• Title/Summary/Keyword: Layer potentials

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Effect of chemical in post Ru CMP Cleaning solutions on abrasive particle adhesion and removal (Post Ru CMP Cleaning에서 연마입자의 흡착과 제거에 대한 chemical의 첨가제에 따른 영향)

  • Kim, In-Kwon;Kim, Tae-Gon;Cho, Byung-Gwun;Son, Il-Ryong;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.529-529
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    • 2007
  • Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

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Synthesis and Application of the Novel Azomethine Metal Complexes for the Organic Electroluminescent Devices

  • Kim, Seong Min;Kim, Jin Sun;Sin, Dong Myeong;Kim, Yeong Gwan;Ha, Yun Gyeong
    • Bulletin of the Korean Chemical Society
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    • v.22 no.7
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    • pp.743-747
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    • 2001
  • New azomethine metal complexes were synthesized systematically and characterized. Beryllium, magnesium, or zinc ions were used as a central metal cation and aromatic azomethines (L1-L4) were employed as a chelating anionic ligand. Emission peaks o f the complexes in both solution and solid states were observed mostly at the region of 400-500 nm in the luminescence spectra, where blue light was emitted. Three of them (BeL1 (Ⅰ), ZnL2 (Ⅱ), and ZnL3 (Ⅲ)) were sublimable and thus were applied to the organic light-emitting devices (OLED) as an emitting layer, respectively. The device including the emitting layer of Ⅰ exhibited white emission with the broad luminescence spectral range. The device with the emitting layer of Ⅱ showed blue luminescence with the maximum emission peak at 460 nm. Their ionization potentials, electron affinities, and electrochemical band gaps were investigated with cyclic voltammetry. The electrochemical gaps of 2.98 for I, 2.70 for Ⅱ, and 2.63 eV for Ⅲ were found to be consistent with their respective optical band gaps of 3.01, 2.95 and 2.61 eV within an experimental error. The structure of OLED manufactured in this study reveals that these complexes can work as electron transporting materials as well.

Spectroelectrochemical Study for Thin Film of Gold Nanoparticles (금 나노입자 박막의 분광전기화학적 연구)

  • Seo, Seong S.;Chambers, James Q.
    • Journal of the Korean Chemical Society
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    • v.50 no.1
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    • pp.32-36
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    • 2006
  • films of gold nanoparticles were formed on indium tin oxide (ITO) by an electrodeposition method from an aminosilicate stabilized gold colloid solution. The thin films were examined by cyclic voltammetry (CV), scanning electron microscopy (SEM), UV-visible, and energy dispersive X-ray spectroscopy (EDXS). The surface coverage of gold nanoparticles on the thin film was estimated to 1.2 nanomole/cm2. An anthraquinone-2, 6-disulfonic acid, disodium salt (AQDS) self-assembled layer was generated by immersing gold thin film into 1mM of AQDS in 0.1M HClO4 solution for over 20 hours. As a result, a new absorbance peak from the multi-layers (AQDS/thin film of gold /ITO) was obtained about at 690 nm. Also, the surface plasmon absorption of multi-layers was measured by UV-Visible spectrometer along with chronoamperometry by applying the various potentials from +0.5V to -0.5V. The maximum surface plasmon absorption band at 550 nm was decreased by applying negative potentials. The change of absorbance was correlated with the surface coverage of the AQDS indicating the pseudo-capacity surface state of the AQDS layer was coupled to the energy level of the plasmonband by applied negative potentials.

Electron Mobility Model in Strained Si Inversion Layer (응력변형을 겪는 Si 반전층에서 전자 이동도 모델)

  • Park Il-Soo;Won Taeyoung
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.42 no.3 s.333
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    • pp.9-16
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    • 2005
  • The mobility in strained Si inversion layer on $Si_{1-x}Ge_x$ is calculated considering a quantum effect(subband energy and wavefunction) in inversion layer and relaxation time approximation. The quantum effect in inversion layer is obtained by using self-consistent calculation of $Schr\ddot{o}dinger$ and Poisson equations. For the relaxation time, intravalley and intervalley scatterings are considered. The result shows that the reason for the enhancement in mobility as Ge mole fraction increases is that the electron mobility in 2-폴드 valleys is about 3 times higher than that of 4-폴드 valleys and most electrons are located in 2-폴드 valleys as Ge mole fraction increases. Meanwhile, for the phonon-limited mobility the fitting to experimental data, Coulomb and surface roughness mobilities are included in total mobility, Deformation potentials are selected for the calculated effective field, temperature, and Ge mole fraction dependent mobilities to be fitted to experimental data, and then upgraded data can be obtained by considering nonparabolicity in Si band structure.

Shape anisotropy and magnetic properties of Co/Ni anti-dot arrays

  • Deshpande, N.G.;Seo, M.S.;Kim, J.M.;Lee, S.J.;Lee, Y.P.;Rhee, J.Y.;Kim, K.W.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.444-444
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    • 2011
  • Recently, patterned magnetic films and elements attract a wide interest due to their technological potentials in ultrahigh-density magnetic recording and spintronic devices. Among those patterned magnetic structures, magnetic anti-dot patterning induces a strong shape anisotropy in the film, which can control the magnetic properties such as coercivity, permeability, magnetization reversal process, and magneto-resistance. While majority of the previous works have been concentrated on anti-dot arrays with a single magnetic layer, there has been little work on multilayered anti-dot arrays. In this work, we report on study of the magnetic properties of bilayered anti-dot system consisting of upper perforated Co layer of 40 nm and lower continuous Ni layer of 5 nm thick, fabricated by photolithography and wet-etching processes. The magnetic hysteresis (M-H) loops were measured with a superconducting-quantum-interference-device (SQUID) magnetometer (Quantum Design: MPMS). For comparison, investigations on continuous Co thin film and single-layer Co anti-dot arrays were also performed. The magnetic-domain configuration has been measured by using a magnetic force microscope (PSIA: XE-100) equipped with magnetic tips (Nanosensors). An external electromagnet was employed while obtaining the MFM images. The MFM images revealed well-defined periodic domain networks which arise owing to the anisotropies such as magnetic uniaxial anisotropy, configurational anisotropy, etc. The inclusion of holes in a uniform magnetic film and the insertion of a uniform thin Ni layer, drastically affected the coercivity as compared with single Co anti-dot array, without severely affecting the saturation magnetization ($M_s$). The observed changes in the magnetic properties are closely related to the patterning that hinders the domain-wall motion as well as to the magneto-anisotropic bilayer structure.

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A Study of establishing River Space Database Using A Geographic Information System (GIS를 이용한 하천공간 데이타베이스 구축에 관한 연구)

  • 이태식;구지희
    • Spatial Information Research
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    • v.2 no.1
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    • pp.93-101
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    • 1994
  • A river space means the river related environments such as rIver and floodplain. Because river space data include two-dimensional and three¬dimensional characters. geographic informat ion system is an effect ive tool to manage the data. The objective of this study is to construct the pilot system called RSDB '93 and to simulate the system in practical aspects. The local area for the study was limited about 12km from Jamsil cheolgyo to Dongjak daegyo of the Han River. PC ARC/INFO was selected which can be used on PC 386DX. The Graphic data in an establ ished database contain river layer. floodplain layer. road layer. profile site and hydraulic structure site8 layer. Attributes include water prof i Ie. ut i I i ty status. ecological data. landmark data. hyd¬rology data. water quality data. aerial photo and other photos. RSDB '93 is a system presenting the potentials for the effective river space management which can be applied to all the domestic rivers.

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Surface Properties of Glutathione Layer Formed on Gold Surfaces Interacting with ZrO2 (이산화지르코늄과 상호작용하는 금 표면 위의 글루타싸이온층 표면 물성)

  • Park, Jin-Won
    • Korean Chemical Engineering Research
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    • v.52 no.4
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    • pp.538-543
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    • 2014
  • It is investigated that that the physical properties of Glutathione layer formed on gold surfaces may make an effect on the distribution of either gold particle adsorbed to the $ZrO_2$ surface or vice versa with the adjustment of the electrostatic interactions. For the investigation, the atomic force microscope (AFM) was used to measure the surface forces between the surfaces as a function of the salt concentration and pH value. The forces were quantitatively analyzed with the Derjaguin-Landau-Verwey-Overbeek (DLVO) theory to estimate the surface potential and charge density of the surfaces for each condition of salt concentration and pH value. The estimated-value dependence on the salt concentration was described with the law of mass action, and the pH dependence was explained with the ionizable groups on the surface. The salt concentration dependence of the surface properties, found from the measurement at pH 4 and 8, was consistent with the prediction from the law. It was found that the Glutathione layer had higher values for the surface charge densities and potentials than the zirconium dioxide surfaces at pH 4 and 8, which may be attributed to the ionized-functional-groups of the Glutathione layer.

A Method for Simultaneous Measurement of Air Kerma, Half Value Layer and Tube Potential in Quality Control Procedure of Diagnostic x ray units

  • Katoh, Tsuguhisa;Saitoh, Hidetoshi;Ohtani, Hiroki;Negishi, Tooru;Myojoyama, Atsushi;Ohno, Yuusuke;Sasaki, Takehito
    • Proceedings of the Korean Society of Medical Physics Conference
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    • 2002.09a
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    • pp.294-297
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    • 2002
  • For the quality control procedure of diagnostic x ray units, a method for simultaneous measurement of air kerma, half value layer and tube potential was developed utilizing a computed radiography system for intraoral radiography and film badge case. The response of average pixel values under the windows were calibrated by x rays generated at tube potentials from 40 to 140 kV with filtration from 1.5 to 3.7 mmAl. The calibration curves for half value layer and tube potential were derived as functions of attenuation factors by the 1.4 mmAl filter and the 0.2 mmCu filter. The energy dependency of the open window response was corrected by the calibration factor as a function of the attenuation factor by the 1.4 mmAl filter. The uncertainty of the estimated half value layer, tube potential and air kerma were 0.2 mmAl, 3.6 % and 5 %, respectively. It was thus suggested that this system could be applied to quality control program to detect the variation of working condition of x ray units in clinical use.

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Hybrid complementary circuits based on organic/inorganic flexible thin film transistors with PVP/Al2O3 gate dielectrics

  • Kim, D.I.;Seol, Y.G.;Lee, N.E.;Woo, C.H.;Ahn, C.H.;Ch, H.K.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.479-479
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    • 2011
  • Flexible inverters based on complementary thin-film transistor (CTFTs) are important because they have low power consumption and other advantages over single type TFT inverters. In addition, integrated CTFTs in flexible electronic circuits on low-cost, large area and mechanically flexible substrates have potentials in various applications such as radio-frequency identification tags (RFIDs), sensors, and backplanes for flexible displays. In this work, we introduce flexible complementary inverters using pentacene and amorphous indium gallium zinc oxide (IGZO) for the p-channel and n-channel, respectively. The CTFTs were fabricated on polyimide (PI) substrate. Firstly, a thin poly-4-vinyl phenol (PVP) layer was spin coated on PI substrate to make a smooth surface with rms surface roughness of 0.3 nm, which was required to grow high quality IGZO layers. Then, Ni gate electrode was deposited on the PVP layer by e-beam evaporator. 400-nm-thick PVP and 20-nm-thick ALD Al2O3 dielectric was deposited in sequence as a double gate dielectric layer for high flexibility and low leakage current. Then, IGZO and pentacene semiconductor layers were deposited by rf sputter and thermal evaporator, respectively, using shadow masks. Finally, Al and Au source/drain electrodes of 70 nm were respectively deposited on each semiconductor layer using shadow masks by thermal evaporator. Basic electrical characteristics of individual transistors and the whole CTFTs were measured by a semiconductor parameter analyzer (HP4145B, Agilent Technologies) at room temperature in the dark. Performance of those devices then was measured under static and dynamic mechanical deformation. Effects of cyclic bending were also examined. The voltage transfer characteristics (Vout- Vin) and voltage gain (-dVout/dVin) of flexible inverter circuit were analyzed and the effects of mechanical bending will be discussed in detail.

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Surface Properties of Glutathione Layer Formed on Gold Surfaces (금 표면 위에 형성된 글루타싸이온 층의 표면 물성)

  • Park, Jin-Won
    • Korean Chemical Engineering Research
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    • v.50 no.2
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    • pp.379-384
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    • 2012
  • It is investigated that that the physical properties of Glutathione layer formed on gold surfaces may make an effect on the distribution of either gold particle adsorbed to the $TiO_2$ surface or vice versa with the adjustment of the electrostatic interactions. For the investigation, the atomic force microscope (AFM) was used to measure the surface forces between the surfaces as a function of the salt concentration and pH value. With the Derjaguin-Landau-Verwey-Overbeek (DLVO) theory, the forces were quantitatively analyzed to acquire the surface potential and charge density of the surfaces for each salt concentration and each pH value. The surface potential and charge density dependence on the salt concentration was described with the law of mass action, and the pH dependence was explained with the ionizable groups on the surface. The salt concentration dependence of the surface properties, found from the measurement at pH 8 and 11, was consistent with the prediction from the law. It was found that the Glutathione layer had higher values for the surface charge densities and potentials than the titanium dioxide surfaces at pH 8 and 11, which may be attributed to the ionized-functional-groups of the Glutathione layer.