Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.11a
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- Pages.351-352
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- 2006
Analysis of Sticking Coefficient in BSCCO Thin Film Fabricatied for apply to Biomedical device
의용소자로 응용하기 위해 제작한 BSCCO 박막의 부착계수 해석
- Yang, Seung-Ho (Dongshin University) ;
- Park, Yong-Pil (Dongshin University)
- Published : 2006.11.09
Abstract
BSCCO thin films are fabricated by an ion beam sputtering method, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about