• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.665-666
• /
• 2006

In precision laser microfabrication, focusing is essential to acquire good machining precision and uniform machining quality. If it does not perform, laser machining cannot be realized. So, confocal scanning method with high depth resolution is used for focus detection technique. This paper is concerned with a procedure for design, analysis and performance test of an autofocus fine actuating stage, which is composed of flexure-hinge type lever mechanism and piezoelectric actuator. Through series of analytical design, the stage is simplified as a rigid bodies(lever and main body) and springs(flexure hinges). The simplified model was applied to determine the dimension of flexure hinges and lever. After structural analysis confirmed design requirement, an actual stage was made and verified through an experiment on the static and dynamic characteristics(maximum stroke and 1st natural frequency). The fabricated stage was satisfied with the design requirement.

• 한국정밀공학회지
• /
• 제19권9호
• /
• pp.34-40
• /
• 2002

Machining accuracy is affected by quasi-static errors of machining center. Since machine errors have a direct influence upon both the surface finish and geometric shape of the finished workpiece, it is very important to measure the machine errors and to compensate these errors. The laser measurement method for identifying geometric errors of machine tool has the disadvantages such as high cost, long calibration time and usage of volumetric error synthesis model. Accordingly, this paper deals with analysis of the geometric errors of a machine tool using ball bar test without using complicated error synthesis model. Statistical analysis method was adopted in this paper for deriving geometric errors using hemispherical helix ball bar test. As a result of experiment, geometric errors of the vertical machining center are compensated by 88%.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 춘계학술대회 논문집
• /
• pp.409-412
• /
• 2002

This paper presents a measurement method to compromise surface error in surface machining processes. In order to compromise the surface error in machining process, on-machine measurement is essential. There are two kinds of on-machine measurement methods available to measure the surface errors in flat workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are inevitably engaged in both methods. This paper proposes a new idea to measure the surface error for error compensation. The measurement system consists of a laser, a CCD camera and processing system, a carrier system with a stylus, and some optical units. The experimental results show that the proposed method is useful to compensate the surface errors of machined workpieces.

• 한국기계가공학회지
• /
• 제10권5호
• /
• pp.26-30
• /
• 2011

Currently, many researches are carried out about tilting index table, which is one of the main component of 5-axis machine tool. The performance of the tilting index table is associated the rotational accuracy which is very important factor for high precision machining because it have an effect on machining error. In this paper, a tilting index table is developed, and the rotational accuracy of the tilting index table using a laser measurement equipment is measured. In addition, a correction value is obtained from the measured value through compensation, and the correction value is used to improve the accuracy of the table. Comparative analysis is carried out for the accuracy of the table before and after compensation. This paper can be used by a reference for performance and reliability advancement of tilting index table.

• 한국정밀공학회지
• /
• 제27권10호
• /
• pp.29-33
• /
• 2010

UV laser micromachining of metallic materials has been used in microelectronic and other industries. This paper shows on experimental investigation of micromachining of copper using a 355nm UV laser with 50ns pulse duration. A finite element model with high strain rate effect is especially suggested to investigate the phenomena which are only dominated by mechanically pressure impact in disregard of thermally heat transfer. In order to consider the strain rate effect, Cowper-Symonds model was used. To analyze the dynamic deformation during a very short processing time, which is nearly about several tens nanoseconds, a commercial Finite Element Analysis (FEA) code, LS-DYNA 3D, was employed for the computational simulation of the UV laser micro machining behavior for thin copper material. From these computational results, depth of the dent (from one to six pulsed) were observed and compared with previous experimental results. This will help us to understand interaction between UV laser beam and material.

• 한국정밀공학회지
• /
• 제31권3호
• /
• pp.181-187
• /
• 2014

Micro patterns are used to maximize the performance and efficiency of the product in many industries such as energy, display, printing, biology, etc. Nowadays, the fabrication technology for micro patterns has been developed in various ways such as photolithography, laser machining, electrical discharge machining and mechanical machining. Recently, mechanical machining the size of smaller than 1 micrometer could be tried, because the technology related to the machining was developed brilliantly. This paper shows the experiments using cutting processes in order to fabricate the micro pattern. Micro patterns of the size of several micrometers were machined by the diamond tools of two different shape, the deformation and generation of burr were investigated.

• 한국정밀공학회지
• /
• 제25권1호
• /
• pp.138-144
• /
• 2008

Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (${\mu}-AJM$) has become a useful technique for micro-machining of such materials. The ${\mu}-AJM$ process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the ${\mu}-AJM$ process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the ${\mu}-AJM$. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully.

• 한국레이저가공학회지
• /
• 제6권1호
• /
• pp.9-16
• /
• 2003

Micromachining using the DPSS 3rd Harmonic Laser (355nm) has outstanding advantages as a UV source in comparison with Excimer lasers in various aspects such as maintenance cost, maskless machining, high repetition rate and so on. It also has the greater absorptivity of many materials in contrast to other IR sources. In this paper, the process for micro-drilling of blind hole in Cu/PI/Cu substrate with the DPSS UV laser and the scanning device is investigated by the experimental methods. It is known that there is a large gap between the ablation threshold of copper and that of PI. We use the Archimedes spiral path for the blind hole with different energy densities to ablate the different material. Finally, the blind via hole of diameter 100$\mu\textrm{m}$ and 50$\mu\textrm{m}$ was drilled.

• 한국기계가공학회지
• /
• 제11권1호
• /
• pp.33-38
• /
• 2012

An experimental study was carried out to observe the characteristics of impingement of assist gas from a rectangular supersonic nozzle on kerf surface in laser machining. A micro-scale supersonic (Mach number 2.0) rectangular nozzle system was designed and fabricated for the purposes, and hot tests of the performance of the nozzle system was proceeded in the ITI corporation laboratory. For various related parameters such as laser powers, nozzle pressures and cutting speeds, the quality of the frontal view of cut edge surfaces was observed by a microscope. In the study, it was shown that the application of the present micro-rectangular supersonic nozzle in an off-axis configuration made it possible to cut a mild steel, by combinations of relatively low laser - powers, large standoff distances, and assist gas with no oxygen, which was not achieved by conventional laser cutting processes.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.616-619
• /
• 2003

Photochemical and photothermal effects have correlation with each other and depend on laser wavelength. Multi-scanning laser ablation process of polymer with DPSS(Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser with wavelength of 355nm is applied to fabricate three-dimensional micro shape. The DPSSL photomachining system can rapidly and cheaply fabricate 2D pattern or 3D shape with high efficiency because we only use CAD/CAM software and precision stages instead of complex projection mask. Photomachinability of polymer is highly influenced by laser wavelength and its own chemical structure. So the optical characteristics of polymers for 355nm laser source is investigated by experimentally and theoretically.