• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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• pp.34-37
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

• 한국입자에어로졸학회지
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• 제6권1호
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• pp.29-35
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• 2010

Transition metals such as V, Fe, and Ni were used to synthesize doped zinc oxide nanoparticles from mixed liquid precursors by using the flame spray pyrolysis (FSP). The effects of dopants on the powder properties such as morphology, specific surface area, crystal structure, and light adsorption were analyzed by TEM, BET, XRD, and UV-Vis diffuse reflection spectrum (DRS), respectively. The results showed that hexagonal wurtzite structured ZnO:M (M = V, Fe, Ni) nanoparticles were successfully synthesized by the FSP. The transition metal-doping resulted in the decrease in its particle size and crystallite size. The UV-vis absorption spectra of ZnO:M nanoparticles were also red-shifted. ZnO:V showed the highest MB degradation of 99.4% under the UV irradiation after 3 hrs.

• 한국재료학회지
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• 제11권11호
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• pp.936-940
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• 2001

Spray pyrolysis is a favorable technique to form complex mixed-metal oxide powders with high purity in high temperature region. Manganese oxide powders were prepared by spray pyrolysis from an aqueous solution of $Mn(NO_3)_2$. Powders were formed in the temperature range of 500~$700^{\circ}C$ under the constant pressure of 300torr. All the powders have hydrous forms. When the temperature was increased, the size and the surface area of the particles decreased. An electrochemical capacitors were made with manganese oxide electrodes and KOH electrolyte. With the temperature decreased, capacitors showed high capacitance. Capacitor which was prepared with powders formed in the temperature $500^{\circ}C$ demonstrated specific capacitances as high as 83F/g.

• 한국재료학회지
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• 제31권3호
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• pp.172-180
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• 2021

In this study, using the plasma spray method, tensile and compression fatigue tests are performed in saline solution to examine the effect of Ti undercoat on corrosion fatigue behavior of alumina-coated specimens. The alumina-coated material using Ti in the undercoat shows better corrosion fatigue strength than the base material in the entire stress amplitude range. Fatigue cracking of UT specimens occurs in the recess formed by grit-blasting treatment and progresses toward the base metal. Subsequently, the undercoat is destroyed at a stage where the deformation of the undercoat cannot follow the crack opening displacement. The residual stress of the UT specimen has a tensile residual stress up to about 100 ㎛ below the surface of the base material; however, when the depth exceeds 100 ㎛, the residual stress becomes a compressive residual stress. In addition, the inside of the spray coating film is compressive residual stress, which contributes to improving the fatigue strength characteristics. A hardened layer due to grit-blasting treatment is formed near the surface of the UT specimen, contributing to the improvement of the fatigue strength characteristics. Since the natural potential of Ti spray coating film is slightly higher than that of the base material, it exhibits excellent corrosion resistance; however, when physiological saline intrudes, a galvanic battery is formed and the base material corrodes preferentially.

• 한국분말재료학회지
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• 제29권4호
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• pp.283-290
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• 2022

A Cu-15Ag-5P filler metal (BCuP-5) is fabricated on a Ag substrate using a high-velocity oxygen fuel (HVOF) thermal spray process, followed by post-heat treatment (300℃ for 1 h and 400℃ for 1 h) of the HVOF coating layers to control its microstructure and mechanical properties. Additionally, the microstructure and mechanical properties are evaluated according to the post-heat treatment conditions. The porosity of the heat-treated coating layers are significantly reduced to less than half those of the as-sprayed coating layer, and the pore shape changes to a spherical shape. The constituent phases of the coating layers are Cu, Ag, and Cu-Ag-Cu3P eutectic, which is identical to the initial powder feedstock. A more uniform microstructure is obtained as the heat-treatment temperature increases. The hardness of the coating layer is 154.6 Hv (as-sprayed), 161.2 Hv (300℃ for 1 h), and 167.0 Hv (400℃ for 1 h), which increases with increasing heat-treatment temperature, and is 2.35 times higher than that of the conventional cast alloy. As a result of the pull-out test, loss or separation of the coating layer rarely occurs in the heat-treated coating layer.

• 한국분무공학회지
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• 제18권4호
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• pp.196-201
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• 2013

SCR(Selective Catalytic Reduction) is a major after-treatment solution to reduce NOx emission in recent diesel engines. In this study, a metal foam is applied as an alternative SCR substrate and tested in a commercial diesel engine to compared with a conventional ceramic SCR system. Basic engine test from ND-13 mode shows that a metal foam catalyst has lower NOx conversion efficiency than a ceramic catalyst especially over $350^{\circ}C$. A metal foam catalyst has characteristics of high exhaust gas pressure before a SCR catalyst and high heat transfer rate due to its material and structure. NOx conversion efficiency of a metal foam catalyst shows an increasing tendency along with the increase of exhaust gas temperature by $500^{\circ}C$. The effect of urea injection quantity variation is also remarkable only at high exhaust gas temperature.

• International Journal of Precision Engineering and Manufacturing
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• 제9권1호
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• pp.51-53
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• 2008

A new nano-particle deposition system (NPDS) was developed for a ceramic and metal coating process. Nano- and micro-sized powders were sprayed through a supersonic nozzle at room temperature and low vacuum conditions to create ceramic and metal thin films on metal and polymer substrates without thermal damage. Ceramic titanium dioxide ($TiO_2$) powder was deposited on polyethylene terephthalate substrates and metal tin (Sn) powder was deposited on SUS substrates. Deposition images were obtained and the resulting chemical composition was measured using X-ray photoelectron spectroscopy. The test results demonstrated that the new NPDS provides a noble coating method for ceramic and metal materials.

• 한국결정성장학회지
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• 제17권1호
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• pp.11-17
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• 2007

The spherical NiZn ferrite particles were prepared by ultrasonic spray pyrolysis with mixed solution of aqueous metal nitrates. The NiZn ferrite particle was observed with nano-sized primary particles of about 10 nm or less before annealing which represented as paramagnetic behavior measured at 77 K and room temperature. The typical abnormal growth of primary particles like polyhedral primary particles was observed by annealing at 1273 K with Zn-concentration dependency. The XRD patterns showed good crystallinity of NiZn ferrite powder after annealing. In annealing process, the intra-particle sintering phenomenon was observed and the spherical particle morphology was collapsed at 1673 K. The saturation magnetization of NiZn ferrite powder for each annealing temperature was decreased with measuring temperature of $77{\sim}$300K.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.214-219
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• 2001

In this study, numerical investigation has been performed on the spreading and solidification of a droplet impacting onto a solid substrate in the thermal spray process. The finite difference method with volume-of-fluid approach is used to analyze the free surface flow and the source-based enthalpy method is employed to model the latent heat release during the solidification. In this work, the numerical model is validated through the comparison of the present numerical result with experimental data available for the flat substrate.

• 대한기계학회논문집B
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• 제26권11호
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• pp.1597-1604
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• 2002

In this study, numerical investigation has been performed on the impingement, spreading and solidification of a coating material droplet impacting onto a solid substrate in the thermal spray process. The numerical model is validated through the comparison of the present numerical result with experimental data fer the flat substrate without surface defects. An analysis of deposition formation on the non-polished substrate with surface defects is also performed. The parametric study is conducted with various surface defect sizes and shapes to examine the effect of surface defects on the impact and solidification of the liquid droplet on the substrate.