• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.7
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• pp.557-563
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• 2003

SiC has been an useful material for the high voltage, high temperature, and high frequency devices, however, the required high process temperature to activate the implanted p-type dopants has hindered further developments. In this study, we report, for the first time, on the laser activation of implanted Al and non-alloyed Mo ohmic contacts and its application to MOSFET fabrication. The contact and sheet resistance measured from CTLM patterns have decreased by increasing laser power, and the lowest values are 3.9 $K\Omega$/$\square$ and 1.3 $\times$ 10$^{-3}$ $\Omega$-cm$^2$, respectively, at the power density of 1.45 J/cm$^2$ The n-MOSFETs fabricated on laser activated p-well exhibit well-behaved I-V characteristics and threshold voltage reduction by reverse body voltage. These results prove that the laser process for implant activation is an alternative low temperature technology applicable to SiC devices.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.11a
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• pp.41-45
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber we 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• Proceedings of the Korean Society of Laser Processing Conference
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• 1999.05a
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• pp.29-32
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• 1999

The material properties of laser welding zone such as strength coefficient, work-hardening exponent, and plastic anisotropic ratio are analytically obtained from those of base metals based on the tensile tests. . The finite element formulation is developed for predicting strain distributions and weld line movements in the forming processes of laser welded blank. The welding zone(WZ) is modelled with the several, narrow finite elements whose material characteristics are based on the experimental results and the analytical equations. In order to show an application of the developed weld element the stamping process of auto-body door inner panel is simulated. FEM predictions are compared and showed good agreements with experimental observations.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.129-132
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• 1996

Surface modification like cone formation on Pulsed laser deposition (PLD) occurs in YBCO target surface irradiated by laser beam. Cone formation results in a reduction of deposition rate, so that it is significant obstacles to an efficient deposition process. With the change of various conditions such as the number of laser shot, target density, direction of incoming laser beam, we have systematically analyzed the modification of target surface. Because cones formed by beam-target interactions grow in direction of incoming laser beam, we have used the method of rotating the target position by 180$^{\circ}$ with the same number and position of laser shot. Experimental results of losing the directionality and changing the shape of cones formed on laser irradiated YBCO target surface is obtained by the SEM image. Also, we have observed that the size of cones formed on target by pulsed laser became larger with increasing the number of laser shots.

• Journal of Korea Foundry Society
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• v.39 no.6
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• pp.110-115
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• 2019

Recently, various studies have been conducted on additive manufacturing technology developed using metal materials. In this study, a numerical analysis was introduced to analyze the effects of the thermal deformation and residual stress which arise during the SLM (selective laser melting) manufacturing process. A phase-transformation mechanism is implemented with the use of the Ti-6Al-4V material, in which a solid-state phase transformation (SSPT) can be induced during a numerical analysis. In this case, the phase of the Ti-6Al-4V material changes from a powder to a solid state and then to the Martensite phase in sequence during heating and cooling steps. The numerical analysis during the SLM process was verified by comparing the results of tensile tests with those from the numerical analysis based on the SSPT material properties.

• Laser Solutions
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• v.8 no.2
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• pp.21-32
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• 2005

The excimer laser ablation of a polymer occurs by the excitation of chemical bonds to energy levels that are above the dissociation energy. In this process, however, fragmented debris is finally ejected explosively by the scission of bonds and accumulates on the material surface. In the present work, a process for eliminating surface debris contamination generated by the laser ablation of a polymer is developed. The proposed approach for removing surface debris utilizes an erasable ink pasted on a polymide. The ink pasted polyimide is ablated by KrF excimer laser. The surface debris ejected from the polyimide is then combined with the ink layer on the polymer. Finally, both the surface debris and the ink layer are removed using adhesive tape or alcohol solvent. The results suggest that the erasable ink method is a simple, low cost, and extremely effective debris eliminating process.

• Journal of Advanced Marine Engineering and Technology
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• v.34 no.7
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• pp.963-970
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• 2010

This study makes an estimate of the laser-assisted machining (LAM) of an economically viable process for manufacturing precision silicon nitride ceramic parts using a high-power diode laser (HPDL). The surface is locally heated by an intense laser source prior to material removal, and the resulting softening and damage of the workpiece surface simplify the machining of the ceramics. The most important advantage of LAM is its ability to produce much better workpiece surface quality compared to conventional machining. Also important are its larger material removal rates and longer tool life. The cutting force and surface temperature were measured on-line using a pyrometer and a dynamometer, respectively. Tool wear, chips and the surface of the workpiece were measured using optical microscopy, and the surface and fractured cross-section of $Si_3N_4$ were measured by SEM. During the LAM process, the cutting force and tool wear were reduced and oxidation of the machined surface was increased according to the increase in the laser power. Moreover, the more the feed rate increased, the more the cutting force and tool wear increased.

• Transactions of the Korean Society of Automotive Engineers
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• v.17 no.3
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• pp.35-44
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• 2009

The purpose of this paper is to describe experimental results about the T-joint welding of the high power continuous wave (CW) fiber laser for SAPH steel plate for seat frame of car. The seat rail is a part of seat frame of cars. The assembling method is mostly fix up using a bolt and nut. But this assembling method has many demerits in productivity such as increasing work process and material cost. This paper presents an experimental study about Laser T-Joint weldability of seat rail. Laser welding has many advantages in lightness and saving material costs of seat frame. The laser beam was moved along the work pieces by six axis robot with process optical fiber. The laser beam is focused with a welding head within incident angle $15{\sim}45^{\circ}$ for the purpose of the T-joint welding through two side full penetration. The range of the root gap size is less than ${\leq}0.4mm$. Optical microscopy SEM were performed to observe the micro structures and determine the structures of welded zone.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.6
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• pp.370-375
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• 2016

In this paper, we investigated the electrical properties of crystalline silicon solar cell fabricated with Ni/Cu/Ag plating. The laser process was used to ablate silicon nitride layer as well as to form the selective emitter. Phosphoric acid layer was spin-coated to prevent damage caused by laser and formed selective emitter during laser process. As a result, the contact resistance was decreased by lower sheet resistance in electrode region. Low sheet resistance was obtained by increasing laser current, but efficiency and open circuit voltage were decreased by damage on the wafer surface. KOH treatment was used to remove the laser damage on the silicon surface prior to metalization of the front electrode by Ni/Cu/Ag plating. Ni and Cu were plated for each 4 minutes and 16 minutes and very thin layer of Ag with $1{\mu}m$ thickness was plated onto Ni/Cu electrode for 30 seconds to prevent oxidation of the electrode. The silicon solar cells with KOH treatment showed the 0.2% improved efficiency compared to those without treatment.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.1
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• pp.8-14
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• 2022

A computer simulation was performed to investigate the heat source distribution and temperature distribution of a laser having multiple characteristics. To simulate the actual size of a welding specimen, the temperature distributions at 0 s, 1 s, and 2 s were analyzed by increasing the domain size to 50 mm in length and 25 mm in width in a material of the same thickness. As indicated by the results, because of the characteristics of metals with high thermal conductivity, the temperature at the welding center line and the temperature distribution at the offset position were not significant. When the core part was cooled by irradiating with a laser, it cooled at a rate of up to 500 ℃/s. In contrast, when the laser was irradiated to the ring part, the cooling proceeded at a rate of over 1800 ℃/s. Comparing the relative numerical values rather than the absolute values, it was found that the cooling rate was approximately 3.6 times faster when the laser was irradiated through the ring than when the laser was irradiated through the core. As a result of irradiating with the same heat source (at 100 W) into the core, ring, and ring + core, it was confirmed that the highest temperature was irradiated to the ring part and the lowest temperature was irradiated to the core part.