• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• 한국정보통신설비학회:학술대회논문집
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• 2004.08a
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• pp.226-229
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• 2004

본 논문은 초고주파 영역에서 개방 단말 동축선을 대신해서 복소 유전율을 측정할 수 있는 MEMS 프로브와 그 응용예로 MEMS 프로브 어레이를 제안한다. MEMS 프로브는 기존의 동축선 프로브와 달리 커넥터와의 연결이 간단하여 일회용으로 프로브를 사용할 수 있다는 점에서 의료용으로 사용할 수 있는 가능성이 있다. 샘플의 유전율 분포를 구하기 위해서 기존의 센서는 반복 접촉을 요구하고 이로 인한 번거로움과 측정 오차를 줄일 목적으로 MEMS 프로브 어레이를 개발 하였다. MEMS 프로브 어레이는 RF 스위치를 사용하여 다수의 측정 포인트를 한번의 센서 접촉으로 측정할 수 있는 새로운 개념의 프로브이다. 1GHz부터 40GHz까지의 광대역에서 0.9% 식염수의 유전율을 측정하여 MEMS 프로브의 성능을 검증하였다.

• Journal of Sensor Science and Technology
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• v.20 no.1
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• pp.58-63
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• 2011

A low loss radio frequency(RF) micro electro mechanical systems(MEMS) switch driven by a low actuation voltage was designed for the development of a new RF MEMS switch. The RF MEMS switch should be encapsulated. The glass cap and fabricated RF MEMS switch were assembled by the Au/Sn eutectic bonding principle for wafer-level packaging. The through-vias on the glass substrate was made by the glass dry etching and Au electroplating process. The packaged RF MEMS switch had an actuation voltage of 12.5 V, an insertion loss below 0.25 dB, a return loss above 16.6 dB, and an isolation value above 41.4 dB at 6 GHz.

• The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
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• v.16 no.4 s.56
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• pp.76-83
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• 2005

다양한 무선서비스를 기반으로 한 광대역 통합망(BcN: Broadband convergence Network) 네트워크 사회로의 진화와 더불어 승가하고 있는 Cognitive Ra-dio 기술에 요구는 모바일 컨버전스(융합) 단말기 (Mobile Convergence Terminal) 개발을 필수적으로 요구하고 있고, 이를 위한 핵심 기술은 Tunable RE 회로 설계 기술이다. 이를 위해서는 고성능, 저가격의 Tunable 소자들의 개발이 급선무이다. 반도체 Varactor와 MEMS 스위치를 이용하는 기술이 보편화내지는 준성숙 단계로 접어들고 있는 상황이지만 강유전체(Ferroelectric)에는 기존 반도체 Varactor와 MEMS 스위치로 얻을 수 없는 특성들을 얻을 수 있다고 알려지면서 이에 대한 관심과 연구가 증대되고 있다. 본 논문에서는 강유전체의 개요와 특성, 연구 경향, Tunable 소자 및 회로, 더 나아가 시스템 응용에 대하여 살펴보고, 앞으로 해결해야 할 문제점들에 대하여 언급하고자 한다.

• Korean Journal of Optics and Photonics
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• v.13 no.4
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• pp.289-294
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• 2002

We propose optical true time-delays (TTDs) for phased-array antennas (PAAs) composed of 2${\times}$2 MEMS switches and fiber delay lines, and implement a TTD which shows a maximum scan angle of $120^{o}$ with $30^{o}$ resolution. Since this structure uses only one fixed wavelength laser diode, it provides several advantages such as easy control, high speed operation, and low cost compared with those of the optical TTDs using tunable laser sources. We design a four element linear PAA using the proposed TTDs at 10 ㎓. Simulation results show that the maximum gain is 11.6 dB at the radiation angle $0^{o}$, 11.2 dB at $\pm$$30^{o}$, and 10.6 dB at $\pm$$60^{o}$.

• Korean Journal of Optics and Photonics
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• v.14 no.4
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• pp.466-472
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• 2003

In this paper, we proposed an optical true time-delay (TTD) feeder system for phased array antennas (PAAs). The system possesses high-speed beam scan capability since, in this scheme, different lengths of fiber delay-lines are selected by optical 2${\times}$2 MEMS switches at high speed. An optical TTD capable of beam scanning in one of eight different directions has been built for 10 GHz linear PAA systems. Experimental results on time delay measurements show that the maximum time delay error is less than 0.2 ps corresponding to a scan angle error of less than 0.84o. We have also designed a 10 GHz linear PAA composed of eight micro-strip patch antenna elements driven by the proposed TTD, and the radiation patterns of this PAA have been analyzed by simulation.

• Journal of Satellite, Information and Communications
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• v.6 no.1
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• pp.28-31
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• 2011

In this paper, a new set of structural and sacrificial material that is diamond like carbon (DLC)/photoresist for high performance piezoelectric RF-MEMS switches which are actuated in d33 mode is suggested. To avoid curing problem of photoresist sacrificial layer, DLC structure layer is deposited at room temperature by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. And lead zirconate titanate (PZT) piezoelectric layer is deposited on structure layer directly at room temperature by rf magnetron sputtering system and crystallized by rapid thermal annealing (RTA) equipment. Particular attention is paid to the annealing of PZT film in order to crystallize into perovskite and the variation of mechanical properties of DLC layer as a function of annealing temperature. The DLC layer shows good performance for structure layer in aspect to Young's modulus and hardness. The fabrication becomes much simpler and cheaper with use of a photoresist.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.38 no.3
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• pp.294-299
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• 2010

ELT(Emergency Locator Transmitter) is used to send distress signal in the event of an aircraft crash. It is very useful but the ELT may transmit wrong signal caused by misjudging between crash and hard-landing. The reason of this problem is the low accuracy of the mechanical G-switch currently in use. To improve the ELT, we developed an ELT system using the MEMS(Micro Electro-Mechanical Sensor) accelerometer. The ELT system consists of acceleration data acquisition/analysis system, program of crash recognition, and GPS receiving system for the position information of an aircraft crash site. A free-drop table was developed for verification of the ELT system. The free-drop table was designed to replicate the acceleration and the pulse duration of the hard landing and the crash. By using the free-drop table, we showed that the ELT system performed well.

• Journal of the Institute of Electronics and Information Engineers
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• v.54 no.6
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• pp.25-29
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• 2017

This paper presents a hetero-integration of electrostatically actuated RF MEMS Switch and step up DC-DC converter on a redistribution layer using commercial PCB process. RF characteristics of Duroid with $56{\Omega}$ impedance GCPW transmission line and that of FR4 with $59{\Omega}$ impedance CPW transmission line were analyzed. From DC to 6GHz, RF characteristics of Duroid were better than that of FR4, insertion loss was 2.08dB lower, return loss was 3.91dB higher, and isolation was 3.33dB higher.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.953-956
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• 2005

Low voltage actuation and high isolation characteristics are key features to be solved in electrostatic RF switch design. Since these parameters in the conventional parallel plate MEMS switch design are in trade-off relation, both requirements cannot be met simultaneously. In vertical comb design, however, the actuation voltage is independent to the vertical separation distance between the contact electrodes. Then, we can design the large separation distance between contact electrodes to get high isolation. We have designed an RF MEMS switch which has -40dB isolation at 5 GHz and 6 V operation voltages. The characteristics of the fabricated switch are being evaluate.