• Title/Summary/Keyword: Ion beam-assisted deposition method

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Characterization of photonic quantum ring devices manufactured using wet etching process (습식 식각 공정을 이용하여 제작된 광양자테 소자의 특성 분석)

  • Kim, Kyoung-Bo;Lee, Jongpil;Kim, Moojin
    • Journal of Convergence for Information Technology
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    • v.10 no.6
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    • pp.28-34
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    • 2020
  • A structure in which GaAs and AlGaAs epilayers are formed with a metal organic chemical vapor deposition equipment on a GaAs wafer similar to the structure of making a vertical cavity surface emitting laser is used. Photonic Quantum Ring (PQR) devices that are naturally generated by 3D resonance are manufactured by chemically assisted ion beam etching technology, which is a dry etching method. A new technology that can be fabricated has been studied, and as a result, the possibility of wet etching of a solution containing phosphoric acid, hydrogen peroxide and methanol was investigated, and the device fabrication by applying this method are also discussed. In addition, the spectrum of the fabricated optical device was measured, and the results were theoretically analyzed and compared with the wavelength value obtained by the measurement. It is expected that the PQR device will be able to model cells in a three-dimensional shape or be applied to the display field.

Optical Properties of $TiO_2$ Thin Films Prepared by Ion-beam Assisted Deposition (이온빔 보조 증착법에 의해 제작된 $TiO_2$ 박막의 광학적 특성)

  • 조현주;이홍순;황보창권;이민희;박대윤
    • Korean Journal of Optics and Photonics
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    • v.5 no.1
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    • pp.9-17
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    • 1994
  • Optical properties of $TiO_2$ thin films prepared by ion-beam assisted deposition(1BAD) were investigated. The result shows that the refractive index of IBAD TiOL thin films measured by an envelope method is closer to that of the corresponding bulk than that of conventionally deposited $TiO_2$ thin films and the packing density of IBAD $TiO_2$ thin films measured by a vacuum-to-air spectral shift of films increases drastically. The vacuum-to-air spectral shift of an IBAD $(TiO_2/SiO_2)$ multilayer interference filter was negligible as compared to that of a conventional interference filter and so the IBAD filter is denser and more stable optically than the conventional filter. Also it is observed that the IBAD and conventional $TiO_2$ thin films are stoichiometric and amorphous.

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Study on Current Switching in Electronic Devices Based on Vanadium Dioxide Thin Films Using CO2 Laser (이산화탄소 레이저를 이용한 바나듐 이산화물 박막 전자 소자에서의 전류 스위칭에 관한 연구)

  • Kim, Jihoon;Lee, Yong Wook
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.30 no.1
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    • pp.1-7
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    • 2016
  • With a collimated $CO_2$ laser beam, the bidirectional current switching was realized in a two-terminal electronic device based on a highly resistive vanadium dioxide($VO_2$) thin film. A $VO_2$ thin film was grown on a $Al_2O_3$ substrate by a pulsed laser deposition method. For the fabrication of a two-terminal electronic device, the $VO_2$ thin film was etched by an ion beam-assisted milling method, and the $VO_2$ device, of which $VO_2$ patch width and electrode separation were 50 and $100{\mu}m$, respectively, was fabricated through a photolithographic method. A bias voltage range for stable bidirectional current switching was found by using the current-voltage property of the device measured in a current-controlled mode. The transient responses of bidirectionally switched currents were analyzed when the laser was modulated at a variety of pulse widths and repetition rates. A switching contrast was measured as ~3333, and rising and falling times were measured as ~39 and ~21ms, respectively.

The effect of Ca-P coatings of anodized implant surface on response of osteoblast-like cells in vitro (임플란트 표면의 Ca-P 코팅 방법이 MG63 골모유사세포 반응에 미치는 영향에 대한 in vitro 연구)

  • Kim, Il-Yeon;Jung, Sung-Min;Hwang, Soon-Jung;Shin, Sang-Wan
    • The Journal of Korean Academy of Prosthodontics
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    • v.47 no.4
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    • pp.376-384
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    • 2009
  • Purpose: The purpose of this study was to evaluate the response of osteoblast-like cells to Ca-P coated surface obtained via Ion beam-assisted deposition (IBAD) method and Sol-Gel process on anodized surface by cellular proliferation and differentiation. Material and methods: The surface of a commercially pure titanium (Grade IV) discs with dimension of 10mm diameter and 2 mm thickness was modified by anodic oxidation under a constant voltage of 300 V. The experimental groups were coated with Ca-P by the IBAD method and Sol-Gel process on anodized surface. The surface roughness (Ra) of specimens was measured by optical interferometer and each surface was examined by SEM. To evaluate cell response, MG63 cells were cultured and cell proliferation, ALP activity and the ability of cell differentiation were examined. Also, cell morphology was examined by SEM. The significant of each group was verified by Kruskal-Wallis Test ($\alpha$=.05). Results: The Ra value of Ca-P coated surface by IBAD method was significantly higher than Ca-P coated surface by Sol-gel process (P < .05). The level of cell proliferation and ALP activity was higher in Ca-P coated surface by IBAD method (P<.05). The expression of ALP showed higher level expression in Ca-P coated surface by IBAD method. Cells grown on Ca-P coated surface by IBAD method were uniformly distributed and developed a very close layer. Conclusion: These experiments showed better performances of Ca-P coated surface by IBAD method with respect to Ca-P coated surface by Sol-gel process. Ca-P coated surface by IBAD method appear to give rise more mature osteoblast characteristics and might result in increased bone growth and bone-implant contact.

Collagen Formation and Adhesion of Human Gingival Fibroblasts on the IBAD Ca-P Coating on Ti

  • B. H. Zhao;F. Z. Cui;Lee, I-S.;W. Bai;H. L. Feng
    • Journal of the Korean Vacuum Society
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    • v.12 no.S1
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    • pp.10-14
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    • 2003
  • Coatings of hydroxyapatite (HA) and tricalcium phosphate/HA (TCP/HA) on titanium were fabricated by ion beam assisted deposition (IBAD). Significant effect of the Ca-P coatings on human Gingival Fibroblasts (HGFs) attachment and formation of type I collagen were found by using immunofluorescence microscope. TCP/HA and HA coatings exerted more HGFs attachment and collagen I formation. Comparing with HA coating, TCP/HA coating exhibited better responses during the late period of the tests. This investigation indicated that this surface modification method may enhance the biological seal at the cervical level of the titanium dental implants.

EFFECTS OF THE ION BEAM ASSISTED DEPOSITION OF HYDROXYAPATITE ON OSSEOINTEGRATION OF THE ENDOSSEOUS IMPLANTS IN RABBIT TIBIAE (이온빔 보조 전자빔 수산화 인회석 증착이 골내 임플란트의 골유착에 미치는 영향)

  • Jung, Young-Chul;Han, Chong-Hyun;Lee, In-Seop;Lee, Hyeon-Jeong;Kim, Myeong-Ho
    • The Journal of Korean Academy of Prosthodontics
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    • v.38 no.5
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    • pp.659-674
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    • 2000
  • A large increase in the use of thin film coating of hydroxyapatite(HA) in implant dentistry is driven by the desire to take advantage of the excellent biocompatibility and high strength of HA coating. The purpose of this study was to evaluate the effects of HA-coated implants by ion Beam Assisted Deposition(IBAD) method in comparison to the sand-blasted and machined surfaces. Osteoblast culture test, removal torque test and histomorphometric analysis were performed and the following results obtained; 1. Examination of the osteoblast cultures displayed no difference in the secretion of alkaline phosphatase between the various specimen, but IBAD with pure HA specimen showed low alkaline phosphatase secretion(p<0.05). 2. Removal torque tests showed HA-coated implants by IBAD method to be similar in high value to the implants with sand-blasted surface than the implants with machined surface. And the ovariectomized group showed low mechanical test value than the normal group(p<0.05). 3. Histomorphometrical comparisons were performed on undecalcified ground sections. HA-coated implants by IBAD method demonstrated the highest mean bone-to-metal contact ratio on all threads and 3-best consecutive threads, and the implants with sand-blasted surface and implants with machined surface was in the next consecutive order(p<0.05). HA-coated implants showed slightly higher bone-to- metal contact ratio than sand-blasted implants, but no statistically significant difference was obtained between the two materials. The ovariectomized group showed lower value of bone-to-metal contact ratio than the normal group, but no statistically significant difference was obtained between the two groups. 4. Evaluation of bone volume on all threads and 3-best consecutive threads showed no statistically significant difference among the different surface treatment groups, but showed lower bone volume in ovariectomized group than in the normal group(p<0.05). According tn these results, thin film coated implants with HA showed high bone contact ratio, bone volume and removal torque strength in the short term, but long term observation is needed.

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Bidirectional Current Triggering in Two-Terminal Planar Device Based on Highly Resistive Vanadium Dioxide Thin Film Using 966nm Near Infrared Laser (966nm 근적외선 레이저를 이용한 고저항성 바나듐 이산화물 박막 기반 2단자 평면형 소자에서의 양방향 전류 트리거링)

  • Kim, Jihoon;Lee, Yong Wook
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.29 no.11
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    • pp.28-34
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    • 2015
  • By incorporating a 966nm near infrared laser, we demonstrated bidirectional current triggering of between 0 and 10mA in a two-terminal planar device based on a highly resistive vanadium dioxide ($VO_2$) thin film grown by a pulsed laser deposition method. A two-terminal planar device, which had an electrode separation of $100{\mu}m$ and a $50{\mu}m-wide$ $VO_2$ conducting layer, was fabricated through ion beam-assisted milling and photolithographic techniques. A bias voltage range for stable bidirectional current triggering was determined by investigating the current-voltage curves of the $VO_2-based$ device in a current-controlled mode. Bidirectional current triggering of up to 10mA was realized by directly illuminating the $VO_2$ film with a focused infrared laser beam, and the transient responses of triggered currents were analyzed when the laser was modulated at various pulse widths and repetition rates. A switching contrast between off- and on-state currents was evaluated as ~3571, and the rising and falling times were measured as ~40 and ~20ms, respectively.

Growth and characterization of oxide buffer layer on IBAD_MgO template for HTS coated conductors (박막형 고온초전도 선재를 위한 산화물 완충층의 IBAD_MgO 기판에서의 성장과 특성)

  • Ko, Rock-Kil;Jang, Se-Hoon;Ha, Hong-Soo;Kim, Ho-Sup;Song, Kyu-Jeong;Ha, Dong-Woo;Oh, Sang-Soo;Park, Chan;Moon, Seung-Hyun;Kim, Young-Cheol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.297-297
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    • 2008
  • Buffer layers play an important role in the development of high critical current density coated conductor. $LaMnO_3$, $SrTiO_3$ and $BaZrO_3$ buffer layers were compatible with MgO surfaces and also provide a good template for growing high current density REBCO(RE=Rare earth) films. Systematic studies on the influences of pulsed laser deposition parameters (deposition temperature, deposition pressure, processing gas, laser energy density, etc.) on microstructure and texture properties of $LaMnO_3$, $SrTiO_3$ and $BaZrO_3$ films as buffer layer deposited on ion-beam assisted deposition MgO (IBAD_MgO) template by pulse laser deposition method, were carried out. These results will be presented together with the discussion on the possible use of this material in HTS coated conductor as buffer.

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BONE RESPONSE OF TWO DIFFERENT SURFACE TITANIUM SUBPERIOSTEAL IMPLANTS - ANODIZED SURFACE, IBAD HA COATING SURFACE (티타늄 임플랜트의 두 가지 표면처리방식에 대한 골반응 - 양극 산화표면, IBAD HA 코팅 표면)

  • Lee, In-Ku;Suh, Kyu-Won;Choi, Joon-Eon;Jung, Sung-Min;Ryu, Jae-Jun
    • The Journal of Korean Academy of Prosthodontics
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    • v.45 no.1
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    • pp.131-143
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    • 2007
  • Statement of the problem: In case of poor bone quality or immediately loaded implant, various strategies have been developed focusing on the surface of materials to improve direct implant fixation to the bone. The microscopic properties of implant surfaces play a major role in the osseous healing of dental implant. Purpose of study: This study was undertaken to evaluate bone response of ion beam-assisted deposition(IBAD) of hydroxyapatite(HA) on the anodized surface of subperiosteal titanium implants. Material and methods: Two half doughnut shape subperiosteal titanium implants were made. The control group was treated with Anodized surface treatment and the test group was treated with IBAD of HA on control surface. Then two implants inserted together into the subperiosteum of the skull of 30 rats and histological response around implant was observed under LM(light microscope) and TEM(transmission electron microscope) on 4th, 6th and 8th week. Results: Many subperiosteal implants were fixed with fibrous connective tissue not with bony tissue because of weak primary stability. The control group observed poor bone response and there was no significant change at any observation time. However the test group showed advanced bone formation and showed direct bone to implant contact under LM on 8th week. The test group observed much rER in the cell of osteoblast but the control group showed little rER under TEM. Conclusions: The test group showed better bone formation than the control group at the condition of weak primary stability. With these results IBAD surface treatment method on Anodized surface, may be good effect at the condition of weak primary stability.

BONE RESPONSE OF THREE DIFFERENT SURFACE IMPLANTS : HISTOMORPHOMETRIC, PERIO TEST VALUE AND RESONANCE FREQUENCY ANALYSIS IN BEAGLE DOGS

  • Choi, Joon-Eon;Suh, Kyu-Won;Lee, In-Ku;Ryu, Jae-Jun;Shin, Sang-Wan
    • The Journal of Korean Academy of Prosthodontics
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    • v.45 no.3
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    • pp.362-374
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    • 2007
  • Statement of problem. The intial stability for osseointegration of implant has been an interesting factor. Especially, in the case of poor bone quality or immediately loaded implant, various strategies have been developed focusing on the surface of materials to improve implant fixation to bone. The microscopic properties of implant surfaces play a major role in the osseous healing of dental implants. Purpose. The aims of this study are to perform a histologic and histomorphometric comparison of the healing characteristics of three different surfaces and the comparison of resonance frequency analysis (RFA) values measured by $Osstell^{TM}$ and perio-test values (PTV) measured by Periotest. Material and methods. A total of 24 screw titanium implants (Dentium Co., Seoul, Korea) with 6mm in length and 3.4mm in diameter, were placed in the mandible of 4 beagle dogs. Implants were divided into three groups following the surface treatment methods: Group I is machined(control group). Group II is anodically oxidized. Group III is coated 500nm in thickness with hydroxyapatite(HA) by ion beam assisted deposition(IBAD) on the anodized oxidization. Bone blocks from 2 dogs were caught after 3 weeks of covered healing and another blocks from 2 dogs after 6 weeks. RFA values and PTV were measured right after insertion and at 3 and 6weeks. Histomorphometric analysis was made with Kappa Image Base System to calculate bone-to-implant contact (BIC) and bone area inside the threads. Pearson's correlation analyses were performed to evaluate the correlation between RFA and PTV, BIC and bone area ratio of three different surfaces at 3 and 6 weeks. Results. 1) In all surface treatment methods, the RFA values decreased and the PTV values increased until 6 weeks in comparison to initial values. 2) At 3 weeks, no significant difference was found from bone-to-implant contact ratio and bone area ratio of three different surface treatment methods(P>0.05). However, at 6 weeks, different surface treatment methods showed significantly different bone-toimplant contact ratio and bone area ratio(P<0.05). 3) In the implants with the IBAD on the anodic oxidization, significant difference was found between the 3 weeks and the 6 weeks bone area ratio(P<0.05). 4) Correlation was found between the RFA values and the bone area ratio at 3 and 6 weeks with significant difference(P<0.05). Conclusions. These results indicate that the implants with the IBAD on the anodic oxidization may have a high influence on the initial stability of implant.