• Title/Summary/Keyword: Ionization Coefficient

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A Study on Evaluation of Accuracy and Precision on B, T, X Analysis Using Thermal Desorption/Gas Chromatograph/Flams Ionization Detector (열탈착/GC/FID를 이용한 B, T, X 분석의 정확도 및 정밀도 평가)

  • 박정근;유기호
    • Journal of Korean Society for Atmospheric Environment
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    • v.16 no.3
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    • pp.265-275
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    • 2000
  • By using thermal desorption/gas chromatograph/flame ionization detector(TD/GC/FID), this study was carried out to evalute an accuracy and a precision on Benzene(B), Toluene(T), o-Xylene(X) analysis in an industrial hygiene laboratory. Limits of detection of TD/GC/FID on B, T, X were showed 13.75ng/sample or less. For the accuracy of the method by concentration levels, overall bias was showed 7.7% as an absolute value, and the pooled coefficient of variation showed 3.51%. For the precision on repeatability of peak area and retention time between within-run and between-run of analytical system, it is showed the results of within-run gave better than those of between-run. Also the accuracy by sorbents(Tenax TA and Chromosorb 106)was evaluated, and the precision on reproducibility between MDHS72 and this study was compared. It is showed it is possible for TD/GC/FID to evaluate accurately B, T, X concentration levels of less than 1ppm at indoor or outdoor of workplaces in Korea.

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The Breakdown Phenomena of N2 gas by RF Electric Field (라디오 주파수전계에 의한 질소가스의 브레이크 다운 현상)

  • 황기웅;노영수
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.35 no.5
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    • pp.199-204
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    • 1986
  • The breakdown phenomena of N2 gas by 13.56MHz electric field are very different from those under steady field. In this paper we analyzed the breakdown phenomena by using electron distribution function and diffusion equation. The second-order differential equation derived from the Boltzmann equation is solved for the electron distribution function. The ionization rate and diffusion coefficient are calculated using kinetic theory formulas. The breakdown condition is that the number of electrons produced by ionization equal the number diffusing to the walls of the discharge chamber. Theses theoretical breakdown electric fields are calculated by the computer and compared with the experimental values.

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Analytical Model of Breakdown Voltages for 6H-SiC $p^{+}n$ Junction (6H-SiC $p^{+}n$ 접합의 항복 전압을 위한 해석적 모형)

  • Jeong, Yong-Seong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.6
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    • pp.398-403
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    • 2001
  • In this paper, effective ionization coefficient for 6H-SiC is determined. Analytical formulas for the parallel plane breakdown voltage of the 6H-SiC p+n junction are derived by employing the ionization coefficients. The analytical breakdown voltages show good agreement with the numerical results of Dmitriev's[3]and the experimental results of Cree Research[9]over the doping range from 10$^{15}$ cm$^{-3}$ to 10$^{18}$ cm$^{-3}$.

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Analysis of Electron Transport Coefficients in Binary Mixtures of TEOS Gas with Kr, Xe, He and Ne Gases for Using in Plasma Assisted Thin-film Deposition

  • Tuan, Do Anh
    • Journal of Electrical Engineering and Technology
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    • v.11 no.2
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    • pp.455-462
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    • 2016
  • The electron transport coefficients in not only pure atoms and molecules but also in the binary gas mixtures are necessary, especially on understanding quantitatively plasma phenomena and ionized gases. Electron transport coefficients (electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient) in binary mixtures of TEOS gas with buffer gases such as Kr, Xe, He, and Ne gases, therefore, was analyzed and calculated by a two-term approximation of the Boltzmann equation in the E/N range (ratio of the electric field E to the neutral number density N) of 0.1 - 1000 Td (1 Td = 10−17 V.cm2). These binary gas mixtures can be considered to use as the silicon sources in many industrial applications depending on mixture ratio and particular application of gas, especially on plasma assisted thin-film deposition.

A Study on Characteristics of The $CF_3I$-Xe Mixtures gases in a Plasma Discharge Simulation (플라즈마 방전 시뮬레이션에 의한 $CF_3I$-Xe 혼합 가스에서의 물성 특성 연구)

  • Shim, Eung-Won;Tuan, Do Anh;Jeon, Byung-Hoon
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1582-1583
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    • 2011
  • Recently, it has been found that trifluoroiodomethane ( $CF_3I$) gas can replace $SF_6$ gas as a prospective substitute gas. For quantitative understanding of gas discharge phenomena, we should know electron collision cross sections and electron transport coefficients. Using electron collision cross sections of $CF_3I$ and Xe, we calculated elecron drift velocity, longitudinal coefficient, effective ionization coefficient in $CF_3I$-Xe mixtures using a two-term approximation of the Boltzmann equation. We also compared the electron transport coefficients in pure gas and those of 10%, 20%, 50%, and 70% $CF_3I$-Xe mixture gases. The present data may be showed appropriate ratios of $CF_3I$-Xe mixture gas for replacing the $SF_6$ gas.

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Determination of the initial cross-sections for the $C_4F_6$ molecule from the electron drift velocity ($C_4F_6$-Ar혼합기체에서의 Plasma Discharge Simulation을 위한 $C_4F_6$ 초기단면적 결정)

  • Lee, Kyung-Yeob;Jeon, Byung-Hoon
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1544-1545
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    • 2011
  • For quantitative understanding of gas discharge phenomena, we should know electron collision cross section. Processing plasma etching of semiconductor, and research are being used in the etching source $C_4F_6$ gas may be used by itself and mixed with other gases are also used. However, the molecular gas $C_4F_6$ study on the characteristics of the electron transport and the cross-sectional area of the decision is still lacking. Therefore, we understand the electron transport characteristics and analysed the electron transport coefficients. And to understand and interpret physical properties of the ionization coefficient ${\alpha}$/N, and the attachment coefficient ${\eta}$/N in $C_4F_6$ gas.

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A study on the electron transport coefficients in $GeH_4$ gas ($GeH_4$기체의 전자수송계수에 관한 연구)

  • Ryu, Sun-Mi;Jeon, Byung-Hoon
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1404_1405
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    • 2009
  • For quantitative understanding of gas discharge phenomena, we should know electron collision cross section. $GeH_4$ is used in many applications with $Si_2H_6$ gas, such as amorphous alloy, a thin film of silicon and solar cell. Therefore, we understand the electron transport characteristics and analysed the electron transport coefficients, the electron drift velocity W, the longitudinal and transverse diffusion coefficient $ND_L$ and $ND_T$, and the ionization coefficient $\alpha$/N in $GeH_4$gas over the E/N range from 0.01 to 1000 Td by two-term approximation of the Boltzmann equation.

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Analysis of Insulating Characteristics of Cl2-He Mixture Gases in Gas Discharges

  • Tuan, Do Anh
    • Journal of Electrical Engineering and Technology
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    • v.10 no.4
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    • pp.1734-1737
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    • 2015
  • Insulating characteristics of Cl2-He mixture gases in gas discharges were analysed to evaluate ability of these gases for using in medium voltage and many industries. These are electron transport coefficients, which are the electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient, in Cl2-He mixtures. A two-term approximation of the Boltzmann equation was used to calculate the electron transport coefficients for the first time over a wide range of E/N (ratio of the electric field E to the neutral number density N). The limiting field strength values of E/N, (E/N)lim, for these binary gas mixtures were also derived and compared with those of the pure SF6 gas.

The Influence of the Cathode Surface State on the Spark Voltage in the Townsend Discharge Domain (Townsend 방전영역의 불꽃전압에 미치는 음극표면상태의 영향)

  • 백용현
    • 전기의세계
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    • v.28 no.1
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    • pp.73-82
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    • 1979
  • There are a great number of papers on the Townsend discharge in gases, and many of them are concerned with the effect of the cathode. It has been regarded that there are two kinds of effect of the electrodes, especially of the cathode; (a) the effect caused by the difference of the cathode material and (b) the effect by the change of the cathode surface state even in the same material. Both of them may change the secondary coefficient following after the change of the work function, and the atter may further change the primary ionization coefficient as foreign atoms on the surface may be dseorbed in sparks to decrease the purity of the gas. Thus the two effects must be investigated independently to study the roles of the cathode in gas discharges. In this report the effect of the cathode material on the sparking voltage is described. The experiment is also carried out under the condition that the desorption of impurities from the cathode be negligible. From these the new correlativity between the work function of the cathode and the sparking voltage is obtained. In addition, the interesting character of the minimum point of the Paschen's curve can be found.

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Quantitative Analysis of the Marker Constituents in Yongdamsagan-Tang using Liquid Chromatography-Electrospray Ionization-Tandem Mass Spectrometry (LC-ESI-MS/MS를 이용한 용담사간탕의 주요 성분 분석)

  • Seo, Chang-Seob;Ha, Hyekyung
    • Korean Journal of Pharmacognosy
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    • v.48 no.4
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    • pp.320-328
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    • 2017
  • Yongdamsagan-tang has been used to treat the urinary disorders, acute- and chronic-urethritis, and cystitis in Korea. In this study, an ultra-performance liquid chromatography-electrospray ionization-mass spectrometry (UPLC-ESI-MS/MS) method was established for simultaneous analysis of the 20 bioactive marker compounds, geniposidic acid, chlorogenic acid, geniposide, liquiritin apioside, acteoside, calceolarioside B, liquiritin, nodakenin, baicalin, liquiritigenin, wogonoside, baicalein, glycyrrhizin, wogonin, glycyrrhizin, wogonin, saikosaponin A, decursin, decursinol angelate, alisol B, alisol B acetate, and pachymic acid in traditional herbal formula, Yongdamsagan-tang. Chromatographic separations of all marker compounds were conducted using a Waters Acquity UPLC BEH $C_{18}$ analytical column ($2.1{\times}100mm$, $1.7{\mu}m$) at $45^{\circ}C$ using a mobile phase of 0.1% (v/v) formic acid in water and acetonitrile with gradient elution. The MS analysis was performed using a Waters ACQUITY TQD LC-MS/MS coupled with an electrospray ionization source in the positive and negative modes. The flow rate was 0.3 mL/min and injection volume was $2.0{\mu}L$. The correlation coefficient of 20 marker compounds in the test ranges was 0.9943-1.0000. The limits of detection and quantification values of the all marker components were 0.11-6.66 and 0.34-19.99 ng/mL, respectively. As a result of the analysis using the optimized LC-ESI-MS/MS method, three compounds, geniposidic acid (from Plantaginis Semen), alisol B (from Alismatis Rhizoma), and pachymic acid (from Poria Sclerotium), were not detected in this sample. While the amounts of the 17 compounds except for the geniposidic acid, alisol B, and pachymic acid were $0.04-548.13{\mu}g/g$ in Yongdamsagan-tang sample. Among these compounds, baicalin, bioactive marker compound of Scutellariae Radix, was detected at the highest amount as a $548.13{\mu}g/g$.