• 제목/요약/키워드: Linear Motion Error

검색결과 207건 처리시간 0.021초

요 모션 갠트리 제어 시 공기베어링 스테이지의 리플 보상 (Ripple Compensation of Air Bearing Stage upon Gantry Control of Yaw motion)

  • 안다훈;이학준
    • 한국산학기술학회논문지
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    • 제21권11호
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    • pp.554-560
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    • 2020
  • 평판 디스플레이 제조 공정에서 대상물의 위치 결정을 위해 고정밀 평면 모션 스테이지를 사용한다. 이 유형의 스테이지는 일반적으로 마찰이 없는 선형 모터와 에어 베어링을 사용하며, 고정밀 위치 센서로 레이저 간섭계를 사용한다. 스테이지의 불가피한 기생 운동에 의해 야기되는 요 모션 오차는 위치 결정 대상체의 향 변화를 의미하므로, 스테이지의 성능과 공정 정밀도 향상을 위해 요 모션 오차의 실시간 동적 보정은 매우 중요하다. 요 모션 오차 보상에는 갠트리 제어가 일반적이며, 이 방법을 공기베어링 가이드를 사용하는 스테이지에 적용하기 위해서 회전 모션을 허용하는 유연기구가 스테이지에 적용된다. 본 논문은 공기베어링과 유연기구를 갖춘 H형 XY 스테이지의 정속 구동 성능을 개선하는 방법을 제안한다. 유연기구를 포함한 스테이지의 갠트리 제어 시 선형 모터로부터 발생하는 상호 리플의 발생 원인을 분석하고, 이러한 상호 리플을 보상하는 방안으로 적응 학습 제어를 제시한다. 제시 방안의 검증을 위해 시뮬레이션을 수행하여, 보상 제어를 통해 속도 리플이 약 22 % 수준으로 감소함을 확인하였다. 그리고 요 모션 오차가 발생하는 스테이지 상태를 가정하여 리플 저감 효과를 검증하였다.

Explicit Motion of Dynamic Systems with Position Constraints

  • Eun, Hee-Chang;Yang, Keun-Hyuk;Chung, Heon-Soo
    • Journal of Mechanical Science and Technology
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    • 제17권4호
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    • pp.538-544
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    • 2003
  • Although many methodologies exist for determining the constrained equations of motion, most of these methods depend on numerical approaches such as the Lagrange multiplier's method expressed in differential/algebraic systems. In 1992, Udwadia and Kalaba proposed explicit equations of motion for constrained systems based on Gauss's principle and elementary linear algebra without any multipliers or complicated intermediate processes. The generalized inverse method was the first work to present explicit equations of motion for constrained systems. However, numerical integration results of the equation of motion gradually veer away from the constraint equations with time. Thus, an objective of this study is to provide a numerical integration scheme, which modifies the generalized inverse method to reduce the errors. The modified equations of motion for constrained systems include the position constraints of index 3 systems and their first derivatives with respect to time in addition to their second derivatives with respect to time. The effectiveness of the proposed method is illustrated by numerical examples.

Identification and Robust $H_\infty$ Control of the Rotational/Translational Actuator System

  • Tavakoli Mahdi;Taghirad Hamid D.;Abrishamchian Mehdi
    • International Journal of Control, Automation, and Systems
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    • 제3권3호
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    • pp.387-396
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    • 2005
  • The Rotational/Translational Actuator (RTAC) benchmark problem considers a fourth-order dynamical system involving the nonlinear interaction of a translational oscillator and an eccentric rotational proof mass. This problem has been posed to investigate the utility of a rotational actuator for stabilizing translational motion. In order to experimentally implement any of the model-based controllers proposed in the literature, the values of model parameters are required which are generally difficult to determine rigorously. In this paper, an approach to the least-squares estimation of the parameters of a system is formulated and practically applied to the RTAC system. On the other hand, this paper shows how to model a nonlinear system as a linear uncertain system via nonparametric system identification, in order to provide the information required for linear robust $H_\infty$ control design. This method is also applied to the RTAC system, which demonstrates severe nonlinearities, due to the coupling from the rotational motion to the translational motion. Experimental results confirm that this approach can effectively condense the whole nonlinearities, uncertainties, and disturbances within the system into a favorable perturbation block.

A STATISTICS INTERPOLATION METHOD: LINEAR PREDICTION IN A STOCK PRICE PROCESS

  • Choi, U-Jin
    • 대한수학회지
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    • 제38권3호
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    • pp.657-667
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    • 2001
  • We propose a statistical interpolation approximate solution for a nonlinear stochastic integral equation of a stock price process. The proposed method has the order O(h$^2$) of local error under the weaker conditions of $\mu$ and $\sigma$ than those of Milstein' scheme.

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순차적 예측오차 방법에 의한 구조물의 모우드 계수 추정 (IDENTIFICATION OF MODAL PARAMETERS BY SEQUENTIAL PREDICTION ERROR METHOD)

  • Lee, Chang-Guen;Yun, Chung-Bang
    • 한국전산구조공학회:학술대회논문집
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    • 한국전산구조공학회 1990년도 가을 학술발표회 논문집
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    • pp.79-84
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    • 1990
  • The modal parameter estimations of linear multi-degree-of-freedom structural dynamic systems are carried out in time domain. For this purpose, the equation of motion is transformed into the autoregressive and moving average model with auxiliary stochastic input (ARMAX) model. The parameters of the ARMAX model are estimated by using the sequential prediction error method. Then, the modal parameters of the system are obtained thereafter. Experimental results are given for a 3-story building model subject to ground exitations.

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스텝핑 모우터를 이용한 2축 윤곽제어 장치 개발에 관한 연구 (Development of two axis contouring control system based on stepping motor)

  • 김교형;이기설
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1987년도 한국자동제어학술회의논문집; 한국과학기술대학, 충남; 16-17 Oct. 1987
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    • pp.228-231
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    • 1987
  • Microprocessor-based software DDA interpolator is developed and applied to two axis contouring control of X-Y table. Developed assembly program is composed of feedrate, linear and circular DDA interpolation routines. Reference-pulse type of open-loop stepping motor control system in which the micro-computer produces a sequence of reference pulses for each axis of motion is adopted. To test performance of the developed program, X-Y table drive system based on stepping motor and shaft encoder is designed. Contouring error of the system in linear and circular path is within .+-.0.2 mm.

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원형레일 기반 지상 SAR 시스템에서의 안테나 위치 정밀 제어 기술 재발 (Precise Control of Antenna Position in Arc-Rail Based GB-SAR System)

  • 김광은;조성준;성낙훈;이재희;강문경
    • 대한원격탐사학회지
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    • 제27권1호
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    • pp.25-31
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    • 2011
  • 원형레일을 기반으로 하는 지상 SAR 시스템인 ArcSAR 시스템에서 간섭(interferometry)기법의 적용이 가능한 정밀한 지상 SAR 영상을 획득하기 위해서는 안테나 위치의 정밀한 제어가 요구된다. 본 연구에서는 자력 선형 스케일(Magnetic Linear Scale)을 이용하여 기존 ArcSAR 시스템에서의 안테나 위치 값의 정확도를 분석하였으며 자력 엔코더(Encoder) 값을 이용하여 안테나 위치를 정밀하게 제어할 수 있는 기술을 개발하였다. 기존의 ArcSAR 시스템의 제어 체계에서는 안테나 회전 각도에 대한 평균 RMS 오차가 $0.043^{\circ}$였으나, 본 기술을 통해 $0.006^{\circ}$로 감소시킬 수 있었다. 이는 3미터 길이의 arm을 기준으로 할 때, 안테나 위치 정확도에 대한 평균 RMS 오차가 2.262mm에서 0.324mm로 감소된 것에 해당한다. 본 기술을 통해 매우 정밀한 지상 SAR 영상자료의 획득이 가능하게 되었으며 향후 간섭기법의 적용을 통해 지반 및 대형 구조물의 미세변위에 대한 초정밀 모니터링에 활용될 수 있을 것으로 기대된다.

Smart Control System Using Fuzzy and Neural Network Prediction System

  • Kim, Tae Yeun;Bae, Sang Hyun
    • 통합자연과학논문집
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    • 제12권4호
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    • pp.105-115
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    • 2019
  • In this paper, a prediction system is proposed to control the brightness of smart street lamps by predicting the moving path through the reduction of consumption power and information of pedestrian's past moving direction while meeting the function of existing smart street lamps. The brightness of smart street lamps is adjusted by utilizing the walk tracking vector and soft hand-off characteristics obtained through the motion sensing sensor of smart street lamps. In addition, the motion vector is used to analyze and predict the pedestrian path, and the GPU is used for high-speed computation. Pedestrians were detected using adaptive Gaussian mixing, weighted difference imaging, and motion vectors, and motions of pedestrians were analyzed using the extracted motion vectors. The preprocessing process using linear interpolation is performed to improve the performance of the proposed prediction system. Fuzzy prediction system and neural network prediction system are designed in parallel to improve efficiency and rough set is used for error correction.

호흡운동에 의한 MRI 아티팩트의 수정 (Correction of MRI Artifact due to Planar Respiratory Motion)

  • 김응규;김규헌
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2003년도 하계종합학술대회 논문집 Ⅳ
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    • pp.1863-1866
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    • 2003
  • In this study, respiratory motion is modeled by a 2-Dimensional linear expanding-shrinking movement. According to the introduced model, respiratory motion imposes phase error, non-uniform sampling and amplitude modulation distortions on the acquired MRI data. When the motion parameters are known or can be estimated, a reconstruction algorithm based on superposition method was used to removed the MRI artifact. For the purpose of estimating unknown motion parameters, we applied the spectrum shift method to find the respiratory fluctuation function, the x directional expansion coefficient and its center, and also we used the minimum energy method to find the y directional expansion coefficient and its center. The effectiveness of this presented method is shown by Computer simulations.

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호흡운동에 따른 MRI 아티팩트 수정 (MRI Artifact Correction due to Respiratory Motion)

  • 김응규;김규헌
    • 융합신호처리학회 학술대회논문집
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    • 한국신호처리시스템학회 2003년도 하계학술대회 논문집
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    • pp.58-61
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    • 2003
  • In this study, a planar respiratory motion is modeled by a 2-D linear expanding-shrinking movement. According to the introduced model, respiratory motion imposes phase error, non-uniform sampling and amplitude modulation distortions on the acquired MRI data. When the motion parameters are known or can be estimated, a construction algorithm based on superposition method was used to remove the MRI artifact. For the purpose of estimating unknown motion parameters, we used the spectrum shift method to find the respiratory fluctuation function, the x directional expansion coefficient and its center, and we also used the minimum energy method to find the y directional expansion coefficient and its center. Finally the effectiveness of this presented method is shown by computer simulations.

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