• 제목/요약/키워드: Material Reduction Rate

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W CMP 공정에서의 연마패드표면 안정화 상태와 그 개선 (Stability and Improvement of Polishing Pad in W CMP)

  • 박재홍;키노시타 마사하루;요시다 코이치;신이치 마츠무라;정해도
    • 한국전기전자재료학회논문지
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    • 제20권12호
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    • pp.1027-1033
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    • 2007
  • In this research, the polishing pad for W CMP has been analyzed to understand stabilization of polishing performance. For stabilization of process, the polishing pad condition is one of important factors. The polishing pad plays a key role in polishing process, because it contact with reacted surface of wafer[1]. The physical property of pad surface is ruled by conditioning tool which makes roughness and profile of pad surface. Pad surface affects on polishing performance such as RR(Removal Rate) and uniformity in CMP. The stabilized pad surface has stable roughness. And its surface has high level of wettability which can increase the probability of abrasive adhesion on pad. The result of this research is that the reduction of break-in and dummy polishing process were achieved by artificial machining to make stable pad surface. In this research, urethane polishing pad which is named IC pad(Nitta-Haas Inc.) and has micro pore structure, is studied. Because, this type of pad is the most conventional type.

Seismic behavior of steel tube reinforced concrete bridge columns

  • Tian, Tian;Qiu, Wen-liang;Zhang, Zhe
    • Steel and Composite Structures
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    • 제28권1호
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    • pp.63-71
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    • 2018
  • This paper reports an experimental study that was accomplished to assess the seismic behavior of steel tube reinforced concrete bridge columns (SBCs). The motivation of this study was to verify a supposition that the core steel tube may be terminated at a rational position in the column to minimize the material cost while maintaining the seismic behavior of this composite column. Four SBC specimens were tested under combined constant axial load and cyclic reversed lateral loads. The unique variable in the test matrix was the core steel tube embedment length, which ranged from 1/3 to 3/3 of the column effective height. It is observed that SBCs showed two distinctly different failure patterns, namely brittle shear failure and ductile flexural failure. Tests results indicate that the hysteretic responses of SBCs were susceptible to the core steel tube embedment length. With the increase of this structural parameter, the lateral strength of SBC was progressively improved; the deformability and ductility, however, exhibited a tendency of first increase and then decrease. It is also found that in addition to maintained the rate of stiffness degradation and cumulative energy dissipation basically unchanged, both the ductility and deformability of SBC were significantly improved when the core steel tube was terminated at the mid-height of the column, and these were the most unexpected benefits accompanied with material cost reduction.

초정밀 Gear 미세 모듀율을 가진 2 Cavity 파인 블랭킹 시트 리클라이너 금형 제조기술에 관한 연구 (Study on the Manufacturing Technology of 2-Cavity Fine Blanking Seat Recliner Die with Minute Module of Accurate Gear)

  • 박동환;권혁홍
    • 한국기계가공학회지
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    • 제15권2호
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    • pp.22-30
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    • 2016
  • It is very important to obtain the net shape of the product to maximize the shear cutting surface of fine blanking. In this paper, the fine blanking die was manufactured to achieve part characteristics, such as flatness and a fully sheared surface. The V-ring in the fine blanking die was designed to prevent lateral movement of the material. The fine blanking experiment was conducted with the fine blanking die. The material usage rate was increased by over 5.7% and that of the water-soluble lubricant was decreased by over 33% when the 2-cavity die technology was applied to fine blanking. The capacity of the existing press could lead to productivity improvement and cost reduction. Thus, 2-cavity die technology for fine blanking with a minute module of an accurate gear for producing seat recliner parts was developed.

공구강의 고온 변형 거동 예측을 위한 모델 비교 연구 (Comparison Study of Prediction Models for Hot Deformation Behavior of Tool Steel)

  • 김근학;박동성;전중환;이민하;이석재
    • 열처리공학회지
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    • 제31권4호
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    • pp.180-186
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    • 2018
  • High temperature flow behaviors of Fe-Cr-Mo-V-W-C tool steel were investigated using isothermal compression tests on a Gleeble simulator. The compressive test temperature was varied from 850 to $1,150^{\circ}C$ with the strain rate ranges of 0.05 and $10s^{-1}$. The maximum height reduction was 45%. The dynamic softening related to the dynamic recrystallization was observed during hot deformation. The constitutive model based on Arrhenius-typed equation with the Zener-Hollomon parameter was proposed to simulate the hot deformation behavior of Fe-Cr-Mo-V-W-C steel. An artificial neural network (ANN) model was also developed to compare with the constitutive model. It was concluded that the ANN model showed more accurate prediction compared with the constitutive model for describing the hot compressive behavior of Fe-Cr-Mo-V-W-C steel.

A STUDY OF MAGNETIC ALIGNMENT OF DIE-UPSET Pr-Fe-B-Cu MAGNETS

  • Kwon, H.W.;Ma, T.J.;Harris, I.R.
    • 한국자기학회지
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    • 제5권5호
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    • pp.416-420
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    • 1995
  • An attempt has been made to investigate the mechanism of magnetic alignment in the magnets produced by upset forging the $Pr_{20}Fe_{74}B_{4}Cu_{2}$ cast bulk alloy. Upset forging of the cast alloy was carried out for 20 sec to an 80 % thickness reduction (strain rate : $4{$\times}10^{-2}s^{-1}$) in an open die configuration at varying temperatures in the range $600^{\circ}-900^{\circ}C$. It has been found that the upset forging process at temperatures above $800^{\circ}C$ can achieve a magnetic alignment to a great extent from copper-containing Pr-Fe- B-type cast ingot. The growth manner of the ferromagnetic $Pr_{2}Fe_{14}B$ matrix grain in Pr-Fe-B-type alloys was studied by examining the morphology change of the matrix grain in sintered body, and it was found that the matrix grains grew in anisotropic manner such that the grain grew more rapidly along the a- or b-axis than along the c-axis. This anisotropic grain growth led to the plate-like shape of the matrix grain. The magnetic alignment during the upset forging was attributed to grain boundary gliding of the plate-like grains, and the geometry of the grains in the cast ingot and the presence of a large amount of the praseodymium-rich grain boundary phase were thought to play a key role in the achievement of magnetic alignment.

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강도 및 건조수축 저감을 통한 CLC의 안정성 평가 (Evaluation of Stability of CLC through Strength and Reduction of Drying Shrinkage)

  • 이창우;황우준;이상수
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2022년도 가을 학술논문 발표대회
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    • pp.205-206
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    • 2022
  • This study intends to conduct tests on subsidence and drying shrinkage by mixing CaO-CSA expansion materials to ensure the stability of CLC, and to understand its properties. Based on CLC of 0.6, the replacement ratio of CaO-CSA expansion material was conducted at five levels compared to blast furnace slag, and the results are as follows. The replacement of CaO-CSA expansion material at an appropriate level produces ethringhite and potassium hydroxide, and it is believed that the internal voids of CLC and the Tobelmorite interlayer structure are charged to increase the structural stability, leading to an increase in compressive strength and a decrease in the drying shrinkage. However, it is judged that tissue relaxation due to excessive substances in the high replacement ratio affects the stability of CLC. In the future, we will conduct additional experiments on density, absorption rate, flow test, and settlement, and evaluate and analyze the stability of CLC by selecting the optimal replacement ratio of CaO-CSA expansion materials.

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마그네슘 합금의 고온 평면변형 압축에서 Pb 첨가에 따른 미세조직 및 집합조직 변화 (Effects of Pb Aaddition on Microstructur and Texture in High Temperature Plane Strain Compression of Magnesium Alloys)

  • 지예빈;윤지민;김권후
    • 열처리공학회지
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    • 제37권1호
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    • pp.23-28
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    • 2024
  • As global warming accelerates, the transportation industry is increasing the use of lightweight materials with the goal of reducing carbon emissions. Magnesium is a suitable material, but its poor formability limits its use, so research is needed to improve it. Rare-earth elements are known to effectively control texture development, but their high cost limits commercial. In this study, changes in microstructure and texture were investigated by adding Pb, which is expected to have a similar effect as rare-earth elements. The material used is Mg-15wt%Pb alloy. Initial specimens were obtained by rolling at 773 K to a rolling reduction of 25% and heat treatment. Afterwards, plane strain compression was performed at 723 K with a strain rate of 5×10-2s-1 and a strain of -0.4 to -1.0. As a result, recrystallized grains were formed within the microstructure, and the main component of the texture changed from (0,0) to (30,26). The maximum axial density was initially 10.01, but decreased to 4.23 after compression.

p-수렴 부분층별모델에 의한 일변균열판의 패치재료 및 기하형상에 따른 응력확대계수 (Stress Intensity Factor of Single Edge Cracked Plates Considering Materials and Geometry of Patch by p-Convergent Partial Layerwise Model)

  • 안현지;안재석;우광성
    • 한국전산구조공학회논문집
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    • 제23권2호
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    • pp.191-198
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    • 2010
  • 이 연구에서는 접착패치보강의 서로 다른 형태 즉, 패치와 접착제의 재료, 크기, 두께 뿐만 아니라 일면보강 또는 양면보강에 따른 일변균열판의 응력감소에 대한 연구가 수행되었다. 수치해석 도구로는 p-수렴 부분층별 모델이 사용되었다. 이 모델의 면내 변위는 구간별 연속인 선형변화로 가정하였고, 두께방향으로의 면외 변위는 일정한 상수로 가정하여 적용하였다. 변위장의 정의는 적분형 르장드르 다항식을 적용하였고, 수치적분은 별도의 외삽법 없이 각 층별의 절점에서 발생하는 적분값을 바로 얻을 수 있는 가우스-로바토 적분법을 사용 하였다. 또, 에너지 방출률법을 사용하여 응력확대계수를 산출하였다. 수치예제를 통해 제안된 모델의 정확도는 물론이고 접착패치 보강형태에 따라 변화되는 무차원 응력확대계수와 처짐의 항으로 응력감소 효과를 분석하였다.

폴리프로필렌 섬유를 혼입한 폴리머 시멘트 모르타르의 폭렬특성에 관한 연구 (A Study on the Spalling Properties of Polymer Modified Cement Mortar Using Polypropylene Fiber)

  • 김민성;심상락;류동우
    • 한국건축시공학회지
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    • 제20권4호
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    • pp.305-311
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    • 2020
  • 기존 폴리머 시멘트 모르타르(PCM)는 일반적인 시멘트 모르타르에 비해 부착강도, 휨강도, 내약품성 등의 성능을 향상시킬 수 있어 철근콘크리트(RC)구조물의 보수·보강 시 폭넓게 사용하고 있다. 하지만 PCM은 화재와 같은 고온 환경에서 폭렬발생 가능성이 높아 구조안전성에 문제를 발생시킨다. 본 연구에서는 폭렬저감 PCM 개발을 목적으로 폴리머 혼입률(2%, 4%, 6%), PP 섬유길이(6mm, 12mm, 6+12mm), PP 섬유혼입률(0.05 Vol%, 0.1 Vol%)을 실험인자로 선정하여 전기로 가열실험(600℃, 800℃)을 진행하였다. 폭렬특성을 비교분석한 결과 폴리머 혼입률이 6% 이상인 경우에는 섬유혼입에 따른 폭렬저감 효과를 기대할 수 없었다.

리포익산 나노 입자의 식욕 억제에 대한 고분자의 영향 (Polymer Effects on Appetite Suppression by Lipoic Acid Nanoparticles)

  • 최혜민;박철호;이기업;박중열;고은희;김현식;이종휘
    • Journal of Pharmaceutical Investigation
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    • 제37권6호
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    • pp.349-354
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    • 2007
  • For decades, the various virtues of ${\alpha}-lipoic$ acid (ALA), a natural material synthesized in most cells, have been intensively studied and proved. Recently it was reported that ALA caused significant bodyweight reduction via appetite suppression. Unfortunately, the efficacy requires an administration over 50 mg/kg. The low bioavailability and the short plasma half life of ALA lead us to explore novel pharmaceutical dosage forms using nanoparticles. In this study, the effect of polymeric stabilizers on the bioavailability improvement of ALA nanoparticles was investigated. The reduction of particle size via nano-comminution technology was successful resulting in volume average particle sizes of 320 - 340 nm. The in vitro release rate of ALA did not reflect the decrease of particle size, possibly because of the self polymerization of ALA during nano-comminution. The type of polymeric stabilizers could not affect the release rate either. However, the in vivo food intake results of ALA showed that nano-suspensions were more effective than microparticles or a salt form. The nano-suspension containing polyvinyl pyrrolidone as the primary stabilizer and polyacrylic acid as the secondary stabilizer showed more improved efficacy for 2 hours.