• Journal of Mechanical Science and Technology
• /
• v.17 no.1
• /
• pp.114-121
• /
• 2003

Water droplet erosion is one of major concerns in the design of modern large fossil steam turbines because it causes serious operational problems such as performance degradation and reduction of service life. A new erosion model has been developed in the present study for the prediction of water droplet erosion of rotor blades operated in wet steam conditions. The major four erosion parameter : impact velocity, impacting droplet flow rate, droplet size and hardness of target are involved in the model so that it can also be used for engineering purpose at the design stage of rotor blades. Comparison of the predicted erosion rate with the measured data obtained from the practical steam turbine operated for more than 90,000 hours shows good agreement.

• Transactions of Materials Processing
• /
• v.8 no.3
• /
• pp.301-301
• /
• 1999

Austenitic stainless steels such as AISI 316L have been used in equipment in which fluid flows at high speeds which can induce cavitation erosion on metallic surfaces due to the collapse of cavities, where the collapse is caused by the sudden change of local pressure within the liquid. Usually AISI 316L is susceptible to cavitation erosion. This research focuses on developing a better material to replace the AISI 316L used in equipment with high speed fluid flow, such as impellers. The effects of Rare Earth Metal (REM) additions on the cavitation erosion-corrosion resistance of duplex stainless steels were studied using metallographic examination, the potentiodynamic anodic polarization test, the tensile test, the X-ray diffraction test and the ultrasonic cavitation erosion test. The experimental alloys were found to have superior mechanical properties due to interstitial solid solution strengthening, by adding high nitrogen (0,4%), as well as by the refinement of phases and grains induced by fine REM oxides and oxy-sulfides. Corrosion resistance decreases in a gentle gradient as the REM content increases. However, REM containing alloys show superior corrosion resistance compared with that of other commercial alloys (SAF 2507, AISI 316L). Owing to their excellent mechanical properties and corrosion resistance, the alloys containing REM have high cavitation erosion-corrosion resistance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.11a
• /
• pp.140-143
• /
• 2004

Chemical mechanical polishing(CMP) is essential technology to secure the depth of focus through the global planarization of wafer. But a variety of defects such as contamination, scratch, dishing, erosion and corrosion are occurred during CMP. Especially, dishing and erosion defects increase the resistance because they decrease the interconnect section area, and ultimately reduce the life time of the semiconductor. Due to this dishing and erosion must be prohibited. The pattern density and size in chip have a significant influence on dishing and erosion occurred over-polishing. Decreasing of abrasive concentration results in advanced pattern selectivity which can lead the uniform removal in chip and decrease of over-polishing. The fixed abrasive pad was applied and tested to reduce dishing and erosion in this paper. Consequently, reduced dishing and erosion was observed in CMP of tungsten pattern wafer with proposed fixed abrasive pad and chemicals.

• International Journal of Precision Engineering and Manufacturing
• /
• v.9 no.2
• /
• pp.11-17
• /
• 2008

Critical erosion kinetic energy models for radial/median cracks and lateral cracks in a workpiece are established in this study. We used experimental results to demonstrate that the fracture erosion resistance and erosion machining number could be used to evaluate the brittle fracture resistance and machinability of a workpiece. Erosion kinetic energy models were developed to predict brittle fracture and ductile shear, and a critical erosion kinetic energy model was developed to predict the transition from brittle fracture to ductile shear. These models were verified experimentally.

• Tribology and Lubricants
• /
• v.13 no.3
• /
• pp.42-47
• /
• 1997

Three kinds of the sialon ceramics with and without TiN additions were prepared by hot pressing to investigate the effect of microstructure on erosion behaviors. Hardness and fracture toughness were measured with prepared specimens to study the effect of additives on the mechanical properties. A gas blast type erosion tester was employed to examine erosion behavior of the specimens up to $600^{\circ}C$. Erosion tests showed an increase of erosion rate up to 40$0^{\circ}C$ and a gradual decrease of erosion rate up to 50$0^{\circ}C$ for all kinds of sialon. The results also showed that erosion rates of the sialons were controlled better by microstructural factors than by mechanical properties including fracture toughness and hardness.

• Corrosion Science and Technology
• /
• v.13 no.4
• /
• pp.130-138
• /
• 2014

Wall thinning can be classified into three types: flow-accelerated corrosion, cavitation erosion and solid particle erosion. This article presents a study of solid particle erosion, which frequently causes damages to power plants' pipe system. Unlike previous studies, this study uses a mechanism to make solid particles in a fluid flow collide with pipe materials in underwater condition. Experiment is conducted in three cases of velocity according to solid-water ratio using the three types of the materials of A106B, SS400, and A6061. The experiments were performed for 30 days, and the surface morphology and hardness of the materials were examined for every 7 days. Based on the velocity change of the solid particles in a fluid flow, the surface changes, the change in the amount of erosion, the erosion rate and the variation in the hardness of carbon steel and aluminum family pipe materials can all be determined. In addition, factor-based erosion rates are verified and a wall-thinning relation function is suggested for the pipe materials.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1996.04b
• /
• pp.20-24
• /
• 1996

Three kinds of the sialon ceramics with and without TiN additions were hot pressed. Hardness and fracture toughness were measured with prepared specimens to study the effect of additives on the mechanical properties. A gas blast type erosion tester was employed to examine erosion behavior of the specimens up to 600 $^{\circ}$C. Erosion tests showed an increase of erosion rate up to 400 $^{\circ}$C and a gradual decrease of erosion rate 500 $^{\circ}$C for all kinds of sialon. The results also showed that erosion rates of the sialons were controlled better by microstructure factors than by mechanical properties such as fracture toughness.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.12
• /
• pp.192-199
• /
• 2001

Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• International Journal of Fluid Machinery and Systems
• /
• v.8 no.3
• /
• pp.183-192
• /
• 2015

The aim of this study was comparative analysis of sediment-induced erosion on optimized design and traditional design of Francis runner blade. The analysis was conducted through laboratory experiments in a test rig called Rotating Disc Apparatus. The results showed that the extent of erosion was significantly less in the optimized design when compared based on the material loss. It was observed that the optimized design could reduce sediment erosion by about 14.4% if it was used in place of the reference design for entire duration of the experiment. Based on the observations and results obtained, it has been concluded that the optimization of hydraulic design of blade profile of Francis runner can significantly reduce the effect of sediment-induced erosion.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2002.10b
• /
• pp.435-437
• /
• 2002

Polishing of copper, a process called copper chemical mechanical polishing, is a critical, intermediate step in the planarization of silicon wafers. During polishing, the electrodeposited copper films are removed by slurries: and the differential polishing rates between copper and the surrounding silicon dioxide leads to a greater removal of the copper. The differential polishing develops dimples and furrows; and the process is called dishing and erosion. In this work, we present the results of experiments on dishing and erosion of copper-CMP, using patterned silicon wafers. Results are analyzed for the pattern factors and properties of the copper layers. Three types of pads - plain, perforated, and grooved - were used for polishing. The effect of slurry chemistries and pad soaking is also reported.