• 제목/요약/키워드: Layered fabrication

검색결과 138건 처리시간 0.028초

제어 반전 소자의 제조 및 그 특성 (Fabrication and Characteristics of the Controlled Inversion Devices)

  • 김진섭;이우일
    • 대한전자공학회논문지
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    • 제20권1호
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    • pp.45-49
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    • 1983
  • Metal/insulator/n epi-layer/p+구조의 CID(controlled inversion device)를 제조하였다. I-V 특성 곡선에서 ON상태와 OFF상태사이에 부성저항(negative resistance)영역이 나타났다. CID를 제조하기 위해서 행한 산화층 형성 과정에서 600℃에서 5분간 산화시킨 소자의 스위칭 및 홀딩 전압은 각각 5.0V와 2.5V였다. 그리고 입사된 광에 의해서 스위칭 전압은 감소하였으나 홀딩 전압은 변하지 않았다.

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Epoxy-nanoclay composite 제작과 전기적 특성 (The Fabrication of Epoxy-nanoclay composite and electrical properties)

  • 노현지;이성갑;안병립;원우식;이창공
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 제39회 하계학술대회
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    • pp.1222-1223
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    • 2008
  • Nanocomposites of a epoxy resin are synthesized and evaluated. the present study investigated the effect of nanoclay additives on the properties of diglycidyl ether or bisphenol A(DGEBA) epoxy resin. DGEBA was mixed with 3$\sim$7 wt% organically modified layered silicate, Cloisite 30B for three hours. The average grain size of the specimens decreased with adding Cloisite 30B. The dielectric constant showed between 3.2$\sim$3.5 and the dielectric loss showed between 3.2$\sim$5.7 % in all specimens. Dielectric strength showed a best valu of 20.8 kV/mm at added with Cloisite 30B 5 wt%.

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Thermal Improvements for 2.75 GHz-FBAR Devices

  • Mai, Linh;Lee, Jae-Young;Pham, Van-Su;Kabir, S. M. Humayun;Dong, Hoai-Bac;Yoon, Gi-Wan
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2007년도 추계종합학술대회
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    • pp.196-199
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    • 2007
  • In this paper, we studied a ZnO-based film bulk acoustic wave resonator (FBAR) device fabricated on top of a novel multi-layered Bragg reflector with chromium adhesion layers $(0.03{\mu}m-thick)$ inserted. The performance of FBAR device could be significantly improved using proper thermal treatments. At ${\sim}2.75$ GHz, we could achieve good return loss and quality factor (Q). This device fabrication technique will be useful for the future mobile WiMAX applications.

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FRAM 응용을 위한 BLT 박막의 제작 및 특성 (A Fabrication and ferroelectric properties of BLT Thin Films for FRAM)

  • 김경태;권지운;심일운;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.565-568
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    • 2001
  • We have fabricated $Bi_{3.25}La_{0.75}Ti_{3}O_{12}(BLT)$ thin(200nm) films on the $Pt/Ti/SiO_{2}/Si$ substrates using a MOD(Metalorganic decomposition) method with annealing temperature from $550^{\circ}C$ to $750^{\circ}C$. The structural properties of the films examined by x-ray diffraction. The layered-perovskite phase obtained above $600^{\circ}C$. Scanning electron micrographs showed uniform surface composed of rodlike grains. The grain size increased with increasing annealing temperature. The BLT thin films showed little polarization fatigue test up to $3.5{\times}10^{9}$ bipolar cycling at a 5V and 100kHz.

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박막 자심 인덕터의 제조와 특성 (Fabrication and Properties of Thin-Film Inductors with Magnetic Core)

  • 김현식;민복기;변우봉;김기욱;송재성;오영우
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 C
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    • pp.1314-1316
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    • 1997
  • In this study, We fabricated thin film magnetic core inductors by using thin film manufacturing techniques such as photolithography and wet etching process. The inductors were prepared using multi-layered CoNbZr/Cu/CoNbZr. These devices are measured at high frequency range of $1\;MHz{\sim}1\;GHz$.

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광대역형 Ferrite/Rubber 복합 전파흡수체의 제작 및 특성 (Fabrication of Ferrite/Rubber composite microwave absorber of wide-band type and its properties)

  • 김한근;신광호;조현철;사공건
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1994년도 하계학술대회 논문집 C
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    • pp.1478-1480
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    • 1994
  • In this paper, the microwave absorption properties of two layered absorber were evaluated. The two layer absorber were composed of Ni-Zn ferrite/rubber absorber and Ferroxplana/rubber absorber. The most absorption properties condition were obtained when the transforming layer and absorbing layer were Ferroxplana/robber absorber and Ni -Zn ferrite/rubber absorber. respectivity. The optimal thickness of the transforming and the absorbing layer were 4(mm) and 1(mm), respective1y.

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기계적 밀링 및 방전 플라즈마 소결 공정을 이용한 벌크 비정질 복합재의 제조 (Fabrication of Bulk Metallic Glass Composites by Mechanical Milling with Subsequent Spark Plasma Sintering Process)

  • 이진규;김택수;김정곤
    • 한국분말재료학회지
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    • 제14권3호
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    • pp.197-201
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    • 2007
  • Bulk metallic glass (BMG) composite was fabricated by consolidation of milled metallic glass composite powders. The metallic glass composite powder was synthesized by a controlled milling process using the Cu-based metallic glass powder blended with 30 vol% Zr-based metallic glass powders. The milled composite powders showed a layered structure with three metallic phases, which is formed as a result of mechanical milling. By spark plasma sintering of milled metallic glass powders in the supercooled liquid region, a fully dense BMG composite was successfully synthesized.

Gold Stripe Optical Waveguides Fabricated by a Novel Double-Layered Liftoff Process

  • Kim, Jin-Tae;Park, Sun-Tak;Park, Seung-Koo;Kim, Min-Su;Lee, Myung-Hyun;Ju, Jung-Jin
    • ETRI Journal
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    • 제31권6호
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    • pp.778-783
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    • 2009
  • To fabricate uniform and reliable thin gold stripes that provide low-loss optical waveguides, we developed a novel liftoff process placing an additional $SiN_x$ layer under conventional photoresists. By patterning a photoresist and over-etching the $SiN_x$, the photoresist patterns become free-standing structures on a lower-cladding. This leads to uniform metal stripes with good reproducibility and effectively removes parasitic structures on the edge of the metal stripe in the image reversal photolithography process. By applying the newly developed process to polymer-based gold stripe waveguide fabrication, we improved the propagation losses about two times compared with that incurred by the conventional image-reversal process.

MEMS를 이용한 미세 열유속센서의 개발 (Development of Micro-machined Heat Flux Sensor by using MEMS technology)

  • 양훈철;송철화;김무환
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 춘계학술대회
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    • pp.1364-1369
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    • 2004
  • New method for the design, fabrication, and calibration of micro-machined heat flux sensor has been developed. Two types of micro-machined heat flux sensor having different thicknesses of the thermal-resistance layer are fabricated using the MEMS technique. Photo-resist patterning using a chrome mask, bulk-etching and copper-nickel sputtering using a shadow mask are applied to make heat flux sensors, which are calibrated in the convection-type heat flux calibration facility. The sensitivity of the device varies with thermal-resistance layer, and hence can be used to measure the heat flux in heat-transfer phenomena.

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FRAM 응용을 위한 BLT박막의 제작 및 특성 (A Fabrication and ferroelectric properties of BLT Thin Films for FRAM)

  • 김경태;권지운;심일운;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.565-568
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    • 2001
  • We have fabricated $Bi_{3.25}$$La_{0.75}$ti$_3$O$_{12}$ (BLT) thin(200nm) films on the Pt/Ti/SiO$_2$/Si substrates using a MOD(Metalorganic decomposition) method with annealing temperature from 55$0^{\circ}C$ to 75$0^{\circ}C$. The structural properties of the films examined by x-ray diffraction. The layered-perovskite phase obtained above $600^{\circ}C$. Scanning electron micrographs showed uniform surface composed of rodlike grains. The grain size increased with increasing annealing temperature. The BLT thin films showed little polarization fatigue test up to 3.5x10$^{9}$ bipolar cycling at a 5V and 100kHz.kHz.

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