Design of an electrostatic 2-axis MEMS stage with large area platform

대면적 플랫폼을 갖는 정전형 2 축 MEMS 스테이지의 설계

  • 정일진 (울산대대학원 기계자동차공학과) ;
  • 전종업 (울산대학교 기계자동차공학부) ;
  • 백경록 (울산대학교 기계자동차공학부) ;
  • 박규열 (울산대학교 기계자동차공학부)
  • Published : 2004.10.01

Abstract

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55%, that is very large compared with conventional ones having a few percentage.

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