• 제어로봇시스템학회:학술대회논문집
• /
• 2002.10a
• /
• pp.39.1-39
• /
• 2002

We present nanoactuators and nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Major technical difficulties in the high-precision MEMS are arising from the fabrication uncertainty and electrical noise problems. In this paper, we present high-precision actuators and detectors, overcoming the technical limitations placed by the conventional MEMS technology. For the nano-precision actuation, we present a nonlinearly modulated digital actuator (NMDA). NMDA composed of a digital microactuator and a nonlinear micromechanical modulator. The nonlinear micromechanical modulator is intended to purify the actuation errors in the stroke of the digital a...

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.9 s.186
• /
• pp.179-189
• /
• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.7 no.3
• /
• pp.183-195
• /
• 2007

MEMS technology is proven to be an enabling technology to realize many components for optical networking applications. Due to its widespread applications, VOA has been one of the most attractive MEMS based key devices in optical communication market. Micromachined shutters and refractive mirrors on top of silicon substrate or on the device layer of SOI (Silicon-on-insulator) substrate are the approaches trapped tremendous research activities, because such approaches enable easier alignment and assembly works. These groups of devices are known as the planar VOAs, or two-dimensional (2-D) VOAs. In this review article, we conduct the comprehensively literature survey with respect to MEMS based planar VOA devices. Apparently MEMS VOA technology is still evolving into a mature technology. MEMS VOA technology is not only the cornerstone to support the future optical communication technology, but the best example for understanding the evolution of optical MEMS technology.

• Proceedings of the IEEK Conference
• /
• 1999.11a
• /
• pp.905-908
• /
• 1999

In this paper, we present a polysilicon actuator on silicon wafer using surface micromachining technology which employs an electrostatic stepwise driven Scratch Drive Actuator to generate a force that can move an external object. For optical applications, we propose wavelength selector using distributed feedback structures and this micro actuator.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.31 no.6 s.261
• /
• pp.644-650
• /
• 2007

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems(MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of thin film used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed a tensile testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, it is described that new techniques and procedures can be adopted for high cycle fatigue test of a thin film.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2013.04a
• /
• pp.454-459
• /
• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• 제어로봇시스템학회:학술대회논문집
• /
• 2001.10a
• /
• pp.103.6-103
• /
• 2001

Glaucoma is an eye disease which is caused by abnormal high IOP (Intra Ocular Pressure) in the eye. High IOP is caused by the aqueous humor which is produced consistently but not drained due to the malfunction of the trabecular system which has a role of draining the aqueous humor into the venous system. Currently, there are some methods to treat glaucoma, Among these, the use of implants is increasing in these days due to many problems in other methods. However, conventional implants are passive implants and have critical disadvantage. Therefore, it is needed to develop a new implant using MEMS structure which is capable of controlling the IOP actively and copes with personal difference of patients. An active glaucoma implant consists of the valve actuator, pressure sensor, controller, and power supply. In this paper the valve actuator is considered. We make experiments and simulations with the fabricated ...

• Proceedings of the KSME Conference
• /
• 2003.04a
• /
• pp.911-916
• /
• 2003

Microactuator is frequently used in some optical or electrical applications such as light modulators and spatial scanner devices. When microactuator is implemented, it should be operated at accurate positions proportional to input voltage. Therefore in order to obtain rapid responses and reduced errors, a position control technique is used. In the paper, design procedure for the mems actuator and a typical PID controller is adapted to improve performance of microactuator as well. Also electrostatic force for the torsional microactuator is calculated via well-known Hornbeck's method.

• Transactions of the Society of Information Storage Systems
• /
• v.10 no.1
• /
• pp.23-26
• /
• 2014

In this paper, we present a novel approach for tuning the resonant frequency of torsionally driven vertical comb actuators. The tuning unit composed of thermal actuator, scissor mechanism and V-shape shaft enables continuous and reversible resonant frequency tuning. The proposed method is based on the stiffness alteration of the V-shape shaft. It is experimentally verified that the resonant frequency of the torsional microscanner is shifted up to 1.59 kHz from 1.51 kHz showing the maximum tuning ratio of 5.29%.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.756-759
• /
• 2004

We present a piezoelectric actuator using stiffness control and stroke amplification mechanism in order to make large lateral displacement. In this work, we suggest stiffness control approach that generates lateral displacement by increasing the vertical stiffness and reducing the lateral stiffness using additional structure. In addition, an additional structure of a serpentine spring amplifies the lateral displacement like leverage structure. The suggested lateral PZT actuator (bellows actuator) consists of serpentine spring and PZT/electrode layer which is located at the edge of the serpentine spring. The edge of the serpentine spring prevents the vertical motion of PZT layer, while the other edge of the serpentine spring makes stroke amplification like leverage structure. We have determined dimensions of the bellows actuator using ANSYS simulation. Length, width and thickness of PZT layer are 135$\mu$m, 20$\mu$m and 0.4$\mu$m, respectively. Dimensions of the silicon serpentine spring are thickness of 25$\mu$m, length of 300$\mu$m, and width of 5$\mu$m. The bellows actuator has been fabricated by SOI wafer with 25$\mu$m-top silicon and 1$\mu$m-buried oxide layer. The bellows actuator shows the maximum 3.93$\pm$0.2$\mu$m lateral displacement at 16V with 1Hz sinusoidal voltage input. In the frequency response test, the fabricated bellows actuator showed consistent displacement from 1Hz to 1kHz at 10V. From experimental study, we found the bellows actuator using thin film PZT and silicon serpentine spring generated mainly laterally displacement not vertical displacement at 16V, and serpentine spring played role of stroke amplification.