• Title/Summary/Keyword: Metallic Plasma

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Surface properties of Al(Si, Cu) alloy film after plasma etching (Al(Si, Cu)합금막의 플라즈마 식각후 표면 특성)

  • 구진근;김창일;박형호;권광호;현영철;서경수;남기수
    • Electrical & Electronic Materials
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    • v.9 no.3
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    • pp.291-297
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    • 1996
  • The surface properties of AI(Si, Cu) alloy film after plasma etching using the chemistries of chlorinated and fluorinated gases with varying the etching time have been investigated using X-ray Photoelectron Spectroscopy. Impurities of C, Cl, F and O etc are observed on the etched AI(Si, Cu) films. After 95% etching, aluminum and silicon show metallic states and oxidized (partially chlorinated) states, copper shows Cu metallic states and Cu-Cl$_{x}$(x$_{x}$ (x$_{x}$ (1

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Sintering of Ni-Based Amorphous Alloy Powders by Plasma Activated Sintering Process (PAS법을 이용한 Ni기 비정질 분말의 소결)

  • Koo, Ja-Min;Shin, Kee-Sam;Kim, Yoon-Bae;Bae, Jong-Soo;Hur, Sung-Kang
    • Korean Journal of Materials Research
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    • v.15 no.12
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    • pp.765-772
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    • 2005
  • PAS(Plasma Activated Sintering) process was tried to apply for the fabrication of BMG(Bulk Metallic Glasses) of $Ni_{57}Zr_{20}Ti_{18}Si_5}\;and\;Ni_{57}Zr_{20}Ti_{18}Si_3Sn_2$ from the as-atomized amorphous powder. Compressive strength for the BMG(bulk Metallic Glasses) of $Ni_{57}Zr_{20}Ti_{18}Si_5$ were lower than those of BMG rods produced by warm extrusion ,or copper mold casting method. Microstructural examination by optical microcope, SEM ana EDS showed that oxidation had occurred during PASintering. In order to prevent the powder from the oxidation during PASintering, Ni coating for $Ni_{57}Zr_{20}Ti_{18}Si_5$ amorphous powder by electroless-plating method was performed. Microstructural examination for Ni coated layers after PASintering indicated that the Ni coating had been so effective to prevent powder from oxidation during PASintering. Sintering behaviors of $Ni_{57}Zr_{20}Ti_{18}Si_3Sn_2$ represent the same as those of $Ni_{57}Zr_{20}Ti_{18}Si_5$.

Microstructure Evolution of Cu-based BMG Coating during APS Process and Phase Analysis by Nano-indentation Test (대기 플라즈마 용사공정을 이용한 Cu계 벌크 비정질 금속 코팅의 미세조직 분석과 나노 압입시험을 이용한 상 분석)

  • Kim, Jung-Hwan;Kang, Ki-Cheol;Yoon, Sang-Hoon;Na, Hyun-Taek;Lee, Chang-Hee
    • Journal of Welding and Joining
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    • v.27 no.6
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    • pp.43-48
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    • 2009
  • In this study, Cu-based bulk metallic glass (BMG) coatings were deposited by atmospheric plasma spraying (APS) process with different process conditions (with- and without hydrogen gas). As adding the hydrogen gas, thermal energy in the plasma flame increased and induced difference in the melting state of the Cu-based BMG particles. The microstructure and mechanical properties of the coatings were analyzed using a scanning electron microscope (SEM) with an energy dispersive spectroscopy (EDS) and nano-indentation tester in the light of phase analysis. It was elucidated by the nano-indentation tests that un-melted region was a mainly amorphous phase which showed discrete plasticity observed as the flow serrations on the load.displacement (P - h) curves, and the curves of solidified region showed lower flow serrations as amorphous phase mingled with crystalline phase. Oxides produced during the spraying process had the highest hardness value among the phases and were well mixed with other phases resulted from the increase in melting degree.

The Mechanical Properties and Biocompatibility of Functionally Graded Coatings(FGC) of Hydroxyapatite(HA) and Metallic Powders - Functionally Gradient Coatings of Thermal Spray in Air- (Hydroxyapatite (HA)와 금속 분말 경사 코팅의 기계적 특성 및 생체 적합성 - 대기 열용사 경사코팅 -)

  • Kim, Eun-Hye;Kim, Yu-Chan;Han, Seung-hee;Yang, Seok-Jo;Park, Jin-Woo;Seok, Hyun-Kwang
    • Korean Journal of Metals and Materials
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    • v.47 no.1
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    • pp.13-20
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    • 2009
  • This work presents functionally graded coatings (FGC) of hydroxyapatite (HA) and metallic powders on Ti-6Al-4V implants using plasma spray coating method. HA has been the most frequently used coating material due to its excellent compatibility with human bones. However, because of the abrupt changes in thermomechanical properties between HA and the metallic implant across an interface, and residual stress induced on cooling from coating temperture to room temperature, debonding at the interface occurs in use sometimes. In this work, FGC of HA and Ti or Ti-alloy powders is made to mitigate the abrupt property changes at the interface and the effect of FGC on residual stress release is investigated by evaluating the mechanical bond strength between the implant and the HA coating layers. Thermal annealing is done after coating in order to crystallize the HA coating layer which tends to have amorphous structure during thermal spray coating. The effects of types and compositional ratio of metallic powders in FGC and annealing conditions on the bond strength are also evaluated by strength tests and the microstructure analysis of coating layers and interfaces. Finally, biocompatibility of the coating layers are tested under ISO 10993-5.

A Study on Etching of $UO_2$, Co, and Mo Surface with R.F. Plasma Using $CF_4\;and\;O_2$

  • Kim Yong-Soo;Seo Yong-Dae
    • Nuclear Engineering and Technology
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    • v.35 no.6
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    • pp.507-514
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    • 2003
  • Recently dry decontamination/surface-cleaning technology using plasma etching has been focused in the nuclear industry. In this study, the applicability of this new dry processing technique are experimentally investigated by examining the etching reaction of $UO_2$, Co, and Mo in r.f. plasma with the etchant gas of $CF_4/O_2$ mixture. $UO_2$ is chosen as a representing material for uranium and TRU (TRans-Uranic) compounds while metallic Co and Mo are selected because they are the principal contaminants in the used metallic nuclear components such as valves and pipes made of stainless steel or inconel. Results show that in all cases maximum etching rate is achieved when the mole fraction of $UO_2\;in\;CF_4/O_2$ mixture gas is $20\%$, regardless of temperature and r.f. power. In case of $UO_2$, the highest etching reaction rate is greater than 1000 monolayers/min. at $370^{\circ}C$ under 150 W r.f. power which is equivalent to $0.4{\mu}m/min$. As for Co, etching reaction begins to take place significantly when the temperature exceeds $350^{\circ}C$. Maximum etching rate achieved at $380^{\circ}C\;is\;0.06{\mu}m/min$. Mo etching reaction takes place vigorously even at relatively low temperature and the reaction rate increases drastically with increasing temperature. Highest etching rate at $380^{\circ}C\;is\;1.9{\mu}m/min$. According to OES (Optical Emission Spectroscopy) and AES (Auger Electron Spectroscopy) analysis, primary reaction seems to be a fluorination reaction, but carbonyl compound formation reaction may assist the dominant reaction, especially in case of Co and Mo. Through this basic study, the feasibility and the applicability of plasma decontamination technique are demonstrated.

Crystallization behavior of Cu-base bulk metallic glass in supercooled liquid region during compression and tension (과냉각 액상구간에서 압축.인장시 Cu기 비정질 합금의 결정화 거동)

  • Park, E.S.;Kim, S.H.;Huh, M.Y.;Kim, H.W.;Bae, J.C.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2008.10a
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    • pp.215-217
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    • 2008
  • Crystallization behavior of the bulk metallic glass (BMG) during compression and tension was studied in the supercooled liquid region (SLR). Rod samples of the BMG alloy were produced by consolidating gas atomized powders of $Cu_{54}Zr_{22}Ti_{18}Ni_6$ using spark plasma sintering. The crystallization behavior in these samples was examined by tackling changes in thermal property during heating the samples in DSC. The present BMG alloy was firstly decomposed and then crystallized during annealing in the SLR. The phase decomposition from the original amorphous phase was retarded by the compressive stress, while it was accelerated by the tensile stress.

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COMPUTATIONAL MODELING AND SIMULATION OF METAL PLASMA GENERATION BETWEEN CYLINDRICAL ELECTRODES USING PULSED POWER (펄스파워를 이용한 실린더형 전극간 금속 플라즈마 생성현상의 전산유동해석)

  • Kim, K.;Kwak, H.S.;Park, J.Y.
    • Journal of computational fluids engineering
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    • v.19 no.4
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    • pp.68-74
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    • 2014
  • This computational study features the transient compressible and inviscid flow analysis on a metallic plasma discharge from the opposing composite electrodes which is subjected to pulsed electric power. The computations have been performed using the flux corrected transport algorithm on the axisymmetric two-dimensional domain of electrode gap and outer space along with the calculation of plasma compositions and thermophysical properties such as plasma electrical conductivity. The mass ablation from aluminum electrode surfaces are modeled with radiative flux from plasma column experiencing intense Joule heating. The computational results shows the highly ionized and highly under-expanded supersonic plasma discharge with strong shock structure of Mach disk and blast wave propagation, which is very similar to muzzle blast or axial plasma jet flows. Also, the geometrical effects of composite electrodes are investigated to compare the amount of mass ablation and penetration depth of plasma discharge.