• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.183-183
• /
• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Composites Research
• /
• v.28 no.6
• /
• pp.340-347
• /
• 2015

As resin impregnates through the fiber preform in vacuum assisted resin transfer molding process, the volume of fibers is changed by expansion of fiber mat according to filling time. It causes not only the change in dimension but also the decrease of mechanical properties of the composite product. Moreover, it results in the economic loss by increase of the used amount of resin especially in the large product such as wind turbine blade. In this study, the ways to control fiber volume fraction were investigated by both the experimental and theoretical analyses on the expansion of fiber preform as the preform was impregnated by resin in the VARTM process. Two kinds of swelling stage were observed as flow front progressed, which was analyzed by comparing the experimental and simulation results. The process parameters are expected to be optimized by investigating the swelling behavior of fiber preform in the manufacturing process of the composite product.

• Journal of the Semiconductor & Display Technology
• /
• v.20 no.4
• /
• pp.171-176
• /
• 2021

Die-to-wafer (D2W) hybrid bonding in the multilayer semiconductor manufacturing process is one of wafer direct bonding, and various studies are being conducted around the world. A noteworthy point in the current die-to-wafer process is that a lot of voids occur on the bonding surface of the die during bonding. In this study, as a suggested method for removing voids generated during the D2W hybrid bonding process, a flexible mechanism for implementing convex for die bonding to be applied to the bond head is proposed. In addition, modeling of flexible mechanisms, analysis/design/control/evaluation of static/dynamics properties are performed. The proposed system was controlled by capacitive sensor (lion precision, CPL 290), piezo actuator (P-888,91), and dSpace. This flexure mechanism implemented a working range of 200 ㎛, resolution(3σ) of 7.276nm, Inposition(3σ) of 3.503nm, settling time(2%) of 500.133ms by applying a reverse bridge type mechanism and leaf spring guide, and at the same time realized a maximum step difference of 6 ㎛ between die edge and center. The results of this study are applied to the D2W hybrid bonding process and are expected to bring about an effect of increasing semiconductor yield through void removal. In addition, it is expected that it can be utilized as a system that meets the convex variable amount required for each device by adjusting the elongation amount of the piezo actuator coupled to the flexible mechanism in a precise unit.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.17 no.6
• /
• pp.715-720
• /
• 2016

This paper proposes a PWM (Pulse Width Modulation) voltage mode DC-DC step-up converter for portable devices. The converter, which is operated with a 1 MHz switching frequency, is capable of reducing the mounting area of passive devices, such as inductor and capacitor, and is suitable for compact mobile products. This step-up converter consists of a power stage and a control block. The circuit elements of the power stage are an inductor, output capacitor, MOS transistors Meanwhile, control block consist of OPAMP (operational amplifier), BGR (band gap reference), soft-start, hysteresis comparator, and non-overlap driver and some protection circuits (OVP, TSD, UVLO). The hysteresis comparator and non-overlapping drivers reduce the output ripple and the effects of noise to improve safety. The proposed step-up converter was designed and verified in Magnachip/Hynix 0.18um 1-poly, 6-metal CMOS process technology. The output voltage was 5 V with a 3.3 V input voltage, output current of 100 mA, output ripple less than 1% of the output voltage, and a switching frequency of 1 MHz. These designed DC-DC step-up converters could be applied to the Personal Digital Assistants(PDA), cellular Phones, Laptop Computer, etc.

• Journal of Distribution Science
• /
• v.11 no.6
• /
• pp.81-89
• /
• 2013

Purpose - The market orientation of a manufacturer is a very critical competitive advantage factor in the development of new markets and the sustainability and maintenance of existing ones, achieved through the design of customer-oriented products. This is recognized as a virtuous circle, in which firms grow by means of promoting quality management. However, though market-oriented activities are important in management and operations, they seem to be promoted mainly by large-scale enterprises rather than by small- and medium-scale firms, the latter having invested relatively few company resources. Furthermore, few studies and analyses have examined how market orientation relates to the expansion of quality programs within organizations or with business performance; the market orientation and customer-orientation concepts are mixed together when both are used in research. Given the current market situation in which the servitization of manufacturing firms is rapidly expanding, this study's analysis of the effect on market orientation of manufacturers is a significant contribution. From this perspective, this study has several objectives. First, is to analyze and suggest the relationship between market orientation and quality management activity for manufacturers, focusing on three sub-activities: products, process, and quality management activities. Second, it is intended to identify correlation between manufacturers' market oriented activity and their management performance and then to analyze how market orientation affects business performance. The results of a number of prior studies on the correlation between market orientation and management performance have indicated that market orientation does affect management performance. Third, this study also investigates whether any differences in the relationship among market orientation, quality management activity and business performance occur according to company size. The results are used to present operational suggestions for large- and small- and medium-size firms. Research design, data, methodology - This study seeks to analyze and identify the causal features of the organic relationship among market orientation, quality management, and management performance for Korean manufacturing companies using three years (2005-2007) of market orientation, quality management, and business performance data. Subsequently, structural equation modeling was used to analyze the causal features of related factors and it aims to identify the features of market orientation, quality management, and business performance. Results - The analysis examined how market orientation affected the quality management and management performance of 159 smalland medium-size companies. In particular, enterprise quality management was analyzed in relation to management performance with a focus on activities such as leadership, measurement and improvement, quality control, cost management, and process management. Conclusions - The result of the analysis show that market orientation significantly affected all of the quality management activities and that market orientation in turn significantly affected organizational performance. The result of analysis indicate that quality management activities have a significant effect on quality control and cost management.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.5
• /
• pp.914-923
• /
• 2002

Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. This paper shows how the mechanical design of the gyroscope can be done using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations introduced during manufacturing. Functional requirements are defined twofold. One is that the natural frequencies should have fixed values, and the other is that the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed fellowing the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values fur the difference of frequencies without consideration of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.

• Journal of Physiology & Pathology in Korean Medicine
• /
• v.17 no.1
• /
• pp.177-182
• /
• 2003

This study was carried out to understand the effects of Bambusae Caulis in Liquamen on blood sugar in the db/db mice. Refined Bambusae Caulis in Liquamen C. D(BCL.C. D)manufactured by high temperature production process and Bambusae Caulis in Liquamen(H-BCL) manufactured & distributed by HANLIM PHARM.COM., LTD were used. The Bambusae Caulis in Liquamen extracted from bamboo charooal manufacturing process was filtered and refined. The effects of Bambusae Caulis in Liquamen were administered orally to mice for 6weeks and its anti-diabetic effect examined. The effects of BCL.C. D and H-BCL were observed in terms of blood sugar. creatinine. BUN and GPT in db/db mice. The results were as follows : The amount of glucose was slightly decreased (P<0.05) in the B CL.C-treated groups compared with the control. The amount of glucose was significantly decreased (P<0.01) in the BCL.D and H-BCL-treated groups compared with the control. The amount of creatinine did not show any differences among four groups. The amount of blood urea nitrogen did not show any differences in the case of BCL.C-treated groups. but observed significant decrease in the case of BCL.D and H-BCL-treated groups. The amount of GPT did not show any differences in the case of BCL.D-treated groups. but observed significant increase in the case of BCL.C and H-BCL-treated groups.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.38 no.6
• /
• pp.637-647
• /
• 2014

In pressurized water reactors, the upper head of the reactor pressure vessel (RPV) contains numerous control rod drive mechanism (CRDM) nozzles. These nozzles are fabricated by welding after being inserted into the RPV head with a room temperature shrink fit. The tensile residual stresses caused by this welding are a major factor in primary water stress corrosion cracking (PWSCC). Over the last 15 years, the incidences of cracking in alloy 600 CRDM nozzles have increased significantly. These cracks are caused by PWSCC and have been shown to be driven by the welding residual stresses and operational stresses in the weld region. Various measures are being sought to overcome these problems. The defects resulting from the welding process are often the cause of PWSCC acceleration. Therefore, any weld defects found in the RPV manufacturing process are immediately repaired by repair welding. Detailed finite-element simulations for the Korea Nuclear Reactor Pressure Vessel were conducted in order to predict the magnitudes of the repair weld residual stresses in the tube materials.

• Journal of Ginseng Research
• /
• v.35 no.4
• /
• pp.487-496
• /
• 2011

Good manufacturing practice (GMP)-based quality control is an integral component of the common technical document, a formal documentation process for applying a marketing authorization holder to those countries where ginseng is classified as a medicine. In addition, authentication of the physico-chemical properties of ginsenoside reference materials, and qualitative and quantitative batch analytical data based on validated analytical procedures are prerequisites for certifying GMP. Therefore, the aim of this study was to propose an authentication process for isolated ginsenosides $Rb_1$ and $Rg_1$ as reference materials (RM) and for these compounds to be designated as RMs for ginseng preparations throughout the world. Ginsenoside $Rb_1$ and $Rg_1$ were isolated by Diaion HP-20 adsorption chromatography, silica gel flash chromatography, recrystallization, and preparative HPLC. HPLC fractions corresponding to those two ginsenosides were recrystallized in appropriate solvents for the analysis of physico-chemical properties. Documentation of the isolated ginsenosides was made according to the method proposed by Gaedcke and Steinhoff. The ginsenosides were subjected to analyses of their general characteristics, identification, purity, content quantitation, and mass balance tests. The isolated ginsenosides were proven to be a single compound when analyzed by three different HPLC systems. Also, the water content was found to be 0.940% for $Rb_1$ and 0.485% for $Rg_1$, meaning that the net mass balance for ginsenoside $Rb_1$ and $Rg_1$ were 99.060% and 99.515%, respectively. From these results, we could assess and propose a full spectrum of physicochemical properties for the ginsenosides $Rb_1$ and $Rg_1$ as standard reference materials for GMP-based quality control.

• Journal of Distribution Science
• /
• v.15 no.9
• /
• pp.95-107
• /
• 2017

Purpose - In the joint development of new products, buyers and suppliers exchange information to solve various problems. Uncertainty and ambiguity are typical examples. Uncertainty refers to the lack of information to solve the problem, and equivocality refers to the case where the information is interpreted in multiple processes in the process of providing the information. These uncertainty and equivocality cause new products to be delayed in their development and adversely affect quality. However, unfortunately, there is a lack of researches on how the uncertainty and equivocality of such concepts control the results of new product joint development. But, smooth communication and effective exchange of information is not emphasized only in the general organization. The importance of the new product joint development projects to achieve the two organizations' common goals becomes even greater. The purposes of this study are to analyse the effect of supplier's strategy on the NPD performance and moderating effect of uncertainty and equivocality. Research design, data, and methodology - In order to make a contribution to the lack of academic researches in Korea, this study collects data through questionnaires based on organizational information processing theory and previous studies, and conducts empirical analysis. Results - As a result, the product modularization strategy and the strategic supply chain relationship positively influenced the new product development performance - return on investment and ease of manufacturing. And the interaction effect of uncertainty and equivocality with supplier's strategy - product modularity strategy and strategic supply chain management relationship - reduces or negates the influence of product modularization strategy on new product development performance. Conclusions - This implies that it is important to control uncertainty and equivocality in order for the supplier strategy to have a positive effect on new product development performance. It also emphasizes the necessity of sharing information appropriately for companies that do not want to share the information as possible due to their fear of loss of competitive advantage in the joint development of new products. Because this kind of negative policy might let uncertainty and equivocality be happen in new product joint development process.