Fabrication and Characterization of Poly-Si TFT′s using Solid Phase Crystallization of LPCVD Amorphous Si Fims byNucleation-Interface-Control (핵생성 계면 제어된 LPCVD 비정질 실리콘 박막의 고상결정화를 이용한 다결정 실리콘 박막 트랜지스터 제조)

• 황의훈;정세진;노재상
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1996.11a
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  • pp.113-113
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  • 1996
• PDF

Characterization of Nanocrystalline Si Thin Film Prepared by PECVD Methods (PECVD 기법을 이용한 나노 결정 Si 박막의 제조 및 특성 평가)

• 심재현;박명범;한규호;조남희
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.11a
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  • pp.184-184
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  • 2001
• PDF

Preparation and Characterization of ITO powder by Metal Organic Deposition and Coprecipitation Method (MOD법과 공침법에 의한 ITO 분말의 제조 및 특성)

• 양범석;최용각;원창환;이조현
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.11a
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  • pp.135-135
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  • 2001
• PDF

Characterization of Transparent and Conducting ITO Films Prepared by Metal Organic Decomposition (MOD법에 의해 제조된 투명전도성 ITO 박막의 특성)

• 양범석;윤기석;원창환;이종현
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.11a
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  • pp.136-136
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  • 2001
• PDF

Growth and Characterization of ZnO Film by the Helicon Wave Plasma Assisted Evaporation Process (Helicon Wave 플라즈마 보조 증발법을 이용한 ZnO 박막의 성장과 특성 평가)

• 박태희;김경보;김기성;김선효
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.11a
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  • pp.154-154
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  • 2001
• PDF

Simulation and characterization of Si-O-n-F films for optical lithography (광리소그래피 위상변위 마스크를 위한 Si-O-N-F 박막의 모사연구 및 특성분석)

• 최은철;김성관;노광수;김형도;손정민
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.11a
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  • pp.162-162
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  • 2001
• PDF

Electrical Characterization of Ultra-Shallow Junctions Formed by Using $CoSi_2$ as Diffusion Source ($CoSi_2$를 확산원으로 형성한 매우 얇은 접합의 전기적 특성)

• 구본철;정연실;심현상;배규식
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1997.10a
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  • pp.154-154
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  • 1997
• PDF

Preparation and Characterization of Catalytic Ceramic Fiber Filters (촉매기능 세라믹섬유필터의 제조와 물성에 관한 연구)

• 신현익;박민진;최영진;정찬일;홍민선;이재춘
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1999.05a
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  • pp.78-78
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  • 1999
• PDF

The Characterization of Re-used Oxide CMP Slurry (재생된 산화막 CMP용 슬러리의 특성에 대한 연구)

• 김명식;김형준;엄대홍;박진구;마석중;류홍기
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2000.11a
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  • pp.52-52
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  • 2000
• PDF

Nano scale fabrication and characterization of graphite planar-type structures

• Venugopal, Gunasekaran;Kim, Sang-Jae
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.53-53
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  • 2008
• PDF

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