• Applied Science and Convergence Technology
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• v.27 no.2
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• pp.26-29
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• 2018

The ion energy and angle distributions (IEADs) in the DC magnetron sputtering systems are investigated for the variation of gas pressure using particle-in-cell simulation. Even for the condition of collisionless ion sheath at low pressure, it is possible to change the IEAD significantly with the change of gas pressure. The bombarding ions to the target with low energy and large incident angle are observed at low pressure when the sheath voltage drop is low. It is because the electron transport is hindered by the magnetic field at low pressure because of few collisions per electron gyromotion while the ions are not magnetized. Therefore, the space charge effect is the most dominant factor for the determination of IEADs in low-pressure magnetron sputtering discharges.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.502-502
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• 2012

반도체 공정 중 플라즈마를 이용하는 식각 공정의 경우, 실제 식각률이나 profile의 특성은 RF Bias power에 의해 기판에 당겨지는 이온 선속에 의해 큰 영향을 받는다. 때문에 플라즈마 발생장치 내에서 기판에서의 이온에너지 분석이 중요해지고 있다. 이온에너지 분석을 위해 다양한 형태의 이온에너지 분석기가 나와있으나 기판 위에 얹혀있는 양상이었다. 이에 본 발표에서는 실제 기판 안에 이온에너지 분석기를 설치함으로써 실제 기판에서 wafer가 받는 이온들의 양상에 더 가깝게 접근했다. 이렇게 제작 된 이온에너지 분석기를 이용해 대면적 M-ICP(Magnetized-Induced Coupled Plasma)에서 아르곤 가스를 이용한 플라즈마에서 기판 이온 에너지 분포를 확인해 보았다. 압력의 변화, ICP Source power의 변화, 일정한 Source power에서 기판에 가해지는 Bias power의 변화에 대해 측정함으로써 각각의 조건 변화에 따른 이온들의 변화양상에 대한 이해를 할 수 있었다.

• Journal of the Korean institute of surface engineering
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• v.32 no.6
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• pp.658-664
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• 1999

Helicon sources are attractive for plasma processing because they provide high plasma density in low magnetic fields. Helicon waves were excited by a Nagoya type III antenna in a magnetized plasma column. Plasma parameters were measured with a double probe, and the structure and adsorption of the helicon wave fields were determined with the probes. Argon is fed through a MFC (mass flow controller) for operation pressure of 10~110 mtorr. A 13.56 MHz r.f. power of 50~450 W is induced through the antenna. The plasma density and electron temperature are measured as functions of external magnetic field, r.f. power and pressure. The plasma density as functions of r.f. power and magnetic field at a constant pressure increased linearly, and the electron temperature did not change largely with various operation parameters and the value was around 5~7 eV.

• Journal of The Korean Astronomical Society
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• v.34 no.4
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• pp.341-343
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• 2001

Here were continue the MHD study started by Santillan et al (1999) for the interaction of high-velocity clouds (HVCs) with the magnetized thick gaseous disk of our Galaxy. We use the MHD code ZEUS-3D and perform 3D-numerical simulations of this interaction, and study the formation of head-tail structures in HVCs. Our results show that clouds located above 2 kpc from mindplane present velocity and column density gradients with a cometary structure that is similar to those observed in 21 cm emission

• Journal of The Korean Astronomical Society
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• v.37 no.4
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• pp.237-241
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• 2004

We perform numerical experiments on supernova-driven turbulent flows in order to see whether or not supernovae playa major role in driving turbulence in the interstellar medium. In a $(200pc)^3$ computational box, we set up, as initial conditions, uniformly magnetized gas distributions with different pairs of hydrogen number densities and magnetic field strengths, which cover the observed values in the Galactic midplane. We then explode supernovae at randomly chosen positions at a Galactic explosion rate and follow up the evolution of the supernova-driven turbulent flows by integrating numerically the ideal MHD equations with cooling and heating terms. From the numerical experiments we find that the density-weighted velocity dispersions of the flows are in the range of 5-10 km $s^{-l}$, which are consistent with the observed velocity dispersions of cold and warm neutral media. Additionally, we find that strong compressible flows driven by supernova explosions quickly change into solenoidal flows.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.106.2-106.2
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• 2011

The two competing theories of star formation are based on turbulence and ambipoar diffusion. I will first briefly explain the two theories. There have been analytical (or semi-analytic) models, which estimate star formation rates in a turbulent cloud. Most of them are based on the log-normal density PDF (probability density function) of the turbulent cloud without self-gravity. I will first show that the core (star) formation rate can be increased significantly once self-gravity of a turbulence cloud is taken into account. I will then present the evolution of molecular line profiles of HCO+ and C18O toward a dense core that is forming inside a magnetized turbulent molecular cloud. Features of the profiles can be affected more significantly by coupled velocity and abundance structures in the outer region than those in the inner dense part of the core. During the evolution of the core, the asymmetry of line profiles easily changes from blue to red, and vice versa. Finally, I will introduce a method for incorporating ambipolar diffusion in the strong coupling approximation into a multidimensional magnetohydrodynamic code.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.10
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• pp.453-456
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• 2005

We have fabricated superconducting ceramics by chemical process. A high Tc superconducting with a nominal composition of YBaCuO was prepared by the pyrolysis method. The electromagnetic properties in YBaCuO superconductor was studied. In the measurement of current-voltage characteristics, a voltage across the superconducting sample was observed on applying an external magnetic field. The voltage increases with increase in applied magnetic flux, but it becomes constant at about 10$^{-2}$T. The voltage continues to appear the removal of the magnetic field. The appearance of the voltage is ascribed to the trapping of magnetic flux. Depending on the direction of applied magnetic flux less than 2.5$\times$10$^{-5}$ T, the voltage in the magnetized sample increases or decreases.

• Proceedings of the KIEE Conference
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• 2006.07b
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• pp.843-844
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• 2006

자기 기록 시스템이 더 높은 기록 밀도를 가지려면 기록 미디어에 더 작은 공간을 가지는 비트를 기록할 수 있어야 한다. 이를 가능하게 하기 위해서는 더 작은 비트를 보존 할 수 있는 고 보자력 기록 미디어와 이를 기록할 수 있는 자기 기록 헤드가 있어야 한다. 자기 기록 시스템에서 기록 밀도와 함께 중요시 되는 것이 바로 기록 속도이다. 시스템이 발전 할 수록 요구되는 속도 또한 높아지고 있다. 기록 속도가 빨라지려면 기록 주파수가 높아지고 기록 미디어의 회전 속도가 빨라져야 한다. 자기 기록 헤드는 자화되어 있는 고 보자력 기록 미디어 위를 빠른 속도로 직선 운동하고 있는 형태가 되고 이로 인하여 자기 기록 헤드에 와전류가 발생하게 된다. 발생되는 와전류의 형태는 기록 미디어에 자화된 형태에 따라 달라질 것이고 또한 자기 기록 미디어의 회전 속도와 와전류가 발생되는 기록 헤드의 전기전도도에 따라 변화 된다. 본 연구는 이렇게 발생된 와전류를 3차원 유한요소법을 이용하여 분석한 수 이 와전류가 기록 필드에 미치는 영향을 분석하여 제시 하였다.

• Journal of the Korean Magnetics Society
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• v.10 no.6
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• pp.297-301
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• 2000

Coercivity is defined as the magnetic field strength required to reduce the magnetic polarization to zero of magnetic specimen which has been previously magnetized to saturation. This quantity is a reference for classifying soft and hard magnetic materials. We have constructed the measuring system for measurement of coercivity of ferromagnetic materials in open magnetic circuit. The measurement range of the constructed system is from tens A/m to tens kA/m, the combined uncertainty is ${\pm}$0.22 kA/m as coercivity is 14.63 kA/m.

• Proceedings of the KIEE Conference
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• 1997.07a
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• pp.9-11
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• 1997

This paper deals with the characteristic analysis of a brushless permanent magnet d.c. motor. The rotor has ring-type permanent magnet magnetized by a capacitor discharge magnetizer with multi-pole fixture. Torque and current characteristics are analyzed by the time-stepped finite element method. And then the results are compared with experimental values.