• Particle and aerosol research
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• v.12 no.3
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• pp.57-63
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• 2016

The laser-induced breakdown spectroscopy (LIBS) has been used for rapid detection of elemental compositions of various materials in multi-media (solid, liquid, gas, and aerosols). In this study, the aerosol-LIBS has been developed for real-time monitoring of process-induced particles produced during the semiconductor manufacturing. The developed aerosol-LIBS mainly consists of laser, optics, spectrometer, and aerosol chamber. A new aerosol chamber was constructed for the aerosol-LIBS to be applied for various semiconductor manufacturing process, including exhaust tubes, and low pressure and high temperature chamber. The aerosol-LIBS was evaluated by using laboratory generated aerosols for detection of various elements. As a result, P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is being conducted.

• Laser Solutions
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• v.17 no.4
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• pp.7-13
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• 2014

In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2004.06a
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• pp.137-146
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• 2004

Laser Induced Breakdown Spectroscopy(LIBS) system is being developed as an in-situ analysis system for the radioactive waste glass in the cold crucible melter. In order to complete the LIBS system, a spectrometer, a detector, and a laser were structured. An ESA 3000 (LLA Instruments GmbH, Germany) including a calibrated Kodak KAF-1001 CCD detector was selected as the spectrometer. A Q-switched Nd-YAG Brilliant(Quantel, France) laser was selected as an energy source. As the first research stage, the excitation temperatures of Fe(I) as a function of the detector's delay intervals(500, 1000, 1500, 2000ns) were evaluated using the Einstein-Boltzmann equation. The optimized excitation temperature of Fe (I) was 7820k at the delay time of 1500㎱ using the 532nm Nd-YAG laser pulse. This LIBS system will be optimized under the real environment vitrification facility in the near future and then used to be in-situ analyzed the glass compositions in the melter qualitatively.

• Journal of the Korean Institute of Intelligent Systems
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• v.26 no.6
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• pp.477-484
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• 2016

Small industrial appliances such as fan, audio, electric rice cooker mostly consist of ABS, PP, PS materials. In colored plastics, it is possible to classify by near infrared(NIR) spectroscopy, while in black plastics, it is very difficult to classify black plastic because of the characteristic of black material that absorbs the light. So the RBFNNs pattern classifier is introduced for sorting electrical and electronic waste plastics through LIBS(Laser Induced Breakdown Spectroscopy) spectrometer. At the preprocessing part, PCA(Principle Component Analysis), as a kind of dimension reduction algorithms, is used to improve processing speed as well as to extract the effective data characteristics. In the condition part, FCM(Fuzzy C-Means) clustering is exploited. In the conclusion part, the coefficients of linear function of being polynomial type are used as connection weights. PSO and 5-fold cross validation are used to improve the reliability of performance as well as to enhance classification rate. The performance of the proposed classifier is described based on both optimization and no optimization.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.12
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• pp.1013-1020
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• 2020

Spark-induced breakdown spectroscopy (SIBS) utilizes an electric spark to induce a strong plasma for collecting atomic emissions. This study analyses the potential for usinga compact SIBS instead of conventional laser-induced breakdown spectroscopy (LIBS) in discriminating rocks and soils for planetary missions. Targeting bulky solids using SIBS has not been successful in the past, and therefore a series of optimizations of electrode positioning and electrode materials were performed in this work. The limit of detection (LOD) was enhanced up to four times compared to when LIBS was used, showing a change from 78 to 20 ppm from LIBS to SIBS. Because of the higher energy of plasma generated, the signal intensity by SIBS was higher than LIBS in three orders of magnitude with the same spectrometer setup. Changing the electrode material and locating the optimum position of the electrodes were considered for optimizing the current SIBS setup being tested for samples of planetary origin.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.608-611
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• 2011

Laser-induced combustions and explosions generated by high laser irradiances were explored by Laser-Induced Breakdown Spectroscopy (LIBS) in rich, and stoichiometric conditions. The laser used for target ablation is a Q-switched Nd:YAG laser with 7 ns pulse duration at wavelength of 1064 nm laser energies from 40 mJ to 2500 mJ ($6.88{\times}10^{10}-6.53{\times}10^{11}\;W/cm^2$). The plasma light source from aluminum detected by the echelle grating spectrometer and coupled to the gated ICCD(a resolution (${\lambda}/{\Delta}{\lambda}$) of 5000). This spectroscopic study has been investigated for obtaining both the atomic signals of aluminum (fuel) - oxygen (oxidizer) and the calculated ambient condition (plasma temperature and electron density). The essence of the paper is observing specific electron density ratio which can support the processes of combustion and explosion between ablated aluminum plume and oxygen from air by inducing high power laser.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.9
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• pp.789-795
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• 2016

Laser-induced combustions and explosions generated by high laser irradiances were explored by Laser-Induced Breakdown Spectroscopy (LIBS). The laser used for target ablation is a Q-switched Nd:YAG laser with 7 ns pulse duration at wavelength of 1064 nm laser energies from 40 mJ to 2500 mJ ($6.88{\times}10^{10}-6.53{\times}10^{11}W/cm^2$). The plasma light source from aluminum detected by the echelle grating spectrometer and coupled to the gated ICCD(a resolution (${\lambda}/{\Delta}{\lambda}$) of 5000). This spectroscopic study has been investigated for obtaining both the atomic/molecular signals of aluminum-oxygen and the calculated ambient condition such as plasma temperature and electron density. The essence of the paper is observing specific electron density ratio which can support the processes of chemical reaction and combustion between ablated aluminum plume and oxygen from air by inducing high laser energy.