• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제22권1호
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• pp.53-60
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• 2009

$ZrTiO_4$ dielectric thin films were coated by metal-organic decomposition, and annealed by rapid thermal processing up to $900^{\circ}C$ for their crytallization. Crystallized single-phase $ZrTiO_4$ thin films were fabricated above the annealing temperature of $800^{\circ}C$, but their grains were randomly oriented without specific textured orientation. Best dielectric properties were presented by the sample annealed at $800^{\circ}C$ which had crystalline structure and flat surface. Dielectric constant of the film was maintained at 32 throughout full frequency range up to 6 GHz, and dielectric loss was varied between 0.01 and 0.04.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제23권4호
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• pp.311-316
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• 2010

$Zr_{0.7}Sn_{0.3}TiO_4$ (ZST) thin films were fabricated by metal-organic decomposition, and their dielectric properties were investigated in order to evaluate their potential use in passive capacitors for rf and analog/mixed signal integrated circuits. The ZST thin film annealed at the temperature of $800^{\circ}C$ showed a dielectric constant of 27.3 and a dielectric loss of 0.011. The capacitor using the ZST film had quadratic and linear voltage coefficient of capacitance (VCC) of -65 ppm/$V^2$ and -35 ppm/V at 100 kHz, respectively. It also exhibited a good temperature coefficient of capacitance (TCC) value of -32 ppm/$^{\circ}C$ at 100 kHz.

• Journal of the Korean Ceramic Society
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• 제37권7호
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• pp.665-672
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• 2000

The ferroelectric YMnO3 thin films were prepared by MOD(metal-organic decomposition) method with Y- and Mn-acetylacetonate as starting materials. Thin films were grown on various substrates by spin-coating technique. The crystalline phases of the thin films were identified by X-ray diffractometer as a function of heat-treatment temperature, pH of coating solution and substrate. In addition, the effect of Mn/Y molar ratio(0.8~1.2) on the formation of hexagonal-YMnO3 phase was investigated. In forming highly c-axisoriented hexagonal-YMnO3 single phase, the Pt coated Si substrate was more effective than the bare Si substrate, and the optimum heat-treatment condition was at 82$0^{\circ}C$ for 30 min. Higher Mn/Y molar ratio within 0.8~1.2 and pH of YMnO3 precursor solution within 0.5~2.5 favored formation of ferroelectric hexagonal phase rather than orthorhombic phase. Leakage current density of the hexagonal-YMnO3 thin film formed on Pt(111)/TiO2/SiO2/Si substrate was low enough as 0.4~4.0$\times$10-8(A/$\textrm{cm}^2$) at 5 V and its remanent polarization(Pr), calculated from the P-E hysteresis loop, was 3 nC/$\textrm{cm}^2$.

• Journal of Environmental Science International
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• 제15권3호
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• pp.221-227
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• 2006

Oxidative TCE decomposition over $TiO_2$-supported single and complex metal oxide catalysts has been conducted using a continuous flow type fixed-bed reactor system. Different types of commercial $TiO_2$ were used for obtaining the supported catalysts via an incipient wetness technique. Among a variety of titanias and metal oxides used, a DT51D $TiO_2\;and\;CrO_x$ would be the respective promising support and active ingredient for the oxidative TCE decomposition. The $TiO_2-based\;CrO_x$ catalyst gave a significant dependence of the catalytic activity in TCE oxidation reaction on the metal loadings. The use of high $CrO_x$ contents for preparing $CrO_x/TiO_2$ catalysts might produce $Cr_2O_3$ crystallites on the surface of $TiO_2$, thereby decreasing catalytic performance in the oxidative decomposition at low reaction temperatures. Supported $CrO_x$-based bimetallic oxide systems offered a very useful approach to lower the $CrO_x$ amounts without any loss in their catalytic activity for the catalytic TCE oxidation and to minimize the formation of Cl-containing organic products in the course of the catalytic reaction.

• Proceedings of the Materials Research Society of Korea Conference
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• 한국재료학회 2001년도 추계 학술발표강연 및 논문개요집
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• pp.136-136
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• 2001

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.370.1-370.1
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• 2016

Volatile organic compounds (VOCs) are considered hazardous air pollutants and these are emitted from building materials and household products. VOCs can cause global warming as well as human sickness, and even cancer. Photocatalysis provides a way of converting VOCs into harmless materials. Various researches have shown that $TiO_2$ is the most efficient photocatalysts due to its excellent activity. In this study, metal/non-metal doped $TiO_2$ particles are synthesized for the enhancement of the photocatalytic properties of pure $TiO_2$. By metal/non-metal doping, band gap energies of prepared samples were analyzed by UV/Visible spectrophotometer. The physical and chemical properties of synthesized powder were characterized by field emission scanning electron microscope, by BET for measuring their specific surface area, and by XRD for phase identification and particle size determination. Degradation ability for p-xylene was evaluated through monitoring the concentration in a closed chamber. Relation between their properties and decomposition abilities for VOC were evaluated based on the experimental results.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제27권4호
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• pp.226-231
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• 2014

Thin thermistor films of solutions with nickel and manganese oxides were prepared by metal-organic decomposition (MOD). The structural properties of the thin films were investigated as a function of annealing temperature. Field emission scanning electron microscope (FE-SEM) results indicated that the thin films had a thin thickness, smooth and dense surface. The crystallization temperature of $414.9^{\circ}C$ was confirmed from thermogavimetric-differential thermal analysis (TG-DTA) curve. A single phase of cubic spinel structure was obtained for the thin film annealed from $700^{\circ}C$ to $800^{\circ}C$, which was confirmed from the X-ray diffraction (XRD). From the selected area electron diffraction (SAED) in high resolution transmission electron microscope (HRTEM), the nano grains (2~3 nm) of spinel phase with (311) and (222) planes were detected for the thin film annealed at $500^{\circ}C$, which could be applicable to read-out integrated circuit (ROIC) substrate of the uncooled microbolometer with low processing temperature.

• Korean Journal of Materials Research
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• 제5권8호
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• pp.1045-1049
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• 1995

Thin films of Indium tin oxie (ITO) were prepared by the process of metal organic decomposition. Light transmittance and electrical transport properties of the films were studied with varying the firing temperature and SnO$_2$content. XRD study showed that tin substituted indium in the In$_2$O$_3$lattice. The resistivity had the minimum value of 2.5 ${\times}$ 10$\^$-3/$\Omega$-cm when the content of SnO$_2$was 9wt.%. This value was higher by a factor of 10 than the previously reported results. This difference was attributed to the low mobilities presumably caused by the fine grain size. The transmittance of ITO films in the visible range was over 90%, and the optical energy gap calculated from the absorption edge was in the range of 4.51 and 4.96eV.

• Applied Chemistry for Engineering
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• 제16권5호
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• pp.628-634
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• 2005

Zirconia-alumina polymer precursor was prepared from zirconium acetylacetonate (ZA). paluminium nitrate (AN), polyethylene glycol (PEG), and ethyl alcohol via an organic-inorganic solution technique. The thermal properties and viscosity of the polymer precursor were measured by differential scanning calorimetry (DSC), thermograbimetric analyzer (TGA), and dynamic viscometer. The vigorous exothermic reaction with volume expansion occurred at $140^{\circ}C$. The volume expansion was caused by abrupt decomposition of the organic group in metal compounds and the metal ions-PEG reaction. The evidences for these reactions were confirmed by FT-IR and $^{13}C$ solid NMR results. The peak intensity at N-O, O-H and C=C decreased with increasing temperature. This indicated that the decomposition of metal compounds and the metal ions-PEG reaction occurred during the vigorous exothermic reaction. At $800^{\circ}C$ for 2 h, the porous powders transformed to the crystalline $ZrO_2-Al_2O_3$ composites.

• Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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• 제10권S_3호
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• pp.127-137
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• 2001

The sonochemical Process has been applied as a treatment method and was investigated its effect on the decomposition of humic substances(HS). The reaction kinetics and mechanisms in the Process of sonochemical treatment for humic substances(HS) in wastewater have also been discussed. It was observed that the metal ions such as Fe(II) and Mn(II) showed catalytic effects, while Al(III), Ca(II), and Mg(II) had inhibitory effects on the decomposition of humic substances in sonochemical reaction with hydrogen peroxide. Experimental results also showed factors such as hydrogen peroxide dose affected the formation of disinfection by-products. Two trihalomethanes, chloroform and dichlorobromomethane were formed as major disinfection by-products during chlorination. The mechanism of radical reaction is controlled by an oxidation process. The radicals are so reactive that most of them are consumed by HS radicals and hydroxyl radicals can be acted on organic solutes by hydroxyl addition, hydrogen abstraction, and electron transfer. The depolymerization and the radical reaction of HS radicals appear to occur simultaneously. The final steps of the reaction are the conversion of organic acids to carbon dioxide.