• 제목/요약/키워드: Metal-Al2O3-Si

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AlZnMg-합금의 용융산화에 의한 $Al_2O_3$-복합재료의 형성 (Formation of $Al_2O_3$-Composites by the Melt Oxidation of an AlZnMg-alloy)

  • 김일수;김상호;강정윤
    • 한국세라믹학회지
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    • 제33권9호
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    • pp.985-994
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    • 1996
  • The initiation and growth of $\alpha$-Al2O3/metal composites by the directed oxidation of molten commercial AlZnMg-alloy at 1223-1423K were investigated. Spontaneous bulk growth did not occur on the alloy alone. but the uniform initiation and growth of the composite were obtained by putting a thin layer of SiO2 particles on the surface of the alloy. Without SiO2 the external surface of the oxide layer was convered by MgO and MgAl2O4. But with the SiO2 reaction initiate the porous ZnO layers were found on the growth surface. The higher process temperature yielded a lower metal content. The oxidation product of $\alpha$-Al2O3 was found to be oriented with c-axis parallel to th growth direction. The growth rates increased with temperature and the apparent activation energy was 111.8 kJ/mol.

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탄소섬유와 SiC 휘스커를 혼합한 $Al/Al_2O_3$ 복합재료의 마멸특성 (Wear Characterization of $Al/Al_2O_3$ Composites Reinforced with Hybrid of Carbon Fibers and SiC Whiskers)

  • 봉하동;송정일;한경섭
    • 대한기계학회논문집
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    • 제19권7호
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    • pp.1619-1629
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    • 1995
  • The Al/Al$_{2}$O$_{3}$ SiC and Al/Al$_{2}$O$_{3}$/C hybrid metal matrix composites (MMCs) were fabricated by squeeze infiltration method. Uniform distribution of reinforcements were found in the microstructure of metal matrix composites. Mechanical tests were carried out under various test conditions to clearly identify mechanical behavior of MMCs, and the wear mechanism of Al/Al$_{2}$O$_{3}$/(SiC or C) hybrid metal matrix composites were investigated. The tensile strength and hardness of hybrid composites was resulted in increasing compared with those of the unreinforced matrix alloy. Wear resistance was strongly dependent upon kinds of fiber, volume fraction and sliding speed. The wear resistance of metal matrix composites was remarkably improved by the addition of reinforcements. Especially, the wear resistance of the hybrid composites of carbon fibers was more effective than in the composites reinforced with alumina and SiC whiskers of reinforcements. This was due to the effect of carbon fiber on the solid lubrication. Wear mechanisms of hybrid composites were suggested from wear surface analyses. The major wear mechanism of hybrid composites was the abrasive wear at low to intermediate sliding speed, and the melting wear at intermediate to high sliding speed.

용융산화법으로 제조한 $Al_2O_3-SiC$ 세라믹스의 미세구조와 기계적 성질 (Microstructure and Mechanical Properties of the $Al_2O_3-SiC$ Ceramics Produced by Melt Oxidation)

  • 김일수
    • 한국세라믹학회지
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    • 제31권10호
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    • pp.1169-1175
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    • 1994
  • Five Al2O3/SiC/metal composites with four different particle sizes of green SiC abrasive grains are grown by the directed oxidation of an commercially available Al-alloy. Oxidation was conducted in air at 100$0^{\circ}C$, 96 hours long. Slip casted SiC-fillers were placed on the alloy or SiC powder deposited up to the required layer thickness. Their microstructures are described and measurements of density, elastic constants, frexural strength, fracture toughness and work of fracture are reported. The results are compared with those of commercial dense sintered Al2O3. The properties of produced materials have a strong relationship to not only the properties of Al2O3, SiC, Al and Si but also to the phase share and phase distribution. The composite materials are dense (0.5% porosity), tough (KIC = 3.4~6.4 MPa{{{{ SQRT { m} }}), strong ({{{{ sigma }}B = 170~345 MPa) and reasonably shrinkage free producible. The reinforcements is attained mainly through the plastic deformation of ductile metal phase.

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Properties of $Al_{2}O_{3}-SiO_{2}$ Films prepared with Metal Alkoxides

  • Soh, Dea-Wha;Park, Sung-Jai;Korobova E. Natalya
    • Journal of information and communication convergence engineering
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    • 제1권3호
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    • pp.133-138
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    • 2003
  • The preparation of $Al_{2}O_{3}-SiO_{2}$ thin films from less than one micron to several tens of microns in thickness had been prepared from metal alkoxide sols. Two methods, dip-withdrawal and electrophoretic deposition, were employed for thin films and sheets formation. The requirements to be satisfied by the solution for preparing uniform and strong films and by the factors affecting thickness and other properties of the films were examined. For the preparation of thin, continuous $Al_{2}O_{3}-SiO_{2}$ films, therefore, metal-organic-derived precursor solutions contained Si and Al in a chemically polymerized form has been developed and produced in a clear liquid state. In the process of applying to substrates, this liquid left a transparent, continuous film that could be converted to crystalline $Al_{2}O_{3}-SiO_{2}$ upon heating to $1000^{\circ}C$. And, a significant change of the film density took place in the crystallization process, thus leading to the strict requirements as to the film thickness, which could survive crystallization.

비휘발성 메모리 응용을 위한 ALD법을 이용한 $Al_2O_3$ 절연막의 특성 (Properties of $Al_2O_3$ Insulating Film Using the ALD Method for Nonvolatile Memory Application)

  • 정순원;이기식;구경완
    • 전기학회논문지
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    • 제58권12호
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    • pp.2420-2424
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    • 2009
  • We have successfully demonstrated of metal-insulator-semiconductor (MIS) capacitors with $Al_2O_3/p-Si$ structures. The $Al_2O_3$ film was grown at $200^{\circ}C$ on H-terminated Si wafer by atomic layer deposition (ALD) system. Trimethylaluminum [$Al(CH_3)_3$, TMA] and $H_2O$ were used as the aluminum and oxygen sources. A cycle of the deposition process consisted of 0.1 s of TMA pulse, 10 s of $N_2$ purge, 0.1 s of $H_2O$ pulse, and 60 s of $N_2$ purge. The 5 nm thick $Al_2O_3$ layer prepared on Si substrate by ALD exhibited excellent electrical properties, including low leakage currents, no mobile charges, and a good interface with Si.

Dielectric $Al_2O_3-SiO_2$ Films from Metal Alkoxides

  • Soh, Deawha;Natalya, Korobova E.
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2003년도 추계종합학술대회
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    • pp.957-962
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    • 2003
  • The preparation of $Al_2$O$_3$-SiO$_2$ thin films from less than one micron to several tens of microns in thickness had been prepared from metal alkoxide sols. Two methods, dip-withdrawal and electrophoretic deposition, were employed for thin films and sheets formation. The requirements to be satisfied by the solution for preparing uniform and strong films and by the factors affecting thickness and other properties of the films were examined. for the preparation of thin, continuous $Al_2$O$_3$-SiO$_2$ films, therefore, metal-organic-derived precursor solutions contained Si and Al in a chemically polymerized form has been developed and produced in a clear liquid state. In the process of applying to substrates, this liquid left a transparent, continuous film that could be converted to crystalline $Al_2$O$_3$-SiO$_2$ upon heating to 100$0^{\circ}C$. And, a significant change of the film density took place in the crystallization process, thus leading to the strict requirements as to the film thickness, which could survive crystallization.

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MAS (Metal-$Al_2O_3$-Si) 구조에 있어서 전기적 특성에 관한 연구 (A Study for Electrical Characteristics of MAS (Metal-$Al_2O_3$-Si) Structure)

  • 박성희;이동엽;장지근;이영희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1987년도 전기.전자공학 학술대회 논문집(I)
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    • pp.461-464
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    • 1987
  • With the fabrication of Al-$Al_2O_3$-n(p) type Si devices, the analysis and measurement of various characteristics, this study presented the electric physical property theory for the charge distribution of MAS device $Al_2O_3$ films, and inquired out the devices available. In order to study them, Al-(450A)$Al_2O_3$-n(p) type Si was the main objects in the study. They were examined through carrier injection, C-V curves of devices on time, ${\Delta}V_{FB}$-t curves, I-V curves and $Al_2O_3$ film's breakdown characteristics.

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Metal-$Al_2O_3$-p Si$의 MOS 구조에 있어서 고전계에의한 Carrier주입과 트랩에 관한 연구 (A Study on Carrier Injection and Trapping by the High Field for MOS(Metal-$Al_2O_3$-p Si$) Structure)

  • 박성희;성만영
    • 대한전자공학회논문지
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    • 제24권1호
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    • pp.102-109
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    • 1987
  • This study is carrier out to investigate the carrier injection and the characteristics of trapping for the CVD deposited Al2O3 film on Si substrates. Samples used are metal -Al2O3-Si Structure in which metal field plates are used with Aluminium or God. Canier injection and trapping, which result in flat band voltalge shift, occur at fields as low as 1~2 MV/cm. An approximate method is proposed for computing the location of the centroid of the trapped electrons in this paper. Results show that carriers are trapped near the injecting interface at fields less than about 5MV/cm. Because of continued charging, a steady state can not be reached. Therefore the unique I-V curve is obtained when the traps are initially empty. By utilization of applied voltage on each point of the fresh device sample, it is measured the I-V surves for two polarities of applied voltage. The current densities observed in the Al2O3 films are much larger than those obtained in SiO2.

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Characterization of Dielectric Relaxation and Reliability of High-k MIM Capacitor Under Constant Voltage Stress

  • Kwak, Ho-Young;Kwon, Sung-Kyu;Kwon, Hyuk-Min;Sung, Seung-Yong;Lim, Su;Kim, Choul-Young;Lee, Ga-Won;Lee, Hi-Deok
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제14권5호
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    • pp.543-548
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    • 2014
  • In this paper, the dielectric relaxation and reliability of high capacitance density metal-insulator-metal (MIM) capacitors using $Al_2O_3-HfO_2-Al_2O_3$ and $SiO_2-HfO_2-SiO_2$ sandwiched structure under constant voltage stress (CVS) are characterized. These results indicate that although the multilayer MIM capacitor provides high capacitance density and low dissipation factor at room temperature, it induces greater dielectric relaxation level (in ppm). It is also shown that dielectric relaxation increases and leakage current decreases as functions of stress time under CVS, because of the charge trapping effect in the high-k dielectric.

알루미늄 용탕 운반용 고보온성 Ladle 설계 및 평가 (Design and Evaluation of High Insulation Ladle for Carrying Aluminum Molten Metal)

  • 박진영;최석환;윤필환;김억수
    • 한국주조공학회지
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    • 제30권3호
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    • pp.115-120
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    • 2010
  • Recently, an advanced raw material supplying system in diecasting industry that molten metal produced by the raw material supplier can be directly delivered to the diecasting shops was proposed. It was known to have advantages of reducing melting process cost and improving working environment. However, for its successful mass production, the development of high insulation ladle is inevitable. In this study, the optimal mixing ratio of $SiO_2-Al_2O_3$ was investigated and the high insulation ladle with computer simulation result was built in a prototype and evaluated. The prototype which has refractory wall of $SiO_233%-Al_2O_3$ 35%-CaO 33% showed high insulation sufficient for carrying the Al molten metal for 138 minutes. Gas quantity result and SEM-EDS analysis on the melt poured in the ladle also showed extremely low level of 0.028 cc / 100 g and no penetration of Al molten metal into the refractory wall, satisfying the requirements for mass production.