References
- S. Kamisuki, M. fujii, T. Takekoshi, C. Tezuka, M. Atobe and M. A. Green, 2000, "A high resolution, electrostatically-driven commercial inkjet head", Micro Electro Mechanical System, The Thirteenth Anuual Interantional Conference on, pp. 793-798.
- X. Xiong, Y. Wu and W. B. Jone, 2008, "Material fatigue and reliability of MEMS accelerometers", Defect and Fault Tolerance of VLSI Systems, IEEE International Symposium on, pp. 314-322.
- P.F. Van Kessel, L. J. Hornbeck, R.E. Meier and M.R. Douglass, 1998, "A MEMS-based projection display", IEEE Transactions on Electron Devices, Vol. 86, No.8, pp.1687-1704.
- G. Binning and C. F. Quate, 1986, "Atomic Force Microscope", Physical Review Letters, Vol. 56, No. 9, pp. 930-933. https://doi.org/10.1103/PhysRevLett.56.930
- O. Marti, B. Drake, S. Gould and P. K. Hansma, 1986, "Atomic resolution atomic force microscopy of graphite and the ''native oxide'' on silicon", Journal of Vacuum Science & Technology A : Vacuum, Surfaces, and Films, Vol. 6, No. 2, pp. 287-290.
- K. H. Chung and D. E. Kim, 2005, "Characteristics of fracture during the approach process and wear mechanism of a silicon AFM tip", Ultramicroscopy, Vol. 102, pp. 161-171. https://doi.org/10.1016/j.ultramic.2004.09.009
- H. J. Kim and D. E. Kim, 2009, "Manufacturing-nano-scale friction: a review", International Journal of Precision Engineering, Vol.10, pp.141-151. https://doi.org/10.1007/s12541-009-0039-7
- N. S. Tambe and B. Bhushan, 2004, "Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants", Nanotechnology, Vol.15, pp.1561-1570. https://doi.org/10.1088/0957-4484/15/11/033
- A.V. Desai and M. A. Haque, 2004, "A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM", Tribology Letters, Vol.18, No.1, pp.13-19.
- W. M. van Spengen and J. W. M. Frenken, 2007, "The Leiden MEMS tribometer : real time dynamic friction loop measurements with an on-chip tribometer", Tribology Letters, Vol.28, pp.149-156. https://doi.org/10.1007/s11249-007-9259-0
- H. Yu, G. Zhou, X. Chew, S. K. Sinha and F. S. Chau, 2011, "Nano-tribometer integrated with a nano-photonic displacement sensing mechanism", Journal of Micromechanics and Microengineering, Vol. 21, pp. 1-9.
- S. W. Yoon, 2009, "Vibration isolation and shock protection for MEMS", ProQuest.
- R. Legthenberg, A. W. Groeneveld and M. Elwenspoek, 1996, "Comb-drive actuators for large displacement", J. Micromech. Micoeng. Vol. 6, pp. 320-329. https://doi.org/10.1088/0960-1317/6/3/004
- J. Y. Wong, 1993, "Theory of ground vehicles, 2 edtion.", John Wiley & Sons.