• Journal of the Korean Ceramic Society
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• v.35 no.8
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• pp.813-818
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• 1998

A simple method to measure the elastic modulus E and Poisson's ratio v of diamod-like carbon (DLC) films deposited on Si wafer was suggested. Using the anisotropic etching technique of Si we could make the edge of DLC overhang free from constraint of Si substrate. DLC film is chemically so inert that we could not on-serve any surface damage after the etching process. The edge of DLC overhang free from constraint of Si substrate exhibited periodic sinusoidal shape. By measuring the amplitude and the wavelength of the sinu-soidal edge we could determine the stain of the film required to adhere to the substrate. Since the residual stress of film can be determine independently by measurement of the curvature of film-substrate com-posite we could calculated the biaxial elastic modulus E/(1-v) using stress-strain relation of thin films. By comparing the biaxial elastic modulus with the plane-strain modulus E/(1-{{{{ { v}^{2 } }}) measured by nano-in-dentation we could further determine the elastic modulus and Poisson's ratio independently. This method was employed to measure the mechanical properties of DLC films deposited by {{{{ { {C }_{6 }H }_{6 } }} rf glow discharge. The was elastic modulus E increased from 94 to 169 GPa as the {{{{ { V}_{ b} / SQRT { P} }} increased from 127 to 221 V/{{{{ {mTorr }^{1/2 } }} Poisson's ratio was estimated to be abou 0.16∼0.22 in this {{{{ { V}_{ b} / SQRT { P} }} range. For the {{{{ { V}_{ b} / SQRT { P} }} less than 127V/{{{{ {mTorr }^{1/2 } }} where the plastic deformation can occur by the substrate etching process however the present method could not be applied.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.12 no.4
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• pp.371-380
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• 2000

The turbulent heat transfer from a round oblique impinging jet on a concave surface were experimentally investigated. The transient measurement method using liquid crystal was used in this study. In this measurement, a preheated wall was suddenly exposed to an impinging jet while recording the response of liquid crystals to measure surface temperature. The Reynolds numbers were 11000, 23000 and 50000, nozzle-to-surface distance ratio was from 2 to 10 and the surface angles were a =$0^{\circ}\;15^{\circ},\;30^{\circ}and\;40^{\circ}$. Correlations of the stagnation point Nusselt numbers with Reynolds number, jet-to-surface distance ratio and dimensionless surface angle, which account for the surface inclined angle, are presented. The maximum Nusselt numbers, in this experiment, occurred in the direction of upstream. The displacement of the maximum Nusselt number from the stagnation point increases with increasing surface angle or decreasing nozzle-to-surface distance. In this experiment, the maximum displacement is about 0.7 times of the jet nozzle diameter when surface curvature, D/d is 10.

• Journal of the Korean Statistical Society
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• v.36 no.2
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• pp.201-208
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• 2007

Evolutionary operation (EVOP) proposed by Box (1957) is a method for continuous monitoring and improvement of a full-scale manufacturing process with the objective of moving the operating conditions toward the better ones. EVOP consists of systematically making small changes in the levels of the two or three process variables under consideration. Data are collected on the response variable at each point of two level factorial design with the center point and a cycle is said to have been completed. The cycles are replicated sequentially until the decision is made on whether further cycle of experiments is needed to conclude the significance of any of main effects or interaction effects or the curvature. In this paper, an improved flow chart of EVOP is proposed and how to determine the number of cycles is studied based on the size of type II error. In order to reject the alternative hypothesis of interests with more confidence and conclude that we believe in the null hypothesis of no effects, we propose a counter measure $p^*-value$ corresponding to the p-value. The relationship of $p^*-value$ to the probability of type II error ${\beta}$ under the alternative hypothesis of interests is analogous to that of p-value to the probability of type I error ${\alpha}$. Also the implementation of EVOP with a mixture experiment is discussed.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.43-50
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• 2002

In the design of structure, the forces acting on tai structure are key parameter fur noise and vibration control. However, in the complex structure, the forces at the injection point on the structure cannot be measured directly. So, it is necessary to find out Indirect force evaluation method. In this paper, forces have been measured with In-situ vibration responses and system information. And, three existing techniques of indirect force measurement, vita. direct inverse. principal component analysis and regularization have been compared. This paper shows that multi-vibration responses are essential for talc precise estimation of the forces. To check these conditions, rotary compressor is adopted as test sample, because it is very difficult to measure the injection forces from internal excitation to shell. It alas also been obtained that relatively higher force is transmitted through three welding paths to the compressor shell. It shows a good agreement between direct and indirect force evaluation with curvature shell and plate.

• Journal of Advanced Navigation Technology
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• v.13 no.2
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• pp.187-193
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• 2009

A lens which is one of cores for the high precision laser range finder is utilized to compute the distance by measuring the phase displacement. In order to measure the phase displacement, we transmit the optical signal from the laser diode to a target and receive the reflected laser light from the target. In this paper, we propose new lens design technique to solve the problem due to the inconsistent curvature of the lens, which consistently collects optical signals and performs the transmission and reception of the optical data, and test the implementation of the laser range finder based on the proposed technique. Since the proposed laser range finder has low error rate comparing to the conventional techniques, it may be apply to the high precision distance measurement.

• Journal of Korea Multimedia Society
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• v.6 no.4
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• pp.698-706
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• 2003

The primary goal of surface approximation is to reduce the degree of deviation of the simplified surface from the original surface. However it is difficult to define the metric that can measure the amount of deviation quantitatively. Many of the existing studies analogize it by using the change of the scalar quantity before and after simplification. This approach makes a lot of sense in the point that the local surfaces with small scalar are relatively less important since they make a low impact on the adjacent areas and thus can be removed from the current surface. However using scalar value alone there can exist many cases that cannot compute the degree of geometric importance of local surface. Especially the perceptual geometric features providing important clues to understand an object, in our observation, are generally constructed with small scalar value. This means that the distinguishing features can be removed in the earlier stage of the simplification process. In this paper, to resolve this problem, we present various factors and their combination as the metric for calculating the deviation error by introducing the orientation of local surfaces. Experimental results indicate that the surface orientation has an important influence on measuring deviation error and the proposed combined error metric works well retaining the relatively high curvature regions on the object's surface constructed with various and complex curvatures.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.732-734
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• 1998

Metal thin films such as aluminum have been used as interconnects in semiconductor device. Recently, these materials are applied to structural materials in microsensors and microactuators. In this study, we evaluate deformation and strength behavior of aluminum alloy film. Three layer model for thermal deformation of multilayered thin film material is introduced and applied to Si/Al(1%Si)/$SiO_2$ system. Based on beam bending theory and concept of bending strain. elastic and elastic/plastic thermal deformation behaviors of multilayered materials can be estimated. In the case of plastic deformation of ductile layer, strain rate equations based on deformation mechanism map are employed for describe the stress relaxation effect. To experimentally examine deformation of multilayered thin film materials, in-situ laser scanning method is used to measure curvature of specimens during heating and cooling. The thickness of $SiO_2$ layer is varied to estimate third-layer effect of thermal deformation of metal films, and its effect on deformation behavior are discussed.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1791-1796
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• 2005

Semi-shield tunneling is one of the propulsion construction methods used to lay pipes underground between two pits named 'entrance' and 'destination', respectively. Usually a simple composition, such as 'a fiducial target at the entrance+a total station (TS)+a target on the machine', is used to confirm the planned course. However, unavoidable curved sections are present in small-sized pipe lines, which are laid after implementation of a road system, for public works such as waterworks, sewer, electrical power, and gas and communication networks. Therefore, if the planned course has a curved section, it is difficult to survey the course with the abovementioned simple composition. This difficulty could be solved by using the multiple total stations (MTS), which attaches the cross type linear LED target to oneself. The MTS are disposed to where each TS can detect the LED target at the other TS or the base point or the machine. And the accurate relative positions between each MTS and target are calculated from measured data. This research proposes the relative and absolute coordinate calculation algorithm by using three MTS to measure a curved course with 20m curvature at 30m maximum distance, and verifies the algorithm experimentally.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.8
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• pp.11-16
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• 2008

In this paper, firstly we made of the rapid thermal processor equipment with the specifically useful structure to measure wafer stress. Secondly we made of the laser interferometry to inspect the wafer surface curvature based on the large deformation theory. And then the wafer surface fringe image was obtained by experiment, and the full field stress distribution of wafer surface comes into view by signal processing with thining and pitch mapping. After wafer was ground by 1mm and polished from the back side to get easily deformation, and it was heated by three to four times thermal treatments at about 1000 degree temperature. Finally the severe deformation between wafer before and after the heat treatment was shown.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.453-460
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• 2000

A test rig is developed for performance test of 1 stage axial-type turbine which is designed by meanline analysis, streamline curvature method, and blade design method using configuration parameters. The purpose of this study is to find the best configuration parameters for designing a high efficiency axial-type turbine blade. To measure the efficiency of turbine stage, a dynamo-meter is installed. Two different stators which are manufactured as an integrated type are developed, and a rotor blade and 5 sets disc are developed for setting different stagger angle. The tip and hub diameters of the test turbine are 300 and 206.4mm, respectively. The rotating speed is 1800RPM, and the extracted power is 2.5kW. Flow coefficient is 1.68 and the reaction factor at meanline is 0.373. The number of stator and rotor of test turbine are 31 and 41, respectively. The Mach number of stator exit flow near hub is 0.164.