• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.4
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• pp.202-208
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• 2001

In Recent results suggested that doping $Ta_2O_5$ with a small amount of $TiO_2$ using standard ceramic processing techniques can increase the dielectric constant of $Ta_2O_5$ significantly. In this paper, this concept is studied using RTCVD (Rapid Thermal Chemical Vapor Deposition). Ti-doped $Ta_2O_5$ films are deposited using $TaC_{12}H_{30}O_5N$, $C_8H_{24}N_4Ti$, and $O_2$ on both Si and $NH_3$-nitrided Si substrates. An $NH_3$-based interface layer at the Si surface is used to prevent interfacial oxidation during the CVD process and post deposition annealing is performed in $H_2/O_2$ ambient to improve film quality and reduce leakage current. A sputtered TiN layer is used as a diffusion barrier between the Al gate electrode and the $TaTi_xO_y$ dielectric. XPS analyses confirm the formation of a ($Ta_2O_5)_{1-x}(TiO_2)_x$ composite oxide. A high quality $TaTi_xO_y$ gate stack with EOT (Equivalent Oxide Thickness) of $7{\AA}$ and leakage current $Jg=O.5A/textrm{cm}^2$ @ Vg=-1.0V has been achieved. We have also succeeded in forming a $TaTi_x/O_y$ composite oxide by rapid thermal oxidation of the as-deposited CVD TaTi films. The electrical properties and Jg-EOT characteristics of these composite oxides are remarkably similar to that of RTCVD $Ta_2O_5, suggesting that the dielectric constant of $Ta_2O_5$ is not affected by the addition of $TiO_2$.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.48 no.3
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• pp.125-131
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• 2011

Water leak detection system is a system based on wireless sensor networks(WSNs) which detect a leak on water supply, localize the leak position and finally inform a water management center. A traditional leak detection method is to use experienced personnel who walk along a pipeline listening to the sound that is generated by the leaks and their effectiveness depend on the experience of the user. Also making more successful detection, it should be processed at middle of the night when people do not use water, as the result users have to operate the leak detection system at midnight. In this paper, we propose a new method for the water leak detection system based on the WSNs and describe it in detail. Leak detection devices which detect a leakage of water transmit and receive the result of water leak detection with each other by configuring WSNs to improve reliability of the detection result. Also, we analyzed the sound from water flowed in pipeline, proposed the pre-signal processing to separate a leakage sound from noisy sound. And lastly, It is especially important to make a time synchronization with water leak detection devices that are installed on the pipeline, we used 1PPS(1 Pulse Per Second) signal generated by GPS, therefore we could get a precise time synchronization. The proposed system set up in Namyangju and performances were evaluated.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.44 no.8
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• pp.8-15
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• 2007

In this paper, we fabricated the field emitter display using oxidized porous polysilicon(OPPS). Their field emission characteristics and the brightness were investigated for each pixel. The OPPS emitter was operated to each pixel using passive matrix for application of large panel display. We set up the proper thickness and width of upper electrode. The fine structure of OPPS was analyzed and the field emission characteristics of each pixel were investigated. As a result of field emission characteristics of different upper electrode thickness and width, we confirmed that the most efficient thickness was 2nm/7nm and increased the emission efficiency over the width of 2.5 mm. Even if field emission characteristics of each pixel was a little different but we confirmed the same leakage current and emission current, emission efficiency at each pixel. The leakage current and emission current was decreased according to the time increases but all of each pixel were uniformly decreased. We confirmed that the brightness of each pixel was not different and the brightness of OPPS field emitter was 700 cd/m2 at the Vps=20 V. Accordingly, the patterned OPPS field emitter can be applied to high quality field emission display devices.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.5
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• pp.16-22
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• 2002

This paper suggests the optimum processing conditions for obtaining good quality $P^{+}$-n shallow junctions formed by pre-amorphization and furnace annealing(FA) to reflow BPSG(bore phosphosilicate glass). $BF_2$ions, the p-type dopant, were implanted with the energy of 20keV and the dose of 2$\times$10$^{15}$ cm$^{-2}$ into the substrates pre-amorphized by As or Ge ions with 45keV, 3$\times$$10^{14}$ $cm^{-2}$. High temperature annealings were performed with a furnace and a rapid thermal annealer. The temperature range of RTA was 950~$1050^{\circ}C$, and the furnace annealing was employed for BPSG reflow with the temperature of $850^{\circ}C$ for 40 minutes. To characterize the formed junctions, junction depth, sheet resistance and diode leakage current were measured. Considering the preamorphization species, Ge ion exhibited better results than As ion. Samples preamorphized with Ge ion and annealed with $1000^{\circ}C$ RTA showed the most excellent characteristics. When FA was included, Ge preamorphization with $1050^{\circ}C$ RTA plus FA showed the lowest product of sheet resistance and junction depth and exhibited the lowest leakage currents.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.46 no.12
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• pp.18-23
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• 2009

The effect of hydrogen-nitrogen annealing on the interface trap properties of Metal-Oxide-Nitride-Oxide-Silicon (MONOS) capacitors is investigated by analyzing the capacitors' gate leakage current and the interface trap density between the Si and $SiO_2$ layer. MONOS samples annealed at $850^{\circ}C$ for 30 s by rapid thermal annealing (RTA) are treated by additional annealing in a furnace, using annealing eases $N_2$ and 2% hydrogen and 98% nitrogen gas mixture $(N_2-H_2)$ at $450^{\circ}C$ for 30 mins. Among the three samples as-deposited, annealed in $N_2$ and $N_2-H_2$, MONOS sample annealed in an $N_2-H_2$ environment is found to have the lowest increase of interface-trap density from the capacitance-voltage experiments. The leakage current of sample annealed in $N_2-H_2$ is also lower than that of sample annealed in $N_2$.

• International Journal of Fluid Machinery and Systems
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• v.10 no.1
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• pp.40-46
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• 2017

Small valves including ball valves, gate valves and butterfly valves have been adopted in the fields of steam power generation, petrochemical industry, carriers, and oil tankers. Butterfly valves have normally been applied to fields where in narrow places installing the existing valves such as gate valves and ball valves have proven difficult due to the surrounding area and the heavier of these valves. Butterfly valves are used to control the mass flow of the piping system under low pressure by rotating the circular disk installed inside. The butterfly valve is benefitted by having simpler structure in which the flow is controlled by rotating the disc circular plate along the center axis, whereas the weight of the valve is light compared to the gate valve and ball valve above-mentioned, as there is no additional bracket supporting the valve body. The manufacturing company needs to acquire the performance and life test equipment, in the case of adopting the improving factors to detect leakage and damage on the seat of the valve disc. However, small companies, which are manufacturing the industrial valves, normally sell their products without the life test, which is the reliability test and environment test, because of financial and manpower problems. Furthermore, the failure mode analysis of the products failed in the field is likewise problematic as there is no system collecting the failure data on sites for analyzing the failures of valves. The analyzing and researching process is not arranged systematically because of the financial problem. Therefore this study firstly tried to obtain information about the failure data from the sites, analyzed the failure mode based on the field data collected from the customers, and then obtained field data using measuring equipment. Secondly, we designed and manufactured the performance and life test equipment which also have the real time monitoring system with the naked eye for the butterfly valves. The concept of this equipment can also be adopted by other valves, such as the ball valve, gate valve, and various others. It can be applied to variously sized valves, ranging from 25 mm to large sized valves exceeding 3000 mm. Finally, this study carries out the life test with square wave pressure, using performance and life test equipment. The performance found out that the failures from the real time monitoring system were good. The results of this study can be expanded to the other valves like ball valves, gate valves, and control valves to find out the failure mode using the real time monitoring system for durability and performance tests.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.2
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• pp.99-107
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• 2006

Magnetic nondestructive testing is very useful far detecting a crack on the surface or near of the surface of the ferromagnetic materials. The distribution of the magnetic flux leakage (DMFL) on a specimen has to be obtained quantitatively to evaluate the crack. The magnetic camera is proposed to obtain the DMFL at the large lift-off. The magnetic camera consists of a magnetic source, magnetic lens, analog to digital converters (ADCs), interface, and computer. The magnetic leakage fields or the distorted magnetic fields from the object, which are concentrated on the magnetic lens, are converted to analog electrical signals tv arrayed small magnetic sensors. These analog signals are converted to digital signals by the ADCs, and are stored, imaged, and processed by the interface and computer. However the magnetic camera has limitations with respect to converting and switching speed, full range and resolution, direct memory access (DMA), temporary storage speed and volume because common ADCs were used. Improved techniques, such as those that introduce the operational amplifier (OP-Amp), amplify the signal, reduce the connection line, and use the low pass filter (LPF) to increase the signal to noise ratio are necessary. This paper proposes the exclusive embedded ADC including OP-Amp, LPF, microprocessor and DMA circuit for the magnetic camera to satisfy the conditions mentioned above.

• Journal of the Korean Society of Marine Environment & Safety
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• v.22 no.7
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• pp.863-868
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• 2016

In this study, the precise shapes of sunken ships and information on seafloor topography were analyzed using data obtained from a multi-beam echo sounder. The state of each sunken ship was analyzed by processing diverse imagery data which was compared with data obtained from past investigations to determine changes in the state and circumjacent seafloor topography. Apparent changes in the seafloor topography around one sunken ship, the "Pacific Friend", were found from stern to bow as a result of continued submarine erosion and sedimentation. In the case of sunken ship "No. 7 Haeseong", the partial collapse of the bow was revealed in the seabed images captured in 2015, though it had still been intact in images captured during the Korea Hydrographic and Oceanographic Agency's investigation in 2011. This partial collapse was presumed to have resulted from the effects of continued tidal currents, the cargo load of the ship and continued corrosion of the ship over a long time on the seabed. Continuous monitoring of residual fuel inside the ship is necessary to avoid leakage and potential marine pollution. By conducting image analysis on these sunken ships, it has been determined that the structural safety of the ships is seriously influenced by tidal currents and seafloor topography, while the hulls will be continuously changed by corrosion. As a result, it can be concluded that the development of prediction and response techniques that take into consideration residual fuel leakage and environmental changes according to the geological characteristics of sunken ships is necessary.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.6 s.348
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• pp.47-52
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• 2006

This paper proposes a novel low-power $32bit\times32bit$ multiplier for deep submicron technologies beyond 130nm. As technology becomes small, static power due to leakage current significantly increases, and it becomes comparable to dynamic power. Recently, shutdown method based on MTCMOS is widely used to reduce both dynamic and static power. However, it suffers from severe power line noise when restoring whole large-size functional block. Therefore, the proposed multiplier mitigates this noise by shutting down and waking up sequentially along with pipeline stage. Fabricated chip measurement results in $0.35{\mu}m$ technology and gate-transition-level simulation results in 130nm and 90nm technologies show that it consumes $66{\mu}W,\;13{\mu}W,\;and\;6{\mu}W$ in idle mode, respectively, and it reduces power consumption to $0.04%\sim0.08%$ of active mode. As technology becomes small, power reduction efficiency degrades in the conventional clock gating scheme, but the proposed multiplier does not.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.9
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• pp.440-446
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• 2016

Military secrets or confidential data of any organization are extremely important assets. They must be discluded from outside. To do this, methods for detecting anomalous attacks and intrusions inside the network have been proposed. However, most anomaly-detection methods only cover aspects of intrusion from outside and do not deal with internal leakage of data, inflicting greater damage than intrusions and attacks from outside. In addition, applying conventional anomaly-detection methods to data exfiltration creates many problems, because the methods do not consider a number of variables or the internal network environment. In this paper, we describe issues considered in data exfiltration detection for anomaly detection (DEDfAD) to improve the accuracy of the methods, classify the methods as profile-based detection or machine learning-based detection, and analyze their advantages and disadvantages. We also suggest future research challenges through comparative analysis of the issues with classification of the detection methods.