• Title/Summary/Keyword: Ion beam method

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Epitaxial Growth of BSCCO Films by Leyer-by-Layer Deposition (순차 증착에 의한 BSCCO 박막의 에피택셜 성장)

  • 안준호;박용필;김정호
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.10
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    • pp.855-860
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    • 2001
  • Bi$_2$Sr$_2$CuO$_{x}$(Bi-2201) thin film were fabricated by atomic layer-by -layer deposition using an ion beam sputtering method. 10 wt% and 90 wt% ozone mixed oxygen were used with ultraviolet light irradiation to assist oxidation. XRD and RHEED investigations revealed that a buffer layer is formed at the early stage of deposition (less than 10 unit cell), and then c-axis oriented Bi-2201 grows on top of it.t.

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Analysis of Sticking Coefficient in BSCCO Thin Film Fabricatied for apply to Biomedical device (의용소자로 응용하기 위해 제작한 BSCCO 박막의 부착계수 해석)

  • Yang, Seung-Ho;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.351-352
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    • 2006
  • BSCCO thin films are fabricated by an ion beam sputtering method, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about $730^{\circ}C$ and decreased linearly over about $730^{\circ}C$. In contrast, Sr and Ca, displayed no such remarkable temperature dependence. This behavior of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of $Bi_2O_3$. It was concluded that Bi(2212) thin film constructs from the partial melted Bi(2201) phase with the aid of the liquid phase of $Bi_2O_3$.

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A novel in-situ vacuu encapsulted lateral field emitter triode (자체적으로 진공을 갖는 수평형 전계 방출 트라이오드)

  • 임무섭;박철민;한민구;최연익
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.12
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    • pp.65-71
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    • 1996
  • A novel lateral field emitter triode has been designed and fabricated. It has self-vacuum environmets and low turn-on voltage, so that the chief problems of previous field emission devices such as additional vacuum sealing process and high turn-on voltage are settled. An in-situ vaccum encapsulation empolying recessed cavities by isotropic RIE (reactive ion etch) method and an electron beam evaporated molybdenum vacuum seals are implemented to fabricate the new field emitter triode. The device exhibits low turn-on voltage of 7V, stabel current density of 2.mu.A/tip at V$_{AC}$ = 30V, and high transconductance (g$_{m}$) of 1.7$\mu$S at V$_{AC}$ = 22V. The superb device characteristics are probably due to sub-micron dimension device structure and the pencil type lateral cathode tip employing upper and lower LOCOS oxidation.

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A Geometric Structure for Uniform Bend Transition in a pi cell

  • Kim, Tae-Jin;Lee, Seo-Hern;Park, Kyoung-Ho;Gwang, Jin-Seog;Lee, Gi-Dong;Yoon, Tae-Hoon;Kim, Jae-Chang
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.551-554
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    • 2003
  • A novel geometric solution for uniform bend transition in a pi cell has proposed. In order to obtain the uniform bend transition, we applied hybrid domain structure to the edge of a LC cell by using ion-beam alignment method. As a result, we confirmed that the uniform bend transition has arisen from the edge to the center. From the proposed structure, we expect that the reliable and uniform bend transition can be achieved in the pi cell.

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Analysis of Sticking Coefficient in Bi-Superconducting Thin film (Bi 초전도 박막의 부착계수 해석)

  • 천민우;박용필;이성일
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.11
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    • pp.997-1002
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    • 2002
  • BSCCO thin films are fabricated by an ion beam sputtering method, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about 730$^{\circ}C$ and decreased linearly over about 730$^{\circ}C$ In contrast, Sr and Ca, displayed no such remarkable temperature dependence. This behavior of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi$\sub$2/O$\sub$3/. It was concluded that Bi(2212) thin film constructs from the partial melted Bi(2201) phase with the aid of the liquid phase of Bi$\sub$2/O$\sub$3/.

A Study on the Epitaxial Growth of Superconducting Thin Film (초전도 박막의 에피택셜 성장에 관한 연구)

  • Lee, Hee-Kab;Park, Yong-Pil;Kim, Gwi-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.208-211
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    • 2002
  • $Bi_2Sr_2CuO_x$(Bi-2201) thin films were fabricated by atomic layer-by-layer deposition using an ion beam sputtering method. 10 wt% and 90 wt% ozone mixed with oxygen were used with ultraviolet light irradiation to assist oxidation. At early stages of the atomic layer by layer deposition, two dimensional epitaxial growth which covers the substrate surface would be suppressed by the stress and strain caused by the lattice misfit, then three dimensional growth takes place. Since Cu element is the most difficult to oxidize, only Sr and Bi react with each other predominantly, and forms a buffer layer on the substrate in an amorphous-like structure, which is changed to $SrBi_2O_4$ by in-situ anneal.

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Superconducting Characteristics of BSCCO Thin Film Fabricated by Co-deposition (동시 증착으로 제작한 BSCCO 박막의 초전도 특성)

  • Lee, Hee-Kab;Lee, Joon-Ung;Park, Yong-Pil
    • Proceedings of the KIEE Conference
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    • 1999.11d
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    • pp.929-931
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    • 1999
  • BSCCO thin films have been fabricated by co-deposition at an ultralow growth rate using ion beam sputtering(IBS) method. Bi 2212 phase appeared in the temperature range of 750 and $795^{\circ}C$ and single phase of Bi 2201 existed in the lower region than $785^{\circ}C$. Whereas, ozone gas pressure dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with $T_c$(onset) of about 90 K and $T_c$(zero) of about 45 K is obtained. Only a small amount of CuO in some films was observed as impurity, and no impurity phase such as $CaCuO_2$ was observed in all of the obtained films.

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Alignment Effects for Nematic Liquid Crystal using a-C:H Thin Films Deposited at Rf Bias Condition (RF 바이어스 조건하에서 증착된 a-C:H 박막을 이용한 네마틱 액정의 배향 효과)

  • 황정연;박창준;서대식;안한진;백홍구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.5
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    • pp.526-529
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    • 2004
  • The nematic liquid crysta](NLC) aligning capabilities using a-C:H thin film deposited at the three kinds of rf bias condition were investigated. A high pretilt angle of NLC on low substrate rf bias applied a-C:H thin films was observed and the low pretilt angle of the NLC on high substrate rf bias applied a-C:H thin films was observed. Consequently, the high NLC pretilt angle and the good aligning capabilities of LC alignment by the IB alignment method on the a-C:H thin film deposited at 1 W rf bias condition can be achieved. It is considered that pretilt angle of the NLC may be attributed to substrate rf bias condition and IB energy time. Therefore, LC alignment is affected by topographical structure forming strong IB energy.

DOPING EFFICIENCIES OF OXYGEN VACANCY AND SN DONOR FOR ITO AND InO THIN FILMS

  • Chihara, Koji;Honda, Shin-ichi;Watamori, Michio;Oura, Kenjiro
    • Journal of the Korean institute of surface engineering
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    • v.29 no.6
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    • pp.876-879
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    • 1996
  • The effect of oxygen vacancy and Sn donor on carrier density for Indium Tin oxide (ITO) and Indium oxide (InO) films has been investigated. Hot-cathode Penning discharge sputtering (HC-PDS) in the mixed gasses of argon and oxygen was applied to fabricate the ITO and InO films. Density of oxygen vacancy was estimated using a high-energy ion beam technique. The electrical properties of the films such as resistivity, carrier density and mobility were estimated by Van der Pauw method. The doping efficiency of oxygen vacancy could be obtained from the relationship between oxygen vacancy and carrier density. The doping efficiency of oxygen vacancy for ITO films resulted in a quite small value. Comparing the doping efficiencies of ITO and InO films, the effect of Sn donor on carrier density was also discussed.

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Electromechanical Simulation of Cellulose Based Biomimetic Electro-Active Paper (생체모방 종이작동기(electro-active paper)의 전기기계적인 구동 시뮬레이션)

  • Jang, Sang-Dong;Kim, Jae-Hwan;Kim, Heung-Soo
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.17 no.12
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    • pp.1179-1183
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    • 2007
  • Electro-Active paper(EAPap) is a new smart material that has a potential to be used in biomimetic actuator and sensor. It is made by cellulose that is abundant material in nature. EAPap is fascinating with its biodegradability, lightweight, large displacement, high mechanical strength and low actuation voltage. Actuating mechanism of EAPap is known to be the combined effects of ion migration and piezoelectricity. However, the electromechanical actuation mechanisms are not yet to be established. This paper presents the modeling of the actuation behavior of water infused cellulose samples and their composite dielectric constants calculated by Maxwell-Wagner theory. Electro-mechanical forces were calculated using Maxwell stress tensor method. Bending deflection was evaluated from simple beam model and compared with experimental observation, and which result in good correlation with each other.