• Title/Summary/Keyword: Liquid Silicon

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Excimer laser micromachining of silicon in liquid phase (액상에서의 엑시머 레이저 실리콘 미세가공)

  • Jang, Deok-Suk;Kim, Dong-Sik
    • Laser Solutions
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    • v.11 no.1
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    • pp.12-18
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    • 2008
  • Laser micromachining is a promising technique to fabricate the micro-scale devices. However, there remains important challenges to reducethe redeposition of ablated materials around the laser irradiated zone and to get a smooth surface, especially for metal and semiconductor materials. To achieve the high-quality micromachined devices, various methods have been developed. Liquid-assisted micromachining can be a good solution to overcome the previously mentioned problems. During the laser ablation process, the liquid around the solid sample dramatically changes the ablation characteristics, such as ablation rate, surface profile, formation of debris, and so on. In this investigation, we conducted the laser micromachining of Si in various liquid environmental conditions, such as liquid types, liquid thickness. In addition, using nanoscale time-resolved shadowgraphy technique, we observed the ablation process in liquid environments to understand the mechanism of liquid-assisted laser micromachining.

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Refining of Silicon by Fractional Melting Process (Fractional Melting에 의한 Si 정련에 관한 연구)

  • Kim, Kwi-Wook;Yoon, Woo-Young
    • Journal of Korea Foundry Society
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    • v.17 no.6
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    • pp.598-607
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    • 1997
  • Fractional melting process involves heating an alloy within its liquid-solid region simultaneously ejecting liquid from the solid-liquid mixture. The extent of the purification obtained is comparable to that obtained in multi-pass zone refining. The new fractional melting process in which centrifugal force was used for separating the liquid from the mixture has been developed and applied to the purification of the metallic grade. Refining ratio depends on partition ratio, cake wetness and diffusion in the solid, and it was controlled by various processing parameters such as rotating speed and heating rate. The new parameter called "refining partition coefficient" has been suggested to estimate the effects of processing variables on the refining ratio. Because major impurities in MG-silicon such as Fe, Al, Ni have a low segregation coefficient, good purification effect is expected. The results of refining MG-silicon(98%) showed that 3N-Si was obtained in refined solid of 50% of the original sample.

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Electrodeposition of Silicon in Ionic Liquid of [bmpy]$Tf_2N$

  • Park, Je-Sik;Lee, Cheol-Gyeong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.30.1-30.1
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    • 2011
  • Silicon is one of useful materials in various industry such as semiconductor, solar cell, and secondary battery. The metallic silicon produces generally melting process for ingot type or chemical vapor deposition (CVD) for thin film type. However, these methods have disadvantages of high cost, complicated process, and consumption of much energy. Electrodeposition has been known as a powerful synthesis method for obtaining metallic species by relatively simple operation with current and voltage control. Unfortunately, the electrodeposition of the silicon is impossible in aqueous electrolyte solution due to its low oxidation-reduction equilibrium potential. Ionic liquids are simply defined as ionic melts with a melting point below $100^{\circ}C$. Characteristics of the ionic liquids are high ionic conductivities, low vapour pressures, chemical stability, and wide electrochemical windows. The ionic liquids enable the electrochemically active elements, such as silicon, titanium, and aluminum, to be reduced to their metallic states without vigorous hydrogen gas evolution. In this study, the electrodeposion of silicon has been investigated in ionic liquid of 1-butyl-3-methylpyrolidinium bis (trifluoromethylsulfonyl) imide ([bmpy]$Tf_2N$) saturated with $SiCl_4$ at room temperature. Also, the effect of electrode materials on the electrodeposition and morphological characteristics of the silicon electrodeposited were analyzed The silicon electrodeposited on gold substrate was composed of the metallic Si with single crystalline size between 100~200nm. The silicon content by XPS analysis was detected in 31.3 wt% and the others were oxygen, gold, and carbon. The oxygen was detected much in edge area of th electrode due to $SiO_2$ from a partial oxidation of the metallic Si.

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Performance Evaluation of C/SiC Composites (C/SiC 복합재료의 내열성능 평가)

  • Kim, Yun-Chul
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2007.04a
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    • pp.185-188
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    • 2007
  • The main objective of this research effort was to develope the performance of C/SiC composites manufactured by LSI (Liquid Silicon Infiltration) method for solid and liquid rocket propulsion system and ensure the performance analysis technique. The various carbon preform were manufactured by filament winding, tape rolling, involute layup and stack molding process. For the best performance of thermal and mechanical properties, many process conditions were tested and selected by varying preform, the content of SiC, temperature, impregnation resin and chemical vapour reaction. In conclusion, the high performance and reliability of C/SiC composite were proved for solid and liquid rocket propulsion system. And the performance analysis technique related to mathematical ablation model was originated.

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A Study on the Computational Design of Static Mixer and Mixing Characteristics of Liquid Silicon Rubber using Fluidic Analysis for LED Encapsulation (LED Encapsulation을 위한 스태틱 믹서의 전산 설계 및 유동해석을 이용한 액상 실리콘의 혼합 특성에 대한 연구)

  • Cho, Yong-Kyu;Ha, Seok-Jae;Huxiao, Huxiao;Cho, Myeong-Woo;Choi, Jong Myeong;Hong, Seung-Min
    • Design & Manufacturing
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    • v.7 no.1
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    • pp.55-59
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    • 2013
  • A Light Emitting Diode(LED) is a semiconductor device which converts electricity into light. LEDs are widely used in a field of illumination, LCD(Liquid Crystal Display) backlight, mobile signals because they have several merits, such as low power consumption, long lifetime, high brightness, fast response, environment friendly. In general, LEDs production does die bonding and wire bonding on board, and do silicon and phosphor dispensing to protect LED chip and improve brightness. Then lens molding process is performed using mixed liquid silicon rubber(LSR) by resin and hardener. A mixture of resin and hardener affect the optical characteristics of the LED lens. In this paper, computational design of static mixer was performed for mixing of liquid silicon. To evaluate characteristic of mixing efficiency, finite element model of static mixer was generated, and fluidic analysis was performed according to length of mixing element. Finally, optimal condition of length of mixing element was applied to static mixer from result of fluidic analysis.

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DETERMINATION OF THERMAL CONDUCTIVITY FROM TRANSIENT REFLECTIVITY MEASUREMENTS OF AMOPHOUS SILICON THIN FILMS (A-Si 박막의 반사율변화에 따른 열전달계수 결정)

  • Ryu, Ji-Hyung;Kim, Hyang-Jung;Moon, Seung-Jae
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.2453-2458
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    • 2007
  • The performance of polysilicon thin film transistor (p-Si TFT) has an important role in the operation of active matrix liquid crystal displays. To fabricate the p-Si TFTs that have uniform characteristics, understanding of the recrystallization mechanism of silicon is crucial. Especially, the analysis of the transient temperature variation and the liquid-solid interface motion is required to find the mechanism. The thermal conductivity is one of the most important parameters to understand the mechanism. In this work, a KrF eximer laser beam was irradiated to amorphous silicon thin films. We measured the transient reflectivity at the wavelength of 633 nm. We carried out the numerical simulation of one dimension conduction equation so that we determined the most well-fitted thermal conductivity by comparing the numerically obtained transient reflectivity with the experimentally measured one. The experimentally determined thermal conductivity of amorphous silicon thin films is 1.5 W/mK.

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Nano-porous Silicon Microcavity Sensors for Determination of Organic Fuel Mixtures

  • Pham, Van Hoi;Bui, Huy;Hoang, Le Ha;Nguyen, Thuy Van;Nguyen, The Anh;Pham, Thanh Son;Ngo, Quang Minh
    • Journal of the Optical Society of Korea
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    • v.17 no.5
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    • pp.423-427
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    • 2013
  • We present the preparation and characteristics of liquid-phase sensors based on nano-porous silicon multilayer structures for determination of organic content in gasoline. The principle of the sensor is a determination of the cavity-resonant wavelength shift caused by refractive index change of the nano-porous silicon multilayer cavity due to the interaction with liquids. We use the transfer matrix method (TMM) for the design and prediction of characteristics of microcavity sensors based on nano-porous silicon multilayer structures. The preparation process of the nano-porous silicon microcavity is based on electrochemical etching of single-crystal silicon substrates, which can exactly control the porosity and thickness of the porous silicon layers. The basic characteristics of sensors obtained by experimental measurements of the different liquids with known refractive indices are in good agreement with simulation calculations. The reversibility of liquid-phase sensors is confirmed by fast complete evaporation of organic solvents using a low vacuum pump. The nano-porous silicon microcavity sensors can be used to determine different kinds of organic fuel mixtures such as bio-fuel (E5), A92 added ethanol and methanol of different concentrations up to 15%.

Influence of Liquid-Phase Amount on the Microstructure and Phase Transformation of Liquid-phase Sintered Silicon Carbide (액상량이 탄화규소 소결체의 미세구조 및 상변태에 미치는 영향)

  • 이종국;강현희;박종곤;이은구
    • Journal of the Korean Ceramic Society
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    • v.35 no.4
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    • pp.413-419
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    • 1998
  • ${\beta}$-silicon carbides with yttrium aluminum garnet of 2,5,10 mol% were prepared by a liquid--phase sint-ering and the microstructural evolution and phase transformation were investigated during sintering as functions of liquid-phase amount and sintering time. The rate of grain growth decreases with the addition of the amount of yttrium aluminum garnet (YAG) in the SiC starting powder however the apparent density and the aspect ratio of grains in sintered body increase. The phase transformation from ${\beta}$-SiC to ${\alpha}$-SiC were dependent on the liquid-phase amount and sintering time.

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Heat Transfer and Solidification of Liquid Silicon in von-Kármán Swirling Flow (Von-Kármán 회전 유동 하에서의 액체 실리콘의 응고와 열전달)

  • Yoo, Joo-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.2
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    • pp.185-197
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    • 1999
  • Heat transfer and solidification of liquid silicon in von-$K{\acute{a}}rm{\acute{a}}n$ swirling flow is investigated. The moving boundary is fixed for all times by a coordinate transformation, and finite difference method Is used to obtain the instantaneous location of the solid-liquid Interface and the heat transfer from the surfaces of solid and liquid. For small Stefan number or low wall temperature, the transient heat transfer from the surface of solid(QS(t)) is much larger than that from the liquid side of solid-liquid interface(QL(t)) and QL(t) reaches its quasi-steady-state value much faster than QS(t).

Influences of Target-to-Substrate Distance and Deposition Temperature on a-SiOx/Indium Doped Tin Oxide Substrate as a Liquid Crystal Alignment Layer (RF 마그네트론 스퍼터링에서 증착거리와 증착온도가 무기 액정 배향막의 물리적 성질에 미치는 영향에 대한 연구)

  • Park, Jeung-Hun;Son, Phil-Kook;Kim, Ki-Pom;Pak, Hyuk-Kyu
    • Korean Journal of Materials Research
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    • v.18 no.10
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    • pp.521-528
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    • 2008
  • We present the structural, optical, and electrical properties of amorphous silicon suboxide (a-$SiO_x$) films grown on indium tin oxide glass substrates with a radio frequency magnetron technique from a polycrystalline silicon oxide target using ambient Ar. For different substrate-target distances (d = 8 cm and 10 cm), the deposition temperature effects were systematically studied. For d = 8cm, oxygen content in a-$SiO_x$ decreased with dissociation of oxygen onto the silicon oxide matrix; temperature increased due to enlargement of kinetic energy. For d = 10 cm, however, the oxygen content had a minimum between $150^{\circ}\;and\;200^{\circ}$. Using simple optical measurements, we can predict a preferred orientation of liquid crystal molecules on a-$SiO_x$ thin film. At higher oxygen content (x > 1.6), liquid crystal molecules on an inorganic liquid crystal alignment layer of a-$SiO_x$ showed homogeneous alignment; however, in the lower case (x < 1.6), liquid crystals showed homeotropic alignment.