• Journal of KIISE:Computer Systems and Theory
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• v.34 no.2
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• pp.49-56
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• 2007

MEMS-based storage is being developed as a new storage media. Due to its attractive features such as high-bandwidth, low-power consumption, high-density, and low cost, MEMS storage is anticipated to be used for a wide range of applications from storage for small handhold devices to high capacity mass storage servers. However, MEMS storage has vastly different physical characteristics compared to a traditional disk. First, MEMS storage has thousands of heads that can be activated simultaneously. Second, the media of MEMS storage is a square structure which is different from the platter structure of disks. This paper presents a new request scheduling algorithm for MEMS storage that makes use of the aforementioned characteristics. This new algorithm considers the parallelism of MEMS storage as well as the seek time of requests on the two dimensional square structure. We then extend this algorithm to consider the aging factor so that starvation resistance is improved. Simulation studies show that the proposed algorithms improve the performance of MEMS storage by up to 39.2% in terms of the average response time and 62.4% in terms of starvation resistance compared to the widely acknowledged SPTF (Shortest Positioning Time First) algorithm.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.82-90
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probe-based Storage Device). However, all of the components(platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficienceis, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having large area platform. for obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design procedure, structural and modal analyses using FEM(Finite Element Method). The areal efficiency of the MEMS stage was designed to be about 25%, which is very large compared with the conventional ones having a few percentage.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.9 s.186
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• pp.179-189
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.373-378
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• 2004

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55％, that is very large compared with conventional ones having a few percentage.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• Transactions of the Society of Information Storage Systems
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• v.8 no.1
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• pp.6-10
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• 2012

The tribological behavior of microsystems needs to be clearly understood in order to improve the reliability of precision components. For example, friction and wear phenomena pose serious problems in MEMS applications. As a first step to investigate the tribological behavior of such systems, an appropriate testing system must be acquired. In this work, a micro-wear tester based MEMS platform was designed. The main concern was to achieve a desirable range of horizontal displacement for the specimen holder and also to apply a normal force in the tens of ${\mu}N$ range. The structural analysis of the micro-wear tester showed that the proposed design satisfied these requirements while maintaining the structural integrity.

• Ingenium
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• v.8 no.2
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• pp.51-57
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• 2001

• Proceedings of the Korean Information Science Society Conference
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• 2005.11a
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• pp.880-882
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• 2005

MEMS 저장 장치는 기존의 디스크 저장 장치와는 다른 물리적 특성을 가지고 있는 차세대 저장 장치이다. 때문에 MEMS 저장 장치의 물리적 특성을 고려하는 디스크 스케줄링과는 다른 관리 기법이 필요하다. 본 연구에서는 MEMS 저장장치의 물리적 특성을 고려한 트랙 기반 스케줄링 방법에 대하여 제안하였다. 트랙 기반 스케줄링 기법은 스케줄링에서의 문제 상태 공간과 스케줄링을 위한 연산 횟수를 줄이고 상대적으로 정착시간에 많은 크기를 갖는 물리적 특성을 고려하여 정착시간의 추가 횟수를 줄임으로서 요청에 대한 빠른 서비스를 가능하게 해주고 요청에 대한 대기 시간을 고려함으로서 동시에 기아상태를 방지한다.

• Journal of Sensor Science and Technology
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• v.30 no.2
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• pp.71-75
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• 2021

Recently, transition-metal-based hydroxide materials have attracted significant attention in various electrochemical applications owing to their low cost, high stability, and versatility in composition and morphology. Among these applications, transition-metal-based hydroxides have exhibited significant potential in supercapacitors owing to their multiple redox states that can considerably enhance the supercapacitance performance. In this study, nanostructured Ni-Mn double hydroxide is directly grown on a conductive substrate using an electrodeposition method. Ni-Mn double hydroxide exhibits excellent electrochemical charge-storage properties in a 1 M KOH electrolyte, such as a specific capacitance of 1364 Fg-1 at a current density of 1 mAcm-2 and a capacitance retention of 94% over 3000 charge-discharge cycles at a current density of 10 mAcm-2. The present work demonstrates a scalable, time-saving, and cost-effective approach for the preparation of Ni-Mn double hydroxide with potential application in high-charge-storage kinetics, which can also be extended for other transition-metal-based double hydroxides.