• 공업화학
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• 제10권1호
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• pp.173-176
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• 1999

초임계수를 이용한 금속산화물의 미세입자 제조에 대하여 연구하였다. 금속염 수용액으로는 cobalt nitrate solution과 manganese nitrate solution을 sample solution으로 선택하여 코발트산화물과 망간산화물 입자를 제조하였다. 얻어진 결과로부터 초임계수를 이용한 금속산화물 미세입자의 제조가 가능함을 확인할 수 있었으며, 초임계수 하에서는 매우 빠른 dehydration반응이 일어남을 관찰할 수 있었다. 짧은 반응시간(30~100 초)에도 불구하고 미세입자 ($0.5{\sim}2{\mu}m$)가 생성되었으며, 초임계수 공정에서는 mixer의 온도가 입자의 크기 및 분포에 큰 영향을 미침을 알 수 있었다. 반응온도 조절을 통하여 입자의 크기를 제어할 수 있음을 확인할 수 있었다.

• 한국산업보건학회지
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• 제26권2호
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• pp.119-138
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• 2016

Objectives: The purpose of this study is to review size, shape, and crystal structure-dependent toxicity of major metal oxide particles such as silicon dioxide, tungsten trioxide, aluminum oxide, and titanium dioxide as byproducts generated in semiconductor fabrication facility. Methods: To review the toxicity of major metal oxide particles, we used various reported research and review papers. The papers were searched by using websites such as Google Scholar and PubMed. Keyword search terms included '$SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$) toxicity', 'health effects $SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$). Additional papers were identified in references cited in the searched papers. Results: In various cell lines and organs of human and animals, cytotoxicity, genotoxicity, hepatoxicity, fetotoxicity, neurotoxicity, and histopathological changes were induced by silicon dioxide, tungsten trioxide, aluminium oxide, and titanium dioxide particles. Differences in toxicity were dependent on the cell lines, organs, doses, as well as the chemical composition, size, surface area, shape, and crystal structure of the particles. However, the doses used in the reported papers were higher than the possible exposure level in general work environment. Oxidative stress induced by the metal oxide particles plays a significant role in the expression of toxicity. Conclusions: The results cannot guarantee human toxicity of the metal oxide particles, because there is still a lack of available information about health effects on humans. In addition, toxicological studies under the exposure conditions in the actual work environment are needed.

• Environmental Engineering Research
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• 제10권2호
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• pp.45-53
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• 2005

Metal oxide particles with mole ratio of aluminum: titanium of 1:1 were synthesized by a sol-gel method. Langmuir (a) and Freundlich (b) adsorption isotherms of dissolved lead [Pb(Ⅱ)] ion on the metal oxide particles containing aluminum and titanium were determined as follows, respectively,(a) , (b) at pH 6where, correlation coefficients (R2) of Langmuir and Freundlich adsorption isotherms were 0.95 and 0.96, respectively.The overall adsorption rate of Pb(Ⅱ) on the metal oxide particles containing aluminum and titanium was determined by a differential bed reactor. The overall adsorption rate at pH 6 was as a following equation.at pH 6

• 한국분말재료학회지
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• 제9권6호
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• pp.433-440
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• 2002

Synthesis and compaction of Al-base nano powders by pulsed discharge method were investigated. The aluminum based powders with 50 to 200 nm of diameter were produced by pulsed wire evaporation method. The powders were covered with very thin oxide layer. The perspective process for the compaction and sintering of nanostructured metal-based materials stable in a wide temperature range can be seen in the densification of nano-sized metal powders with uniformly distributed hard ceramic particles. The promising approach lies in utilization of natural uniform mixtures of metal and ceramic phases, e.g. partially oxidized metal powders as fabricated in our synthesis method. Their particles consist of metal grains coated with oxide films. To construct a metal-matrix material from such powder, it is necessary to destroy the hard oxide coatings of particles during the compaction process. This goal was realized in our experiments with intensive magnetic pulsed compaction of aluminum nanopowders passivated in air.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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• pp.353-356
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• 2001

The relation between the flocculation and dispersion of metal oxide powders and the properties of solvents, such as dielectric constant and solubility parameter, was investigated for TiO$_2$, $Al_2$O$_3$and Fe$_2$O$_3$particles. The particle size and median diameter of these metal oxides were measured in many organic solvents, from which the effect of solvents on the flocculation and dispersion of metal oxide powders was considered. The metal oxide powders of TiO$_2$, $Al_2$O$_3$and Fe$_2$O$_3$tend to disperse in a solvent of higher polarity, whereas they are apt to flocculate in a solvent of low dielectric constant, because the Hamaker constant between the particles becomes larger in such a solvent. There we, however, some solvents that do not obey these tendencies. It is possible to evaluate the flocculation and dispersion of these metal oxide powders in many solvents by using numeral balances of Hansen’s three-dimensional solubility parameter (f$_{d}$, f$_{p}$ and f$_{h}$). There exists a solvent giving the optimal dispersion for each metal oxide, and the optimal dispersion point of f$_{d}$, f$_{p}$ and f$_{h}$ is determined by the combination of various metal oxide powders and solvents.nts.nts.nts.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.318-318
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• 2012

A graphene layer is most important materials in resent year to enhance the electrical properties of semiconductor device due to high mobility, flexibility, strong mechanical resistance and transparency[1,2]. The resistance switching memory with the graphene layer have been reported for next generation nonvolatile memory device[3,4]. Also, the graphene layer is able to improve the electrical properties of memory device because of the high mobility and current density. In this study, the resistance switching memory device with metal-oxide nano-particles embedded in polyimide layer on the graphene mono-layer were fabricated. At first, the graphene layer was deposited $SiO_2$/Si substrate by using chemical vapor deposition. Then, a biphenyl-tetracarboxylic dianhydride-phenylene diamine poly-amic-acid was spin coated on the deposited metal layer on the graphene mono-layer. Then the samples were cured at $400^{\circ}C$ for 1 hour in $N_2$ atmosphere after drying at $135^{\circ}C$ for 30 min through rapid thermal annealing. The deposition of aluminum layer with thickness of 200 nm was done by a thermal evaporator. The electrical properties of device were measured at room temperature using an HP4156a precision semiconductor parameter analyzer and an Agilent 81101A pulse generator. We will discuss the switching mechanism of memory device with metal-oxide nano-particles on the graphene mono-layer.

• 한국전기전자재료학회논문지
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• 제16권7호
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• pp.569-572
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• 2003

In this study, we evaluated the dilute HF cleaning to reduce residual defects made by metal CMP process. The purpose of this test is to observe the existence of barrier metal damage during DHF cleaning on condition that it should not affect metal thin film reliability, so we will get rid of slurry residual particles as a main defect of the metal CMP process for the better yield. In-line defect data showed us that slurry residual particles were removed by DHF application. The HF rinse significantly reduced metal contamination levels and surface roughness. The best effect by additional oxide loss was discovered when Dilute HF condition is 10".

• 대한치과보철학회지
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• 제34권3호
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• pp.620-631
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• 1996

Bonding of resin to cast alloy has traditionally been provided by mechanical retention. But, chemical bonding methods such as silicoating, tin plating, heat treatment, application of 4-META adhesives, have been developed to overcome the problems of the mechanical bonding methods. Silicoating has been used availaby in fixed prosthodontics, but is also reported to be used in removable prosthodontics. The aim of this study is to measure the tensile bond strength between resin and metal, and compare the effect of the type of metal and the grain size of the aluminum oxide on the bond strength, after metal surface roughening, coating of the opaque resin, and curing of heat-curing resin were performed. The test groups were divided into 4 groups according to the cast alloys and the aluminum oxide particles used. Group 1 : Type 4 gold alloy(DM66) blasted with $$50{\mu}m\;Al_{2}O_3$$ Group 2 : Type 4 gold alloy(DM66) blasted with $$250{\mu}m\;Al_{2}O_3$$, Group 3 : Co-Cr alloy(Nobilium) blasted with $$50{\mu}m\;Al_{2}O_3$$ Group 4 : Co-Cr alloy(Nobilium) blasted with $$250{\mu}m\;Al_{2}O_3$$ * 10 test specimens were made on each group. The specimens were thermocycled, and Instron Universal testing machine was used to measure the tensile bond strength of the finished specimens. The results were as follows : 1. Bond strengths showed that the group of gold alloy blasted with $250{\mu}m$ aluminum oxide particle had higher bond strength, and the group of gold alloy blasted with $50{\mu}m$ aluminum oxide particles had lower bond strength than any of the other groups. 2. Gold alloy had significantly higher bond strength when blasted with $250{\mu}m$ aluminum oxide particles than $50{\mu}m$, but. Co-Cr alloy showed no statistically significant difference between the two particle sizes. 3. When blasted with $50{mu}m$ aluminum oxide particles, Co-Cr alloy showed significantly higher bond strength than gold alloy. And, when blasted with $250{\mu}m$ aluminum oxide particles, gold alloy had significantly higher bond strength than Co-Cr alloy. 4. On the examination of the fractured sites, only the group of Co-Cr alloy blasted with $50{\mu}m$ aluminum oxide particles showed a part of residual opaque resin, but all the samples of the other groups fractured between the resin and the metal.

• 대한환경공학회지
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• 제31권12호
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• pp.1069-1074
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• 2009

본 연구에서는 CuO와 ZnO의 입자 크기가 옥수수의 성장과 토양 미생물 군집에 미치는 독성을 microcosm 실험을 통하여 살펴보았다. 나노 입자는 micro 입자에 비해 옥수수의 biomass를 약 30% 감소시켜 나노 입자가 옥수수의 성장을 저해하는 것으로 나타났다. 토양 미생물 활성 지표인 Dehydrogenase activity는 CuO 나노 입자에서는 낮게 나타났으나 ZnO 나노 입자에서는 높게 나타났다. Biolog test 결과, CuO 나노 입자와 ZnO micro 입자에서 토양 미생물 다양성이 감소하는 것으로 나타났다. 그러므로, metal oxide의 나노 입자가 micro 입자보다 항상 토양 미생물의 활성 및 다양성에 더 유해한 영향을 나타내는 것은 아니라고 판단된다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.156-157
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• 2006

The preparation of composite powders for plasma spraying by an in-house designed mechanofusion process is investigated. Results show that dry particle coating depends on the chemical and mechanical properties of powders. In metal/oxide and metal/oxide/carbide powder mixtures, fine ceramic particles coat the surface of the metallic coarser particles. A nearly rounded shape of the final composite particles is induced by the mechanical energy input with no formation of new phases. However with the carbide/metal powdered system, only an intimate mixture of components is achieved. It is suggested that the coating mechanism is governed by agglomeration and rolling phenomena.