• Analytical Science and Technology
• /
• v.7 no.4
• /
• pp.493-504
• /
• 1994

The morphology and structure of precipitates of formed in Nb steels were investigated using SEM, TEM and XRD. The quantitative analysis of the precipitates was performed by ICP-AES. The potentiostatic etching method was employed as an extraction method using 10% AA-methanol and 15% Na-citrate electrolytes. The two selected potentials relative to SCE(Standard Calomel Electrode), -100mV in 10% AA-methanol solution and -250mV in 15% Na-citrate solution were found to be effective for the extraction. XRD analysis showed that composition of Nb carbonitride in Nb-steel(0.01% C-0.7% Nb-0.004N) was $NbC_{0.65}N_{0.2}$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.04b
• /
• pp.1-5
• /
• 2000

As the semiconductor devices are miniaturized, the number of the unit cleaning processes increases. In order to processes by conventional RCA cleaning process, the consumption of volume of liquid chemical and DI water became huge. Therefore, the problem of environmental issues are evolved by the increased consumption of chemicals. To resolve this matter, an advanced cleaning process by Electrolyzed Water was studied in this work. The electrolyzed water was made by an electrolysis equipment which was composed of three chambers of anode, cathode, and middle chambers. In the case of electrolyzed water with electrolytes in the middle chamber, oxidatively acidic water of anode and reductively alkaline water of cathode were obtained. The oxidation/reduction potentials and pH of anode water and cathode water were measured to be +l000mV and 4.8, and -530mV and 6.3, respectively. The Si-wafers contaminated with metallic impurities were cleaning with the electrolyzed water. To analysis the amounts of metallic impurities on Si-water surfaces, ICP-MS(Inductively Coupled Plasma-Mass spectrometer) was introduced. From results of ICP-MS measurements, it was concluded that the ability of electrolyzed water was equivalent to that of the conventional RCA cleaning.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
• /
• 2000.11a
• /
• pp.25.1-28
• /
• 2000

In this study, $Y_2O_3$ thin films were etched with inductively coupled plasma (ICP). The etch rate of $Y_2O_3$ , and the selectivity of $Y_2O_3$ to YMnO$_3$were investigated by varying $Cl_2$/($Cl_2$+Ar) gas mixing ratio. The maximum etch rate of $Y_2O_3$ , and the selectivity of $Y_2O_3$ to YMnO$_3$ were 302/min, and 2.4 at $Cl_2$/($Cl_2$+Ar) gas mixing ratio of 0.2 repetitively. In x-ray photoelectron spectroscopy (XPS) analysis, $Y_2O_3$ thin film was dominantly etched by Ar ion bombardment, and was assisted by chemical reaction of Cl radical. These results were confirmed by secondary ion mass spectroscopy(SIMS) analysis. YCl, and $YC_3$ existed at 126.03 a.m.u, and 192.3 a.m.u, respectively.

• Analytical Science and Technology
• /
• v.10 no.5
• /
• pp.357-361
• /
• 1997

A Griemm type Glow Discharge cell is attached to a commercial quadrapole based ICP-MS and used for the analysis of surface analysis. By employing 2.0mm diameter, mode and proper experimental conditions, several layers of few ${\mu}m$ thickness are analysed within 30 minutes. Multi-layers of Cu-Ni, Fe-Ni are analyzed with the resolution of 10nm by GDMS. Proper experimental conditions make a flat bottom crater shape and good resolution for multi-layer depth profile study.

• Corrosion Science and Technology
• /
• v.6 no.6
• /
• pp.286-290
• /
• 2007

Biocompatible Hydroxy apatite (HAp) coatings on metallic substrate by plasma spray techniques have been developed. Long-term credibility of plasma spray HAp coatings has been evaluated in physiological saline by electrochemical measurements. It was found that the corrosion resisitance of SUS316L based HAp/Ti conbined coatings was excellent even after more than 10 weeks long-term immersion. It was shown that postal heat treatment improved both the crystallinity and corrosion resistance of HAp. By lowering cooling rate during heat treatment process, less cracks produced in HAp coating layer, which lead to higher credibility of HAp during immersion in physiological saline. The ICP results showed that the dissolution level of substrate metallic ions was low and HAp coatings produced in this research can be acceptable as biocompatible materials. Also, the concentration of dissolved ions from HAp coatings with postal heat treatment was lower compared to those from samples without postal heat treatment. The adherence of HAp coatings with Ti substrate and other mechanical properties were also assessed by three-point bending test. The poor adhesion of HAp coating to titanium substrate can be improved by introducing a plasma spray titanium intermediate layer.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.14 no.2
• /
• pp.73-77
• /
• 2004

The color enhancement for natural Zambian amethyst of low quality was carried out by the hydrothermal treatment method. The hydrothermal treatment conditions were as follows: reaction temperature; $300^{\circ}C$, duration; 30 hrs, filling; 40%, solvent; 6 M-HCI solution. The reddish purple amethyst of high quality was obtained under these conditions. From the result of ICP/AES, it was known that color enhancement was affected by a Fe elemental content to exist in the inside of natural Zambian amethyst. Also, from the result of UY-VIS-NIR, it was shown that the absorption peak at 550 nm after hydrothermal treatment is slightly lower than those of non-treated natural Zambian amethyst. In this study, it was known that hydrothermal treatment method was a way to suitable for increase of commercial value of natural Zambian amethyst.

• Journal of the Korean institute of surface engineering
• /
• v.41 no.4
• /
• pp.134-141
• /
• 2008

We have developed a numerical model for a remote ICP(inductively coupled plasma) system in 2D and 3D with gas distribution configurations and confirmed it by plasma diagnostics. The ICP source has a Cu tube antenna wound along a quartz tube driven by a variable frequency rf power source($1.9{\sim}3.2$ MHz) for fast tuning without resort to motor driven variable capacitors. We investigated what conditions should be met to make the plasma remotely localized within the quartz tube region without charged particles' diffusing down to a substrate which is 300 mm below the source, using the numerical model. OES(optical emission spectroscopy), Langmuir probe measurements, and thermocouple measurement were used to verify it. To maintain ion current density at the substrate less than 0.1 $mA/cm^2$, two requirements were found to be necessary; higher gas pressure than 100 mTorr and smaller rf power than 1 kW for Ar.

• Journal of Korean Society for Atmospheric Environment
• /
• v.11 no.4
• /
• pp.331-337
• /
• 1995

This study was carried out to investigate the chemical composition of dustfall at Cheju(mean sea level; 71.7m, 33$^{\circ}$17'N, 126$^{\circ}$10'E) and Ullung island(mean sea level; 22.1m, 38$^{\circ}$29'N, 130$^{\circ}$54'E) from October 1993 to september 1994. The dustfall matter samples were collected by deposit gauges. The ionic components of each samples was analyzed by Ion Chromatograpy (Dionex 4000i), While heavy metals by Inductively Coupled Plasma Atomic Emission Spectrometry(ICP/AES; Shimadzu ICP-4). The results for seasonal variation of dustfall matter matter total amount, water-soluble ionic components and water-soluble ionic components total deposition amount to two sites were compared each other. The seasonal variations of dustfall amount at Ullung and Cheju island were found in order of Spring>Winter>Fall>Summer, and the maximum of dustfall amount were during the Yellow Sand period. Also, Total amount of water-soluble components except for $F^{[-10]}$ were high in Cheju more than Ullung island.more than Ullung island.

• Bulletin of the Korean Chemical Society
• /
• v.25 no.8
• /
• pp.1156-1160
• /
• 2004

The technique of an on-line preconcentration by the direct sulfide precipitation has been developed. Sn was homogeneously precipitated by sulfide, which was generated in situ from the hydrolysis of thioaceteamide. Precipitate was collected on a filter in the line and dissolved out instantaneously by KOH to be sent to an ICP. The enrichment factor was 4 with the sampling speed of 15/hr for 1.0 mL of sample. It was increased to more than 40 times when the sampling volume was increased to 10 mL with the sampling speed of 5/hr. $Sn^{2+}/Sn^{4+}$ could be separately determined with the on-line precipitation technique. The method was applied to the analysis of NIST SRM 1566 Oyster sample and yielded good agreement with the certified value.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.11a
• /
• pp.25-28
• /
• 2000

In this study, $Y_2$O$_3$ thin films were etched with inductively coupled plasma (ICP). The etch rate of $Y_2$O$_3$, and the selectivity of $Y_2$O$_3$ to YMnO$_3$ were investigated by varying Cl$_2$/(Cl$_2$+Ar) gas mixing ratio. The maximum etch rate of $Y_2$O$_3$, and the selectivity Of $Y_2$O$_3$ to YMnO$_3$ were 302/min, and 2.4 at Cl$_2$/(Cl$_2$+Ar) gas mixing ratio of 0.2 repectively. In x-ray photoelectron spectroscopy (XPS) analysis, $Y_2$O$_3$ thin film was dominantly etched by Ar ion bombardment, and was assisted by chemical reaction of Cl radical. These results were confirmed by secondary ion mass spectroscopy(SIMS) analysis. YCI, and YCl$_3$ existed at 126.03 a.m.u, and 192.3 a.m.u, respectively