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검색결과 670건 처리시간 0.03초

Selective fabrication and etching of vertically aligned Si nanowires for MEMS

  • Kar, Jyoti Prakash;Moon, Kyeong-Ju;Das, Sachindra Nath;Kim, Sung-Yeon;Xiong, Junjie;Choi, Ji-Hyuk;Lee, Tae-Il;Myoung, Jae-Min
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.27.2-27.2
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    • 2010
  • In recent years, there is a strong requirement of low cost, stable microelectro mechanical systems (MEMS) for resonators, microswitches and sensors. Most of these devices consist of freely suspended microcantilevers, which are usually made by the etching of some sacrificial materials. Herein, we have attempted to use Si nanowires, inherited from the parent Si wafer, as a sacrificial material due to its porosity, low cost and ease of fabrication. Prior to the fabrication of the Si nanowires silver nanoparticles were continuously formed on the surface of Si wafer. Vertically aligned Si nanowires were fabricated from the parent Si wafers by aqueous chemical route at $50^{\circ}C$. Afterwards, the morphological and structural characteristics of the Si nanowires were investigated. The morphology of nanowires was strongly modulated by the resistivity of the parent wafer. The 3-step etching of nanowires in diluted KOH solution was carried out at room temperature in order to control the fast etching. A layer of $Si_3N_4$ (300 nm) was used for the selective fabrication of nanowires. Finally, a freely suspended bridge of zinc oxide (ZnO) was fabricated after the removal of nanowires from the parent wafer. At present, we believe that this technique may provide a platform for the inexpensive fabrication of futuristic MEMS.

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휴대용 용존산소 측정 시스템의 설계 및 제작 (Design and Fabrication of Portable Dissolved Oxygen Measurement System)

  • 장중원;이성필
    • 융합신호처리학회논문지
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    • 제9권3호
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    • pp.219-223
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    • 2008
  • 스크린 프린트법으로 저가형 후막 용존산소 센서를 제작하고, 휴대용 용존산소 측정 시스템을 구현하였다. 전류 특성은 인가전압(바이어스 전압)을 0.7 V로 하였을 때, 응답시간도 짧고 전류 값의 변화도 가장 크다는 것을 알 수 있었다. 시스템의 구현은 MCU, 증폭단, 필터단, 전원부 및 디스플레이로 구성하였다. 용존산소 농도는 아날로그 값을 디지털로 변환하여 백분율로 표현되도록 프로그램하였다. 제작된 용존산소 측정 시스템은 표준 용액 대비 오차 ${\pm}0.5%$의 정확도 및 약 100초의 응답시간을 나타내어 고가의 상용 용존산소 센서를 대치할 수 있을 것으로 기대된다.

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디지털 타이머를 이용한 인터넷 기반의 원격제어 및 모니터링 (Internet Based Remote Control and Monitoring System using Digital Timer)

  • 김은주;강신영;박철수;임영철;김광헌
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 추계학술대회 논문집 전기기기 및 에너지변환시스템부문
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    • pp.245-248
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    • 2001
  • Recently, with the advancement of internet network the system has been needed to be controllable and observable through internet at industrial workplace. In this study, we developed the digital timer which has a communication function to control and observe many kinds of devices by combining relay and timer used for each type of control panel to realize control solution based on internet to be easily applicable at workplace with low cost and adding 485 serial communication module to have parallel expansibility and safety. And, this system was experimented and designed for easy system management and status check from remote station through internet. appling the developed digital timer to parallel sequence control of motor. As the result of experiment, the circuit configuration would be more simplified than the existing, and it is expected that multi-connection control and monitoring can be simply implemented with low cost equipment at industrial workplace.

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디지털 타이머를 이용한 인터넷 기반의 원격제어 및 모니터링 (Internet Based Remote Control and Monitoring System using Digital Timer)

  • 김은주;강신영;박철수;임영철;김광헌
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 추계학술대회 논문집 전기기기 및 에너지변환시스템부문
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    • pp.157-160
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    • 2001
  • Recently, with the advancement of internet network the system has been needed to be controllable and observable through internet at industrial workplace. In this study, we developed the digital timer which has a communication function to control and observe many kinds of devices by combining relay and timer used for each type of control panel to realize control solution based on internet to be easily applicable at workplace with low cost and adding 485 serial communication module to have parallel expansibility and safety. And, this system was experimented and designed for easy system management and status check from remote station through internet, appling the developed digital timer to parallel sequence control of motor. As the result of experiment, the circuit configuration would be more simplified than the existing, and it is expected that multi-connection control and monitoring can be simply implemented with low cost equipment at industrial workplace.

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농업부산물(農業副産物)을 이용한 염료리용(染料理用) 저가흡착제(低價吸着劑)의 개발동향 (Utilization of Agricultural Residues as Low Cost Adsorbents for the Removal Dyes from Aqueous Solution)

  • 신희덕
    • 자원리싸이클링
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    • 제21권2호
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    • pp.9-16
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    • 2012
  • 본 총설은 수 처리용으로 이용되는 여러 가지 종류의 농업부산물과 염료를 종합평가한 것이다. 염료로 인한 수질오염은 심각한 환경문제를 유발하고 있으나 적절한 기술과 장치는 물론, 수 처리제가 고가로 공급되어 수질관리에 어려움을 겪고 있다. 그에 따른 대체제로 최근에 농업부산물을 이용한 저가흡착제 개발에 높은 관심을 보이고 있는 가운데, 각종 농업부산물의 흡착기능을 조사하였다. 또한 활성탄을 대체할 만한 저가이면서 환경친화적인 염료폐수처리제 개발과 그 효용성을 연구하여 활성탄과 같은 흡착제의 대체가능성을 평가하였다.

Multifunctional Thin Film Resistors Prepared by ALD for High-Efficiency Inkjet Printheads

  • Kwack, Won-Sub;Kwon, Se-Hun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.126-126
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    • 2012
  • In past decades, the themal inkjet (TIJ) printer has been widely used as one of the most well-known digital printing technology due to its low cost, and high printing quality. Since the printing speed of TIJ printers are much slower than that of laser printers, however, there has been intensive efforts to raise the printing speed of TIJ printers. One of the most plausible methods to raise the printing speed of TIJ printers is to adopt a page-wide array TIJ printhead. To accomplish this goal, the high efficiency inkjet heating resistor films should be developed to settle the high power consumption problem of a page-wide array TIJ printhead. In this study, we investigated noble metal based multicomponent thin film resistor films prepared by atomic layer deposition (ALD) for a high efficiency inkjet printhead. Design concept, preparation, material properties of noble metal based multicomponent thin films will be discussed in terms of mutlfunctionality.

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Underwater Acoustic Positioning System Design for Shallow Water Depth Application

  • Kim, Kihun;Jang, In-Sung
    • International Journal of Ocean System Engineering
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    • 제3권1호
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    • pp.44-48
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    • 2013
  • This paper describes the design and implementation of a practical underwater positioning system, which is applicable for shallow water depth conditions. In this paper, two strategies are used to enhance the navigation performance. First, a low-cost acoustic-ranging-based precise navigation solution for shallow water is designed. Then, the outlier rejection algorithm is introduced by designing a velocity gate. The acoustic-ranging-based navigation is implemented by modifying the long base line solution. To enhance the tracking precision, the outlier rejection algorithm is introduced. The performance of the developed approach is evaluated using experiments. The results demonstrate that precise shallow water depth navigation can be implemented using the suggested approaches.

TWDM PON을 위한 새로운 MAC 프로토콜 및 동적대역할당 방법 (New MAC Protocol and Dynamic Bandwidth Allocation Method for TWDM PON)

  • 한만수;나철훈;강성준
    • 한국정보통신학회논문지
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    • 제17권6호
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    • pp.1419-1424
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    • 2013
  • PONs (passive optical networks)은 운용비용이 저렴하고 높은 대역폭을 제공하기 때문에 가입자망에서 각광을 받고 있다. 최근에는 WDM (wavelength-division multiplexing)와 TDM (time-division multiplexing)을 결합한 TWDM PON이 가입자망에서의 새로운 해답으로 여겨지고 있다. 본 논문에서는 TWDM PON에 대한 새로운 MAC (media access control) protocol을 제안한다. 또한 TWDM PON에 대한 새로운 동적대역할당 방법을 제안하고 성능을 평가한다.

비대칭 외판원문제에서 3-Opt를 이용한 효율적인 국지탐색 알고리즘 (An Efficient Local Search Algorithm for the Asymmetric Traveling Salesman Problem Using 3-Opt)

  • 김경구;권상호;강맹규
    • 산업경영시스템학회지
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    • 제23권59호
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    • pp.1-10
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    • 2000
  • The traveling salesman problem is a representative NP-Complete problem. It needs lots of time to get a solution as the number of city increase. So, we need an efficient heuristic algorithm that gets good solution in a short time. Almost edges that participate in optimal path have somewhat low value cost. This paper discusses the property of nearest neighbor and 3-opt. This paper uses nearest neighbor's property to select candidate edge. Candidate edge is a set of edge that has high probability to improve cycle path. We insert edge that is one of candidate edge into intial cycle path. As two cities are connected. It does not satisfy hamiltonian cycle's rule that every city must be visited and departed only one time. This paper uses 3-opt's method to sustain hamiltonian cycle while inserting edge into cycle path. This paper presents a highly efficient heuristic algorithm verified by numerous experiments.

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Micro-stereolithography 기술을 이용한 용액분석 소자 제작 (Fabrication of the Liquid Analyzer us ing Micro-stereolithography Technology)

  • 이영태
    • 한국전기전자재료학회논문지
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    • 제14권12호
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    • pp.994-1000
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    • 2001
  • In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

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