable results can be expedient for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

Superhydrophobic nano-hair mimicking for water strider leg using CF4 plasma treatment on the 2-D and 3-D PTFE patterned surfaces

  • Shin, Bong-Su;Moon, Myoung-Woon;Kim, Ho-Young;Lee, Kwang-Ryeol
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.365-365
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    • 2010
  • Similar to the superhydrophobic surfaces of lotus leaf, water strider leg is attributed to hierarchical structure of micro pillar and nano-hair coated with low surface energy materials, by which water strider can run and even jump on the water surface. In order to mimick its leg, many effort, especially, on the fabrication of nanohairs has been made using several methods such as a capillarity-driven molding and lithography using poly(urethane acrylate)(PUA). However most of those effort was not so effective to create the similar structure due to its difficulty in the fabrication of nanoscale hairy structures with hydrophobic surface. In this study, we have selected a low surface energy polymeric material of polytetrafluoroethylene (PTFE, or Teflon) assisted with surface modification of CF4 plasma treatment followed by hydrophobic surface coating with pre-cursor of hexamethyldisiloxane (HMDSO) using a plasma enhanced chemical vapor deposition (PE-CVD). It was found that the plasma energy and duration of CF4 treatment on PTFE polymer could control the aspect ratio of nano-hairy structure, which varying with high aspect ratio of more than 20 to 1, or height of over 1000nm but width of 50nm in average. The water contact angle on pristine PTFE surface was measured as approximately $115^{\circ}$. With nanostructures by CF4 plasma treatment and hydrophobic coating of HMDSO film, we made a superhydrophobic nano-hair structure with the wetting angle of over $160^{\circ}C$. This novel fabrication method of nanohairy structures has been applied not only on 2-D flat substrate but also on 3-D substrates like wire and cylinder, which is similarly mimicked the water strider's leg.

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공진 기반 마이크로기계 생화학 센싱 구조물의 해석 (Analysis of Resonance Based Micromechanical Bio-Chemical Sensing Structures)

  • 여민구;신윤혁;임홍재;임시형
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1767-1772
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    • 2008
  • A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors.

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재료의 선택적 사용에 의한 금형의 국부적 유도가열기법 (Localized Induction-Heating Method by the Use of Selective Mold Material)

  • 박근;도범석;박정민;이상익
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 춘계학술대회 논문집
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    • pp.168-171
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    • 2009
  • High-frequency induction is an efficient way to heat mold surface by electromagnetic induction in a non-contact procedure. Though the induction heating has an advantage in terms of its rapid-heating capacity on the mold surface, it still has a restriction on mold temperature control due to geometric restriction of an induction coil according to the mold shape. It has been recently applied to the injection molding of thin-walled parts or micro/nano structures. For localized induction heating, an injection mold composed of ferromagnetic material and paramagnetic material is used. The electromagnetic induction concentrates on the ferromagnetic material, from which we can selectively heat for the local mold elements. The present study proposed a localized induction heating method by means of selective use of mold material. The feasibility of the proposed heating method is investigated through the comparison of experimental observations according to the mold material.

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Bioinspired Metal Surfaces by Plasma Treatment

  • 유의선;고태준;오규환;문명운
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.97-97
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    • 2013
  • The exterior structures of natural organisms have continuously evolved by controlling wettability, such as the Namib Desert beetle, whose back has hydrophilic/hydrophobic contrast for water harvesting by mist condensation in dry desert environments, and some plant leaves that have hierarchical micro/nanostructures to collect or repel liquid water. In this work, we have provided a method for wettability contrast on metals by both nano-flake or needle patterns and tuning of the surface energy. Metals including steel alloys and aluminum were provided with hierarchical micro/nanostructures of metaloxides induced by fluorination and a subsequent catalytic reaction of fluorine ions on metal surfaces in water with various ranges from room to boiling temperature of water. Then, a hydrophobic material was deposited on the structured surfaces, rendering superhydrophobicity. Plasma oxidization induces the formation of superhydrophilic surfaces on selective regions surrounded by superhydrophobic surfaces. We show that wettability contrast surfaces align liquid water within patterned hydrophilic regions during the condensation process. Furthermore, this method could have a greater potential to align other liquids or living cells.

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