Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)
- 2007.10a
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- Pages.196-199
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- 2007
Thermal Improvements for 2.75 GHz-FBAR Devices
- Mai, Linh (Information and Communications University (ICU)) ;
- Lee, Jae-Young (Information and Communications University (ICU)) ;
- Pham, Van-Su (Information and Communications University (ICU)) ;
- Kabir, S. M. Humayun (Information and Communications University (ICU)) ;
- Dong, Hoai-Bac (Posts and Telecommunications Institute of Technology) ;
- Yoon, Gi-Wan (Information and Communications University (ICU))
- Published : 2007.10.26
Abstract
In this paper, we studied a ZnO-based film bulk acoustic wave resonator (FBAR) device fabricated on top of a novel multi-layered Bragg reflector with chromium adhesion layers