Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Nonlinearity error compensation in heterodyne laser interferometer using Dual-EKF

Dual-EKF를 이용한 헤테로다인 레이저 간섭계의 비선형 오차보정

  • 이상철 (성균관대학 전자전기학과) ;
  • 이우람 (성균관대학 전자전기학과) ;
  • 유관호 (성균관대학 전자전기학과)
  • Published : 2009.05.07
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Abstract

The heterodyne laser interferometer has been widely used in precise measurement field. However, the accuracy is limited by the nonlinearity error caused from incomplete laser sources and nonideal optical components. In this paper, we propose the Dual-EKF which estimates states and weights simultaneously to improve the resolution of heterodyne laser interferometer. As a proof, we demonstrate the effectiveness of our proposed method through experimental results.

Keywords