• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.46-47
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• 2005

이번 연구는 $BCl_3/CF_4$ 플라즈마를 사용하여 반도체소자 제조 시 널리 이용되는 GaAs 계열반도체 중 대표적인 재료인 GaAs/AlGaAs 및 GaAs/InGaP 구조를 선택적으로 건식 식각한 후 분석한 것이다. 공정변수로는 ICP 소스파워를 0-500W, RIE 파워를 0-50W 그리고 $BCl_3/CF_4$ 가스 혼합비를 중점적으로 변화시켰다. $BCl_3$ 플라즈마만을 사용한 경우 (20$BCl_3$, 20W RIE power, 300W ICP source power, 7.5mTorr) 는 GaAs:AlGaAs의 선택비가 0.5:1 이었으며 이때 GaAs의 식각률은 ~2200${\AA}/min$ 이었으며 AlGaAs의 식각률은 ~4500${\AA}/min$ 이었다. 식각 후 표면의 RMS roughness은 < 2nm로 깨끗한 결과를 보여주었다. 15% $CF_4$ 가스가 혼합된 $17BCl_3/3CF_4$, 20W RIE power, 300W ICP source power, 7.5mTorr의 조건에서 3분 동안 공정한 결과 순수한 $BCl_3$ 플라즈마만을 사용한 경우보다 표면은 다소 거칠었지만 (RMS roughness: ~8.4) GaAs의 식각률 (~980nm/min)과 AlGaAs와 InGaP에 대한 GaAs의 선택도 (GaAs:AlGaAs=16:1, GaAs:InGaP=38:1)는 크게 증가하였다. 그리고 AlGaAs 및 InGaP의 경우 식각 시 나타난 휘발성이 낮은 식각 부산물 ($AlF_3:1300^{\circ}C$, $InF_3:1200^{\circ}C$)로 인하여 50nm/min 이하의 낮은 식각률을 보였고, 62.5%의 $CF_4$가 혼합된 $7.5BCl_3/12.5CF_4$플라즈마의 조건에서는 AlGaAs 및 InGaP에 대한 GaAs의 선택도가 각각 280:1, 250:1을 나타내었다.

• Economic and Environmental Geology
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• v.45 no.6
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• pp.599-622
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• 2012

The phase I soil geochemical exploration was carried out targeting around Chau Binh area far from about 14 km with southeastern direction from Quy Chau within Nghe An province. The interval of sampling are horizontal 300 m with 14 line and longitudinal 500 m with 15 line, resulting in 194 soil samples. Based on the result of the phase I soil geochemical exploration, the phase II detailed pitting survey was carried out targeting the grid point with high TREO content, resulting in 56 soil samples within 7 pits. The geology of survey area are consisted of Ban Chieng biotite granite complex and Dai Loc gneissic granite complex intruding Bu Khang formation comprising of schist, gneiss and limestone. Main mineralization in the study area have the characteristics of occurrence with tin, ruby and REE-bearing monazite(about 300 g/t) and xenotime(about 10 g/t) to be thought as occurring at the alteration zone of granite complex. In order to elucidate the source rock of monazite and xenotime confirmed from heavy sand, soil geochemical exploration was carried out. As a analysis result with ICP-MS on the soil samples from the phase I soil geochemical exploration, total REE oxide content of background amount to about 2 times of crustal abundance, enriching the heavy rare earth(about 2 times) and light rare earth(about 1.84 times). As a analysis result with ICP-MS on the soil samples from the phase II soil detailed pit survey, we identified outcrop considering as economic ore body at the grid point 4-7 pit with N40W attitude. As a synthetic consideration on the phase I soil geochemical exploration and phase II detailed pit survey, we tentatively designated areas considering as the extension of economic ore body with REE anomaly. In the near future, we have the plan to carry out the geophysical exploration and test drilling targeting the interval anticipated to the economic ore body.

• Economic and Environmental Geology
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• v.47 no.2
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• pp.147-168
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• 2014

The soil geochemical exploration was carried out targeting around Tri Le area far from about 30 km with northwestern direction from Que Phong within Nghe An province. The interval of sampling are horizontal 200 m interval with 23 line and longitudinal 300 m with 10 line, resulting in 228 soil samples. Based on the result of the soil geochemical exploration, the detailed pitting survey was carried out targeting the grid point with high TREO content, resulting in 75 soil samples within 7 pits. The geology of survey area are consisted of Ban Chieng biotite granite complex and granitic gneiss intruding Ban Khang formation comprising of quartz schist and marble. Main mineralization in the study area have the characteristics of occurrence with tin, ruby and REE-bearing monazite and xenotime to be thought as occurring at the alteration zone of granite complex. In order to elucidate the source rock of monazite and xenotime confirmed from heavy sand, soil geochemical exploration was carried out. As a analysis result with ICP-MS on the soil samples from the soil geochemical exploration, total REE oxide content of background amount to about 2 times of crustal abundance, enriching the heavy rare earth(about 2 times) and light rare earth(about 1.5 times). As a analysis result with ICP-MS on the soil samples from the soil detailed pit survey, we only identified outcrop considering as economic weathered granite body at the grid point 1-10 pit among 7 pits. As a synthetic consideration on the soil geochemical exploration and detailed pit survey, we tentatively designated Tri Le area as no promising target for REE. In 2014, we have the plan to carry out the soil geochemical exploration targeting the extended economic REE ore body in Quy Chau as project area from 2011 to 2012.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.4
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• pp.483-490
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• 2009

In this paper, a novel low-damage silicon nitride passivation for 100nm InAlAs/InGaAs MHEMTs has been developed using remote ICPCVD. The silicon nitride deposited by ICPCVD showed higher quality, higher density, and lower hydrogen concentration than those of silicon nitride deposited by PECVD. In particular, we successfully minimized the plasma damage by separating the silicon nitride deposition region remotely from ICP generation region, typically with distance of 34cm. The silicon nitride passivation with remote ICPCVD has been successfully demonstrated on GaAs MHEMTs with minimized damage. The passivated devices showed considerable improvement in DC characteristics and also exhibited excellent RF characteristics($f_T$of 200GHz).The devices with remote ICPCVD passivation of 50nm silicon nitride exhibited 22% improvement(535mS/mm to 654mS/mm) of a maximum extrinsic transconductance($g_{m.max}$) and 20% improvement(551mA/mm to 662mA/mm) of a maximum saturation drain current ($I_{DS.max}$) compared to those of unpassivated ones, respectively. The results achieved in this work demonstrate that remote ICPCVD is a suitable candidate for the next-generation MHEMT passivation technique.

• Journal of the Korean Chemical Society
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• v.53 no.1
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• pp.27-33
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• 2009

A sensitive technique for the determination of trace Cd(II) in various real samples after preconcentration onto microcrystalline p-dichlorobenzene loaded with 2-mercaptobenzothiazole was developed. Several experimental conditions such as the pH of the sample solution, the amount of chelating agent 2-mercaptobenzothiazole, the amount of adsorbent p-dichlorobenzene-2-MBT, and the flow rate of sample solution were optimized. The interfering effects of various concomitant ions were investigated. Cu(II) interfered with more seriously than any other ions. However, the interference by Cu(II) could be overcome sufficiently by adjusting tartrate ion concentration to be 0.01M or by controlling the amount of 2-mercaptobenzothiazole contained in 0.20 g p-dichlorobenzene to be 0.12 g. The dynamic range, the correlation coefficient ($R^2$) and the detection limit obtained by this proposed technique were $0.5{\sim}30$ ng $mL^{-1}$, 0.9962, and 0.39 ng $mL^{-1}$, respectively. Thus, good results were obtained by the use of p-dichlorobenze as adsorbent matrix. For validating this proposed technique, the aqueous samples(wastewater, stream water, and reservoir water) and the plastic sample were used. Recovery yields of $93{\sim}104$ % were obtained. By F test, these measured data were not different from ICP-MS data at 95 % confidence level. Based on the results from the experiment, it was found that this proposed technique could be applied to the preconcentration and determination of Cd(II) in various real samples.

• Journal of the Korean Wood Science and Technology
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• v.41 no.4
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• pp.276-286
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• 2013

The goal of this study was to investigate change of thermal decomposition feature of miscanthus (Miscanthus sacchariflorus) after removal of inorganic constituents using distilled water (D.I-w; 30, 60 and $90^{\circ}C$). The carbon content was increased whereas the oxygen content was decreased with the temperature of D.I-w treatment. Moreover, ash content was slightly decreased from 4.6% of control to 3.2% of $90^{\circ}C$ D.I-w treated sample. Results of total monomeric sugar contents and X-ray diffraction (XRD) analysis showed that structural changes of cellulose/hemicellulose regions did not occurr during D.I-w treatment. Results of inductively coupled plasma emission spectrometer (ICP-ES) showed that miscanthus has the largest amount of inorganic constituents such as potassium (5,644 ppm), phosphorus (3,995 ppm), magnesium (1,403 ppm) and calcium (711 ppm). Thermogravimetric analysis (TGA) confirmed that the yield of char slightly decreased whereas the yield of volatiles increased with increasing D.I-w treatment temperature. In addition, differential thermogravimetric analysis (DTGA) indicated that the maximum decomposition rate ($V_M$) and temperature ($T_M$) corresponding to VM were varied from $0.82%/^{\circ}C$, $360.60^{\circ}C$ of control to $1.17%/^{\circ}C$, $362.62^{\circ}C$ of $90^{\circ}C$-D.I-w treated sample.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.7
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• pp.3252-3260
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• 2012

2,2'-Bipyridinium chlorochromate[$C_{10}H_8N_2HCrO_3Cl$] was synthesized by the reaction of 2,2'- bipyridine with chromium(VI) trioxide in 6M HCl. The structure was characterized by IR and ICP analysis. The oxidation of benzyl alcohol using 2,2'-bipyridinium chlorochromate in various solvents showed that the reactivity increased with the increase in the order of the dielectric constant(${\varepsilon}$), in the order: cyclohexene< chloroform$p-CH_3$, H, m-Br, $m-NO_2$) in N,N'-dimethylformamide. Electron-donating substituents accelerated the reaction, whereas electron acceptor groups retarded the reaction. The Hammett reaction constant(${\rho}$) was -0.64(303K). The oxidation reactivity of alcohols can be a useful factor to study about physical properties such as thermal stability, when the polysilsesquioxane solution is ready for an applying coating agent. The observed experimental data was used to rationalized the hydride ion transfer in the rate-determining step.

• Analytical Science and Technology
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• v.20 no.2
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• pp.147-154
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• 2007

Sweat contents were investigated for using those data to forensic purpose. The experiments of identifying sweat contents were as follow: 1) measurement of amino acids (aspartic acid, serine, glycine etc) by HPLC, 2) anions ($Cl^-$, $F^-$, and $SO{_4}^{2-}$) by IC and 3) trace elements (Cu, Zn, Li, B, etc.) by ICP-MS. Amino acid contents in sweat are varied with individual samples and glycine, threonine, alanine, valine and histidine are detected as the prime one. The detected anions are $Cl^-$(2167~4073 ppm) and $F^-$(454~582 ppm) mostly. Trace elements of Rb, Zn and Cu are detected and those concentrations are relatively very high. The compositions of sweat can be influenced by various factors (diet, anthropometric, characteristics, physical fitness, age, gender and the state of the health).

• Journal of Korean Society of Environmental Engineers
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• v.27 no.6
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• pp.590-598
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• 2005

An adequate method to identify chromium separation, Cr(III) and Cr(VI), in water samples were studied by using High Performance Liquid Chromatography(HPLC) coupled with Inductively Coupled Plasma Mass Spectometer(ICP-MS) equipped with Dynamic Reaction Cell(DRC). The characteristic distribution of Cr(III) and Cr(VI) in the raw water taken at the six water intake stations in Seoul, was analyzed by the method developed by the authors. The chromium species separated by HPLC was isocratically conducted by using tetrabutylammonium phosphate monobasic(1.0 mM TBAP), ethylenediaminetetraacetic acid(0.6 mM EDTA) and 2% v/v methanol as the mobile phase. 5% v/v methanol was used as flushing solvent. A reactive ammonia($NH_3$) gas was used to eliminate the potential interference of $ArC^+$. Several Parameters such as solvent ratio, pH, flow rate and sample injection volume were optimized for the successful separation and reproducibility. Although it has been reported thai the separation sensitivity of Cr(III) is superior to that of Cr(VI), the authors observed Cr(VI) was more sensitive than Cr(III) when ammonia($NH_3$) gas was used as the reaction gas. It took less than 3 minutes to analyze chromium species with this method and the estimated detection limits were $0.061\;{\mu}g/L$ for Cr(III) and $0.052\;{\mu}g/L$, for Cr(VI). According to the results from the analysis on chromium species in the raw water of the six intake stations, the concentrations of Cr(III) ranged from 0.048 to $0.064\;{\mu}g/L$(ave. $0.054\;{\mu}g/L$) while that of Cr(VI) ranged from 0.014 to $0.023\;{\mu}g/L$(ave. $0.019\;{\mu}g/L$). Recovery ratio was very high($90.1{\sim}94.1%$). There were two or three times more Cr(III) than Cr(VI) in the raw water.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.5
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• pp.220-225
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• 2004

Four different Fluorine-based gases ($SF_6/,NF_3, PF_5,\; and \; BF_3$) were examined for high rate Inductively Coupled Plasma etching of Si. Etch rates up to ~8$\mu\textrm{m}$/min were achieved with pure $SF_6$ discharges at high source power (1500 W) and pressure (35 mTorr). A direct comparison of the four feedstock gases under the same plasma conditions showed the Si etch rate to increase in the order $BF_3$ < $NF_3$< $PF_5$ < $SF_6$. This is in good correlation with the average bond energies of the gases, except for $NF_3$, which is the least strongly bound. Optical emission spectroscopy showed that the ICP source efficiently dissociated $NF_3$, but the etched Si surface morphologies were significantly worse with this gas than with the other 3 gases.