• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.19 no.4
• /
• pp.386-390
• /
• 2006

Global consumption of aspheric lens will expand rapidly due to golbal transformation of the electronics based industry to optics based mechatronics. Especially, F-Theta lens is one of important parts in Laser Scanning Unit(LSU) because it affects the optical performance of LSU dominantly. Non axisymmetric machine based processing techologies are required to obtain high accuracy in utlra-precision aspheric core, the most important component in plastic injection molded F-Theta lens assembly. In this study, the core with non-axisymmetric aspheric shape which is used to emit the F-Theta lens was processed using the ultra precision processing technology and the shape accuracy of the core was measured. And the results there of were evaluated and compared with the emitted shape accuracy of F-Theta lens.

• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
• /
• 2010.04a
• /
• pp.245-247
• /
• 2010

This research presents both system structure analysis to improve performance of 3D laser scanner, which has time of flight method, and scheme to minimize distance measurement errors during signal process. With the help of reference source, we minimized the instability of electronic signal processing time and possibility of distance measurement errors. Furthermore, it helps easy alignment and accuracy of system by using fiber delay line and coupler.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.10 no.5
• /
• pp.26-30
• /
• 2011

Currently, many researches are carried out about tilting index table, which is one of the main component of 5-axis machine tool. The performance of the tilting index table is associated the rotational accuracy which is very important factor for high precision machining because it have an effect on machining error. In this paper, a tilting index table is developed, and the rotational accuracy of the tilting index table using a laser measurement equipment is measured. In addition, a correction value is obtained from the measured value through compensation, and the correction value is used to improve the accuracy of the table. Comparative analysis is carried out for the accuracy of the table before and after compensation. This paper can be used by a reference for performance and reliability advancement of tilting index table.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.378-391
• /
• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• Proceedings of the KIEE Conference
• /
• 2006.10c
• /
• pp.597-599
• /
• 2006

In this paper, we propose an artificial intelligence method to compensate the nonlinearity error which occurs in the heterodyne laser interferometer. Some superior properties such as long measurement range, ultra-precise resolution and various system set-up lead the laser interferometer to be a practical displacement measurement apparatus in various industry and research area. In ultra-precise measurement such as nanometer or subnanometer scale, however, the accuracy is limited by the nonlinearity error caused by the optical parts. The feedforward neural network trained by back-propagation with a capacitive sensor as a reference signal minimizes the nonlinearity error and we demonstrate the effectiveness of our proppsed algorithm through some experimental results.

• International Journal of Precision Engineering and Manufacturing
• /
• v.9 no.4
• /
• pp.26-31
• /
• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• Proceedings of the KIEE Conference
• /
• 2007.10a
• /
• pp.225-226
• /
• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted environmental error which is caused from refraction in the air. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on Data Fusion method which reduces the environmental error in the heterodyne laser interferometer. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• Current Optics and Photonics
• /
• v.6 no.5
• /
• pp.473-478
• /
• 2022

To overcome the capture-range problem in phase-diversity phase retrieval (PDPR), a geometrical-optics initial-estimate method is proposed to avoid a local minimum and to improve the accuracy of laser-wavefront measurement. We calculate the low-order aberrations through the geometrical-optics model, which is based on the two spot images in the propagation path of the laser, and provide it as a starting guess for the PDPR algorithm. Simulations show that this improves the accuracy of wavefront recovery by 62.17% compared to other initial values, and the iteration time with our method is reduced by 28.96%. That is, this approach can solve the capture-range problem.

• Analytical Science and Technology
• /
• v.37 no.1
• /
• pp.12-24
• /
• 2024

In this study, laser-induced breakdown spectroscopy (LIBS) was used to estimate the degree of rice polishing. As-threshed rice seeds were dehusked and polished for different times, and the resulting grains were analyzed using LIBS. Various atomic, ionic, and molecular emissions were identified in the LIBS spectra. Their correlation with the amount of polished-off matter was investigated. Na I and Rb I emission line intensities showed linear sensitivity in the widest range of polished-off-matter amount. Thus, univariate models based on those lines were developed to predict the weight percent of polished-off matter and showed 3-5 % accuracy performances. Partial least squares-regression (PLS-R) was also applied to develop a multivariate model using Si I, Mg I, Ca I, Na I, K I, and Rb I emission lines. It outperformed the univariate models in prediction accuracy (2 %). Our results suggest that LIBS can be a reliable tool for authenticating the degree of rice polishing, which is closed related to nutrition, shelf life, appearance, and commercial value of rice products.

• Proceedings of the IEEK Conference
• /
• 2009.05a
• /
• pp.310-312
• /
• 2009

The heterodyne laser interferometer has been widely used in precise measurement field. However, the accuracy is limited by the nonlinearity error caused from incomplete laser sources and nonideal optical components. In this paper, we propose the Dual-EKF which estimates states and weights simultaneously to improve the resolution of heterodyne laser interferometer. As a proof, we demonstrate the effectiveness of our proposed method through experimental results.