• 대한기계학회논문집A
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• 제28권12호
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• pp.1937-1941
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• 2004

We present lateral actuated piezoelectric actuator using U-shaped PZT strip and lever structure for the RF switch application. In the previous study of RF switch, they used horizontal contact switch fabricated by thin film metals. However, thin film metals could not generate large contact force due to low stiffness. In this work, we suggest lateral contact switch which makes large contact force by increasing stiffness. In addition, we use PZT actuator for the high force actuation. Generally actuator using thin film PZT moves to the vertical direction due to the neutral axis shift. Therefore we need lateral motion generation mechanism based on the thin film PZT actuator. In order to increase lateral motion of thin film PZT actuator, we use U-shaped PZT actuator using residual stress control. Also, thin film PZT actuator can generate very small lateral motion of 120${\times}$10$^{-6}$ ${\mu}{\textrm}{m}$/V for d$_{31}$ mode, thus we suggest lever structure to increase stroke amplification. From the experimental study, fabricated PZT actuator shows maximum lateral displacement of 1 ${\mu}{\textrm}{m}$, and break down voltage of the thin film PZT actuator is above 16V.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.756-759
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• 2004

We present a piezoelectric actuator using stiffness control and stroke amplification mechanism in order to make large lateral displacement. In this work, we suggest stiffness control approach that generates lateral displacement by increasing the vertical stiffness and reducing the lateral stiffness using additional structure. In addition, an additional structure of a serpentine spring amplifies the lateral displacement like leverage structure. The suggested lateral PZT actuator (bellows actuator) consists of serpentine spring and PZT/electrode layer which is located at the edge of the serpentine spring. The edge of the serpentine spring prevents the vertical motion of PZT layer, while the other edge of the serpentine spring makes stroke amplification like leverage structure. We have determined dimensions of the bellows actuator using ANSYS simulation. Length, width and thickness of PZT layer are 135$\mu$m, 20$\mu$m and 0.4$\mu$m, respectively. Dimensions of the silicon serpentine spring are thickness of 25$\mu$m, length of 300$\mu$m, and width of 5$\mu$m. The bellows actuator has been fabricated by SOI wafer with 25$\mu$m-top silicon and 1$\mu$m-buried oxide layer. The bellows actuator shows the maximum 3.93$\pm$0.2$\mu$m lateral displacement at 16V with 1Hz sinusoidal voltage input. In the frequency response test, the fabricated bellows actuator showed consistent displacement from 1Hz to 1kHz at 10V. From experimental study, we found the bellows actuator using thin film PZT and silicon serpentine spring generated mainly laterally displacement not vertical displacement at 16V, and serpentine spring played role of stroke amplification.

• Design & Manufacturing
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• 제14권3호
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• pp.23-30
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• 2020

Laser Assisted Thermo-Compression Bonding (LATCB) has been proposed to improve the "chip tilt due to the difference in solder bump height" that occurs during the conventional semiconductor chip bonding process. The bonding module of the LATCB system has used a piezoelectric actuator to control the inclination of the compression jig on a micro scale, and the piezoelectric actuator has been directly coupled to the compression jig to minimize the assembly tolerance of the compression jig. However, this structure generates a lateral force in the piezoelectric actuator when the compression jig is tilted, and the stacked piezoelectric element vulnerable to the lateral force has a risk of failure. In this paper, the optimal design of the flexure hinge was performed to minimize the lateral force generated in the piezoelectric actuator when the compression jig is tilted by using the displacement difference of the piezoelectric actuator in the bonding module for LATCB. The design variables of the flexure hinge were defined as the hinge height, the minimum diameter, and the notch radius. And the effect of the change of each variable on the stress generated in the flexible hinge and the lateral force acting on the piezoelectric actuator was analyzed. Also, optimization was carried out using commercial structural analysis software. As a result, when the displacement difference between the piezoelectric actuators is the maximum (90um), the maximum stress generated in the flexible hinge is 11.5% of the elastic limit of the hinge material, and the lateral force acting on the piezoelectric actuator is less than 1N.

• Computational Structural Engineering : An International Journal
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• 제1권2호
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• pp.89-96
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• 2001

A study on the topology optimization of a Hard-Disk-Driver(HDD) actuator arm is presented. The purpose of the present wert is to increase the natural frequency of tole first lateral mode of the HDD actuator arm under the constraint of total moment of inertia, so as to facilitate the position control of the high speed actuator arm. The first lateral mode is an important factor in the position control process. Thus the topology optimization for 2-D model of the HDD actuator arm is considered. A new objective function corresponding to multieigenvalue optimization is suggested to improve the solution of the eigenvalue optimization problem. The material density of the structure is treated as the design variable and the intermediate density is penalized. The effects of different element types and material property functions on the final topology are studied. When the problem is discretized using 8-node element of a uniform density, tole smoothly-varying density field is obtained without checker-board patterns incurred. AS a result of 7he study, an improved design of the HDD actuator arm is suggested. Dynamic characteristics of the suggested design are compared computationally with those of the old design. With the same amount of the moment of inertia, the natural frequency of the first lateral mode of the suggested design is subsequently increased over the existing one.

• 대한기계학회논문집A
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• 제24권7호
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• pp.1801-1809
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• 2000

A study on the topology optimization of Hard-Disk-Driver(HDD) actuator arm in free vibration is presented. The purpose of this research is to increasse the natural frequency of the first lateral mode of the HDD actuator arm under the constraint of total moment of inertia, so as to facilitate the position control of high speed actuator am. The first lateral mode is an important factor in the position control process. Thus the topology optimization for 2-D model of the HDD actuator arm is considered. A new objective function corresponding to multieigenvalue optimization is suggested to improve the solution of the eigenvalue optimization problem. The material density of the structure is treated as the design variable and the intermediate density is penalized. The effects of different element types and material property functions on the final topology are studied. When the problem is discretized using 8-node element of a uniform density, the smoothly-varying density field is obtained without checker-board patterns incurred. As a result of the study an improved design of the HDD actuator arm is suggested. Dynamic characteristics of the suggested design are compared computationally with those of the old design. With the same amount of the moment of inertia, the natural frequency of the first lateral mode or the suggested design is subsequently increased over the existing one.

• Wind and Structures
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• 제15권3호
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• pp.263-283
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• 2012

This paper presents a framework of nonlinear dynamic analysis of a low-speed moving maglev (magnetically levitated) vehicle subjected to cross winds and controlled using a clipped-LQR actuator with time delay compensation. A four degrees-of-freedom (4-DOFs) maglev-vehicle equipped with an onboard PID (Proportional-Integral-Derivative) controller traveling over guideway girders was developed to regulate the electric current and control voltage. With this maglev-vehicle/guideway model, dynamic interaction analysis of a low-speed maglev vehicle with guideway girders was conducted using an iterative approach. Considering the time-delay issue of unsynchronized tuning forces in control process, a clipped-LQR actuator with time-delay compensation is developed to improve control effectiveness of lateral vibration of the running maglev vehicle in cross winds. Numerical simulations demonstrate that although the lateral response of the maglev vehicle moving in cross winds would be amplified significantly, the present clipped-LQR controller exhibits its control performance in suppressing the lateral vibration of the vehicle.

• 대한기계학회논문집A
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• 제38권5호
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• pp.551-557
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• 2014

본 논문은 작업 시 농업용 트랙터의 운전지원을 위한 강인한 횡방향 제어기를 제안하고자 한다. 자동차와 달리 트랙터의 조향 방식은 유압실린더를 이용함으로써 상대적으로 큰 시간지연을 가지고 있으며 작업 시 지면 환경도 일반 도로와는 다르다. 조향 액추에이터 모델을 포함하는 기구학적 트랙터 모델을 기반으로 동적 표면 제어라는 비선형 제어기법을 적용하여 조향 액추에이터의 시간지연 및 노면 경사의 변화에 강인한 횡방향 제어기를 설계한다. 마지막으로 상용 트랙터 시뮬레이터를 이용하여 마찰 계수가 일정한 주어진 노면 상태에서 조향 액추에이터의 시간 지연 변경이나 오르막 또는 내리막과 같은 지형 조건 변화에 대한 횡방향 제어기의 성능 및 강인성을 검증한다.

• 항공우주시스템공학회지
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• 제15권6호
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• pp.1-9
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• 2021

In this study, a new design of an extension-type actuator (ExACT) is proposed based on a chevron structure with displacement amplification mechanisms by local heating. ExACT comprises diamond-shaped displacement amplification structures (DASs) containing axially oriented V-shaped chevron beams, a support bar that restricts lateral heat deformation, and a loading slot for thin-film heaters. On heating the thin film heater, the diamond-shaped DASs undergo thermal expansion. However, lateral expansion is restricted by the support bar, leading to displacement amplification in the axial direction. The performance parameters of ExACT such as temperature distribution and extended displacement is calculated using thermo-mechanical analysis methods with the finite element method (FEM) tool. Subsequently, the ExACTs are fabricated using a polymer-based 3D printer capable of reproducing complex structures, and the performance of ExACTs is evaluated under various temperature conditions. Finally, the performance evaluation results were compared with those of the FEM analysis.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.195-196
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• 2005

We report the new design of a miniature electromagnetic actuator for probe-based data storage with anti-vibration mechanism. The actuator consists of a media substrate, silicon frame, 2 pairs of magnets, a spacer, and a printed circuit board (PCB). The total area of the device is $11.2{\times}11.2 mm^2$ while the data recording area is $7.4{\times}7.4 mm^2$. A net momentum fee structure was included for high vibration resistance. The simulation shows that the lateral vibration can be reduced to below 100 nm for 1 G acceleration if the counter mass is adjusted with $1\%$ difference. The peak power for ${\pm}50 {\mu}m$ displacement is below 50 mW for a actuator with a resonance at 200 Hz.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.132-139
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• 2000

This paper reports a novel micromachining process based on UV-LIGA process and (110) silicon anisotropic etching for fabrication of a high-aspect-ratio comb actuator. The comb electrodes are fabricated by (110) SILICON comb structure considering the etch-rate-ratio between (110) and (111) planes and lateral etch rate of a beam-type structure. The fabricated structure was$ 400\mum \; thick\; and\; 18\mum$ wide comb electrodes separated by $7\mim$ so that the height-gap ratio was about 57. Also considering resonant frequency of the comb actuator and the frequency-matching between sensing and driving mode for gyroscope application, we designed the number, width, height and length of the spring structures. Electroplated gold springs on both sides of the seismic mass were $15\mum\; wide,\; 14\mum\; thick\; and \; 500\mum$ long. The fabricated comb actuator had resonant frequency ay 1430Hz, which was calculated to be 1441Hz. The proposed fabrication process can be applicable to the fabrication of a high-aspect-ratio comb actuator for a large displacement actuator and precision sensors. Moreover, this combined process enables to fabricate a more complex structure which cannot be fabricate only by surface or bulk micromachining.