• Title/Summary/Keyword: Ion beam method

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Fabrication of a Resonator using suspended Multi-wall Carbon Nanotubes (다중벽 탄소나노튜브를 이용한 공진기 제작)

  • Lee J.H.;Seo H.W.;Song J.W.;Han C.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.465-466
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    • 2006
  • A single-wall carbon nanotube (SWCNT) has been studied as a material of Nano-Eletro-Mechanical-System (NEMS) device together with various nanowires. In order for oscillation of a multi-wall carbon nanotube (MWCNT) or a single-walled carbon nanotube (SWCNT) on plane surface, it needs suspension of a CNT across trench electrodes. So we propose fabrication method of a MWCNT resonator using dielectrophoresis and show successful results of suspeneded MWNT. Thin electrodes with large gaps could not suspend small diameter MWNT but thicker electrodes could. Thin MWNT could be suspended only when the electrode gap was reduced.

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A Study on the Tribological Characteristics of Thermally Evaporated Silver Films Assisted by Atomic Mixing (원자혼합법으로 증착된 은 박막의 트라이볼로지적 특성에 관한연구)

  • 양승호;공호성;윤희성
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.11a
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    • pp.27-34
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    • 2001
  • A new functionally gradient metal coating method using an atomic mixing technique was developed. In this work the effect of silver atomic mixing on the tribological characteristics of silver$.$ films. has been investigated experimentally. Atomic mixing was implemented by using the, bombardment .of accelerated Ar ions during the thermal evaporation coating process of silver films. Experiments were performed in dry conditions using a ball-on-disk test rig at a load range of 19.6 mN - 17.64 N and a sliding velocity of 20 mm/sec. Results showed that the life of functionally gradient silver coating was enhanced about 100 times more than that of thermally evaporated silver coating and 2 times more than that of IBAD silver coating. The functionally gradient. film also showed low friction and wear compared to those of the evaporated silver and

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Waveguides Fabrication for Optical Integrated Devices Application on Relaxor-ferroelectric $Pb(Mg_{1/3}Nb_{2/3})O_{3}-PbTiO_3$Single Crystal (완화형 강유전체$Pb(Mg_{1/3}Nb_{2/3})O_{3}-PbTiO_3$ 단결정의 광 집적소자 응용을 위한 도파로 제작)

  • Yang, Woo-Seok;Lee, Sang-Goo;Koo, Kyoung-Hwan;Huh, Hyun;Yoon, Dae-Ho;Lee, Han-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.546-547
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    • 2002
  • Ni thin film on the PMN-PT crystal wafer were deposited by using E-beam evaporator technique. Deposited film was patterned by UV-lithography and etching and was in-diffused at 300~600C. Diffusion profile of Ni ions in PMN-PT was measured by secondary ion mass spectroscopy (SIMS).

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Analysis of Sticking Coefficient in BSCCO Thin Film (BSCCO 박막의 부착계수 해석)

  • Chun, Min-Woo;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.252-255
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    • 2002
  • BSCCO thin films are fabricated by an ion beam sputtering method, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about $730^{\circ}C$ and decreased linearly over about $730^{\circ}C$. In contrast, Sr and Ca, displayed no such remarkable temperature dependence. This behavior of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of $Bi_{2}O_{3}$. It was concluded that Bi(2212) thin film constructs from the partial melted Bi(2201) phase with the aid of the liquid phase of $Bi_{2}O_{3}$.

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A Study on the Computerization of Anthropomorphic Data (인체 형상 자료의 전산화에 관한 연구)

  • Lee, Geun-Bu
    • Journal of the Ergonomics Society of Korea
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    • v.7 no.2
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    • pp.23-30
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    • 1988
  • The methods suggested up to now for 3-dimensional anthroponetry require much efforts and costs in measuring and analysing. To solve these problems, we adopt the methods such as Moire Interferometry, Image processing and Computer Vision Technique which are efficient in processing anthropomorphic data. Moire contourgraph was constructed by using Ar-ion laser as a light source (2 Watt power and 5145 A wavelength) and laser beam expander(20X). Image data can be 3-dimensionally reconstructed as the surface patch and geographical relation between faces expressed by mash-point and edges as units. This research is focused on the followings; 1) Development of an economical and reliable measuring method. 2) Design of reproduction methods of 3-dimensional human body data. Therefore, our research makes it possible to study further advanced quantitative analysis of human body.

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Collagen Formation and Adhesion of Human Gingival Fibroblasts on the IBAD Ca-P Coating on Ti

  • B. H. Zhao;F. Z. Cui;Lee, I-S.;W. Bai;H. L. Feng
    • Journal of the Korean Vacuum Society
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    • v.12 no.S1
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    • pp.10-14
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    • 2003
  • Coatings of hydroxyapatite (HA) and tricalcium phosphate/HA (TCP/HA) on titanium were fabricated by ion beam assisted deposition (IBAD). Significant effect of the Ca-P coatings on human Gingival Fibroblasts (HGFs) attachment and formation of type I collagen were found by using immunofluorescence microscope. TCP/HA and HA coatings exerted more HGFs attachment and collagen I formation. Comparing with HA coating, TCP/HA coating exhibited better responses during the late period of the tests. This investigation indicated that this surface modification method may enhance the biological seal at the cervical level of the titanium dental implants.

A Study on the Diffusion Barrier Properties of Pt/Ti and Ni/Ti for Cu Metallization (구리 확산에 대한 Pt/Ti 및 Ni/Ti 확산 방지막 특성에 관한 연구)

  • 장성근
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.2
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    • pp.97-101
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    • 2003
  • New Pt/Ti and hi/Ti double-metal structures have been investigated for the application of a diffusion barrier between Cu and Si in deep submicron integrated circuits. Pt/Ti and Ni/Ti were deposited using E-beam evaporator at room temperature. The performance of Pt/Ti and Ni/Ti structures as diffusion barrier against Cu diffusion was examined by charge pumping method, gate leakage current, junction leakage current, and SIMS(secondary ion mass spectroscopy). These evaluation indicated that Pt/Ti(200${\AA}$/100${\AA}$) film is a good barrier against Cu diffusion up to 450$^{\circ}C$.

Characteristics of BSCCO Thin Film by Layer-by-layer Deposition (순차 스퍼터 법에 의한 BSCCO 박막의 특성)

  • 이희갑;박용필;김귀열;오금곤;최운식;조춘남
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.281-283
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    • 2001
  • Bi$_2$Sr$_2$CuO$\_$x/(Bi-2201) thin films were fabricated layer-by-layer deposition using an ion beam sputtering method. 10 wt% and 90 wt% ozone mixed with oxygen were used ultraviolet light irradiation to assist oxidation. At early stages of the atomic layer by layer deposition, two dimensional epitaxial growth which covers the substrate surface would be suppressed by the stress and strain caused by the lattice misfit, then three dimensional growth takes place. Since Cu element is the most difficult to oxidize, only Sr and Bi react with each other predominantly, and forms a buffer layer on the substrate in an amorphous-like structure, which is changed to SrBi$_2$O$_4$ by in-situ anneal.

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Bi-sticking Coefficient of Bi-superconducting Thin Film Prepared by IBS Method

  • Lee, Hee-Kab;Lee, Joon-Ung;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.213-216
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    • 1999
  • BSCCO thin films are fabricated via a co-deposition process by an ion beam sputtering with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element exhibits a characteristics temperature dependence : almost a constant value of 0.49 below 730$^{\circ}C$ and decreases linearly with temperature over 730$^{\circ}C$. This temperature dependence can be elucidated from the evaporation and sublimation rates of bismuth oxide, Bi$_2$O$_3$ from the film surface. It is considered that the liquid phase of the bismuth oxide plays an important role in the Bi(2212) phase formation in the co-deposition process.

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Study of electrochromic cells in $WO_{3}$/$MoO_{3}$ double-layer structure ($WO_{3}$$ MoO_{3}$ 이중층을 가진 전기변색 소자에 관한 연구)

  • 임석범;임동규;백희원;김영호;조봉희;유인종;변문기
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.515-518
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    • 2000
  • The electrochromic properties of $WO_{3}$/$MoO_{3}$ and $MoO_{3}$/$WO_{3}$ double-layers have been systemically studied. The double-layers were made by a e-beam evaporation method and investigated by studying optical modulation, transmittance, and cyclic voltammetry. The devices exhibit good optical properties with wavelength range of 400 to 1100 nm(visible and infrared) during coloration as a function of lithium ion charge injection. It has shown that the double-layer electrochromic thin films are improved the electrochromic properties, but the electrochemical properties are less stable.

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