Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
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- Pages.252-255
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- 2002
Analysis of Sticking Coefficient in BSCCO Thin Film
BSCCO 박막의 부착계수 해석
- Chun, Min-Woo (Dept. of Electrical & Electronic Eng., Dongshin University) ;
- Park, Yong-Pil (Dept. of Electrical & Electronic Eng., Dongshin University)
- Published : 2002.11.07
Abstract
BSCCO thin films are fabricated by an ion beam sputtering method, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about